67 results about "Mass flow sensor" patented technology

A mass flow controller and methods of providing for mass flow control are provided. A mass flow controller includes a control valve configured to control flow of a fluid in a flow path. A first flow sensor detects a first set of fluid flow parameters, and a second flow sensor detects a second set of fluid flow parameters. The first and second flow sensors are of distinct flow measurement types. The mass flow controller further includes a controller configured to determine a set of first mass flow rates based on the first set of fluid flow parameters detected by the first flow sensor and calibrate the second flow sensor based on the determined set of mass flow rates of the first mass flow sensor and the second set of fluid flow parameters.

A mass flow controller and methods of providing for mass flow control are provided. A mass flow controller includes a control valve configured to control flow of a fluid in a flow path. A first flow sensor detects a first set of fluid flow parameters, and a second flow sensor detects a second set of fluid flow parameters. The first and second flow sensors are of distinct flow measurement types. The mass flow controller further includes a controller configured to determine a set of first mass flow rates based on the first set of fluid flow parameters detected by the first flow sensor and calibrate the second flow sensor based on the determined set of mass flow rates of the first mass flow sensor and the second set of fluid flow parameters.

A system and method for early warning of solids pluggage in a gas-solid multi-phase flow through transport pipe. At least one doppler radar-based mass flow sensor measures reflections of signals from solid particles that are carried in a gas transport stream by the transport pipe from a solid particles feed source to a solid particles processing location. A controller detects conditions in the gas transport stream carrying the solid particles in the transport pipe that are representative of an early warning of pluggage of solid particles in the pipe as a function of information provided by the at least one doppler radar-based mass flow sensor.

A flow measurement system includes two or more flow sensors that may operate simultaneously and a plurality of connected flow paths for flow of fluids. Each flow sensor is positioned along a different flow path of the plurality of connected flow paths and includes at least one flow tube and a support that clamps the flow tube. The flow tube of each flow sensor has a different resonant frequency so that cross-talk between the flow sensors can be reduced or eliminated. In some embodiments, the flow tube of each flow sensor has a different tube length, wall thickness, material, and / or weight. The flow measurement system can also include one or more pumps for pumping fluid into the flow sensors and a dampener arranged between a pump and a corresponding flow sensor for mitigating interference on the flow sensor from operation of the pump.

The present invention provides a calibration method for a mass flow controller, comprising: obtaining a plurality of set flow values of the mass flow controller, and detecting a plurality of first standard flow values corresponding to the plurality of flow set values of the mass flow controller through a standard flow detection device; calculating a plurality of first theoretical flow values corresponding to the plurality of set flow values according to the flow control curve currently stored in the mass flow controller; calculating deviation values between the plurality of first standard flow values and the corresponding set flow values, and compensating the plurality of deviation values to the plurality of first theoretical flow values to obtain a new flow control curve; using the new flow control curve as the flow control curve currently stored in the mass flow sensor for calibration. The calibration method provided by the present invention can adjust the previously determined flow control curve based on the standard flow detection device, improving the accuracy of the mass flow controller in controlling the flow. The present invention also provides a calibration system for a mass flow controller.

Method (100) for classifying coatings (230) in a measuring tube (200), comprising: determining (110) a damping value D for at least one vibration mode of an oscillator with at least one measuring tube (200) of a Coriolis mass flow sensor for guiding a medium (220); determining (120) a modal stiffness value k for at least one vibration mode; and classifying (150) the coating (230) as a function of the damping value D and the stiffness value k.

The invention discloses a gas circuit pipeline restraining part for an ion implanter, and particularly relates to the field of ion implanters, the gas circuit pipeline restraining part comprises a purging connector, the input end of the purging connector is connected with a gas cylinder, and the output end of the purging connector is connected with a gas pipe; a pressure reducing valve, a main shut-off valve, a filter, a pneumatic valve, a pressure sensor, a mass flow sensor and a control valve are sequentially connected to the air pipe, the control valve is connected with a leak detection opening and a vacuum chamber, the vacuum chamber is connected with a tail gas treatment system through a vacuum pump set, an outer pipe is sleeved outside the inner pipe, the leak detection sensor is arranged in the outer pipe, and the inner pipe and the outer pipe are communicated with a purging air source. The inner pipe and the outer pipe are respectively communicated with the vacuum pump set; the inner pipe is sleeved with the outer pipe in a full-length mode, gas leakage in the inner pipe is avoided, the communicating pipe connected to the inner pipe is sealed through the sealing plug, the inner pipe is kept closed when not needing to be purged and opened when needing to be purged, and the inner pipe is purged comprehensively.

The utility model relates to the technical field of filling equipment, in particular to filling equipment for an automobile air suspension system, which comprises a cabinet, an air storage tank is fixedly connected inside the cabinet and comprises a first pressure gauge, a safety valve, a manual deflation valve and a pressure sensor, one end of the manual deflation valve is fixedly connected with a filling pipeline, and the other end of the manual deflation valve is fixedly connected with an air outlet of the filling pipeline. A fine filter, an electric proportional valve, a mass flow sensor, a second pressure gauge and a gun inflation valve are fixedly connected between the filling pipelines, and the tail end of the gun inflation valve is fixedly connected with a filling gun. According to the air suspension system, traditional manual inflation is replaced, so that the inflation efficiency of the air suspension system is improved, the inflation pressure is stable, the detection feedback function is achieved, and maintenance and repair are convenient. And moreover, the cost generated by using the inert gas is reduced, the labor is saved, the labor intensity of operators is reduced, and the speed of an automobile production line is greatly increased.

A system and method for early warning of solids pluggage in a gas-solid multi-phase flow through transport pipe. At least one doppler radar- based mass flow sensor measures reflections of signals from solid particles that are carried in a gas transport stream by the transport pipe from a solid particles feed source to a solid particles processing location. A controller detects conditions in the gas transport stream carrying the solid particles in the transport pipe that are representative of an early warning of pluggage of solid particles in the pipe as a function of information provided by the at least one doppler radar-based mass flow sensor.

A Mass Flow Sensor (MFS) is provided and includes an MFS housing, a mounting structure, having a mounting structure top and a mounting structure bottom, wherein the MFS housing is associated with the mounting structure top, a first sensor leg, wherein the first sensor leg extends away from the mounting structure bottom and includes a first temperature measurement device and a heating element. The MFS further includes a second sensor leg, wherein the second sensor leg extends away from the mounting structure and includes a second temperature measurement device and an airfoil structure, wherein the airfoil structure defines an airfoil cavity and is associated with the mounting structure bottom to contain the first sensor leg and the second sensor leg.

The utility model relates to a mass flow sensor and a shell thereof. The shell of the mass flow sensor comprises a pipe body, the pipe body comprises a large-diameter section and a small-diameter section which are connected, the inner diameter of the small-diameter section is smaller than that of the large-diameter section, the outer wall of the small-diameter section is provided with an installation part used for installing a heating element and a temperature measuring element, and the installation part is provided with a detection flow channel. A drainage inlet hole and a drainage outlet hole are further formed in the tube wall of the small-diameter section in a penetrating mode, the drainage inlet hole and the drainage outlet hole are formed in the axial direction of the small-diameter section in a spaced mode, the drainage inlet hole is communicated with one end of the detection flow channel, and the drainage outlet hole is communicated with the other end of the detection flow channel. The shell of the mass flow sensor can improve the detection precision of the mass flow sensor.

A retrofit device for determining a mass flow in a fuel line (12) and a method that can be carried out using this device are proposed. The device comprises an additional fluid line (14) through which an additional fluid can flow, which has at least one physical property that differs in magnitude from the same physical property of the fuel, an inlet region (16) via which the retrofit device can be connected to the fuel line (12), a mass flow sensor (18) arranged in the additional fluid line (14), a storage unit (28) in which measured values ​​of the physical property of the fuel and the additional fluid that differ in magnitude can be stored, a first property sensor (20),via which the physical property of a mixed fluid comprising the fuel and the additional fluid, which differs in size, can be measured downstream of a first mixing region (22), and a computing unit (30) via which a mass flow in the fuel line (12) downstream of the first mixing region (22) can be calculated from the known mass flow in the additional fluid line (14), the measured values ​​of the first physical property sensor (20) and the measured values ​​of the physical property of the fuel and the additional fluid, which differs in size, stored in the storage unit (28).

Various embodiments include a combustion apparatus. An example apparatus includes: a burner; a side duct; and a feed duct. The side duct comprises an inlet, an outlet, and a mass flow sensor between the inlet and the outlet of the side duct. The mass flow sensor is configured to detect a signal corresponding to an amount of flow of a fluid through the side duct. The side duct comprises a first portion and a second portion. The first portion of the side duct comprises the mass flow sensor. The first portion of the side duct is arranged within the feed duct.

The present application relates to aircraft turbine refrigeration control system and method. The aircraft turbine refrigeration control system comprises outlet pressure difference sensor, inlet mass flow sensor, condenser mass flow sensor, air-water separator mass flow sensor and controller; the controller is configured to: when the pressure difference between turbine outlet and cabin is greater than the first pressure difference setting value, determine whether the inlet air mass flow is greater than the sum of condenser outlet air mass flow and air-water separator outlet mass flow; when the inlet air mass flow is greater than the sum of outlet mass flow, determine that the turbine outlet is icing, and implement ice melting operation; when the inlet air mass flow is equal to the sum of outlet mass flow, determine that the heat exchanger channel is dirty, and send heat exchanger maintenance alarm information. According to the above technical scheme, the present application can achieve the following beneficial technical effects: the ice blocking phenomenon can be automatically predicted, and the possibility of ice blocking can be greatly reduced through preventive measures.

The utility model is applicable to the technical field of sensors, and provides a thermal mass flow sensor, which comprises a shell, a temperature sensor and a temperature sensor, the heat insulation structure is arranged on the shell, the heat insulation structure is used for defining a heat insulation area on the shell and an external area located outside the heat insulation area, and at least part of the heat insulation area is separated from the external area; at least part of the detection assembly is accommodated in the heat insulation area; according to the thermal mass flow sensor provided by the invention, the thermal insulation area is enclosed on the shell through the thermal insulation structure, and part of the detection assembly is accommodated in the thermal insulation area, so that the negative influence of an external heat source on the precision of the thermal mass flow sensor is reduced; meanwhile, heat generated by part of the detection assemblies located in the heat insulation area can also be evenly distributed in the heat insulation area so as to reduce the temperature gradient in the heat insulation area, and therefore the negative influence on the precision of the thermal mass flow sensor can be further reduced.

The application discloses a dust removal equipment filter bag dynamic ash cleaning method and system, and relates to the technical field of dust removal equipment. The method comprises the following steps: installing a micro hot type mass flow sensor at the outlet of each clean gas chamber of the dust removal equipment corresponding to each filter bag, installing a sound wave exciter on the filter bag ash cleaning blowing pipe, and installing a sound wave receiving sensor at the bottom of the filter bag; starting the sensor under the initial working condition of confirming the health of the filter bag, continuously collecting real-time flow data of each filter bag under different total working conditions, using statistical process control method to establish a personalized dynamic flow health baseline model for each filter bag in linkage with the total working condition, and simultaneously, performing sound wave scanning on each filter bag. Through the establishment of the personalized dynamic baseline model and the sound wave conduction baseline file, and combined with the use of unsupervised anomaly detection algorithm, the application can timely detect and discover early weak anomalies and local faults of the filter bag, and the early warning time is greatly advanced.

A method (100) is used to determine a quantitative deposit indicator (hrel) for a Coriolis mass flow sensor having at least one oscillatory measuring tube for conducting a medium, wherein the deposit indicator depends on an amount of deposit in the at least one measuring tube, wherein a device parameter (A) which is specific to the Coriolis mass flow meter is provided, wherein the device parameter (A) describes a relationship between a viscosity (h) of a medium conducted in the at least one measuring tube and a media-specific damping contribution (Dh) for damping an oscillating mode of the at least one measuring tube and in particular for determining a measured viscosity value (hm) on the basis of the media-specific damping contribution (Dh), wherein the deposit (C) comprises a deposit material with a material-specific damping property which, in dependence on the amount of deposit, brings about a damping of the oscillating mode of the at least one measuring tube, wherein a material parameter (M) which represents the material-specific damping property is provided, wherein the method comprises: determining a measured damping value (Dm) (110) of the at least one oscillating mode; determining a deposit-specific damping contribution (Dc) (120) on the basis of the measured damping value (Dm) of the at least one oscillating mode; providing the material parameter (M) specific to the deposit; and determining the deposit indicator (hrel) (139), on the basis of the deposit-specific damping contribution, the material parameter and the device parameter.

The utility model relates to a dual-mode industrial gas meter sealing performance detection device. The system is characterized by comprising a pressure regulating valve, a precision numerical control proportional valve, a fin type heat exchanger, a standard end pressure sensor, a standard end exhaust valve, a gas storage tank, a detection end inflation valve, a standard end inflation valve, a communication valve, a standard end differential pressure detection valve, a detection end differential pressure detection valve, a detection end flow detection valve, a standard end flow detection valve, a differential pressure sensor and a mass flow sensor, the detection end air inlet valve, the detection end air outlet valve, the detection end exhaust valve and the detection end pressure sensor are connected in a matched mode through pipelines. According to the device, a single differential pressure method detection mode or a mass flow method detection mode can be selected, and the two detection modes can also be selected to operate at the same time. When the two detection modes are adopted, the accuracy of the detection result can be improved, meanwhile, the characteristic that the two detection modes need to be pressurized and balanced is utilized, the workpiece only needs to be pressurized and balanced once when the two detection modes are operated, and the detection efficiency is improved.

The utility model discloses an automatic dispensing and adding device for an industrial circulating water scale inhibitor. The automatic dispensing and adding device comprises a scale inhibitor stock solution storage box, a scale inhibitor stock solution mass flow control pipeline, a scale inhibitor dispensing box, an industrial water replenishing pipeline, a scale inhibitor adding pipeline, a circulating water analysis instrument and an automatic control system. When the scale inhibitor stock solution flows through a mass flow sensor, the volume of the stock solution at the time period is accurately metered and controlled, and then industrial water replenishing is automatically controlled through the real-time liquid level of the scale inhibitor dispensing box, so that the fixed-concentration dispensing of the scale inhibitor is realized; meanwhile, the frequency of the dosing metering pump is automatically adjusted through the collected circulating water quality data, the circulating water quality is effectively guaranteed, operation is easy, and running is stable.

A method and device for operating an internal combustion engine including a first air duct supplying air to a cylinder of the internal combustion engine, and a second air duct supplying air to a heater for heating an exhaust system. The first and the second air duct each have at least one control element for controlling the amount of air flowing through. The first and the second air ducts are connected by a third air duct to an air filter for providing filtered ambient air to the internal combustion engine. A mass flow sensor is arranged in the third air duct for measuring an amount of air flowing through the third air duct. The measured signal of the mass flow sensor is used to regulate the amount of air flowing through the first and second air ducts as a function of operating states of the internal combustion engine.

Filter element flow divider device (50) for generating a predetermined flow profile in an outflow-side media flow of a filter element, comprising a clean air chamber section (70), an outflow channel section (72) with an outflow channel cross-section (74) and a mass flow sensor (120), comprising at least two guide vane wall sections (52, 54) each with an inflow curvature region (76) which is connected to an outflow wall section (78), wherein the inflow curvature regions (76) of two guide vane wall sections (52, 54) are configured facing each other, and wherein the guide vane wall sections (52,54) in longitudinal section in a predetermined flow direction plane (26) from the clean air chamber section (70) to the mass sensor (120) each have a predetermined angle of attack (α) of a tangent (88) to the maximum point of curvature of the inlet curvature region (76) relative to the flow direction plane (26) and / or relative to at least one further guide vane wall section, wherein the guide vane wall sections (52, 54) are arranged in the clean air chamber section (70) and the outflow channel section (72) is arranged predetermined downstream of the clean air chamber section (70) and the mass flow sensor (120) is arranged downstream of the clean air chamber section (70) and / or the outflow channel section (72), wherein the mass flow sensor (120) is located directly behind the guide vane wall sections (52,54) is arranged or is spaced at a distance (82) of up to once the outflow channel cross-section (74) of the outflow channel section (72) from the outflow wall section (78).

The invention discloses a gas mass flow sensor processing method. The method comprises the following steps: providing a bottom plate; manufacturing a detection chip on the top surface of the bottom plate; grooves are machined in the bottom face of the bottom plate and the surface of the cover plate and oppositely installed to form a first heat insulation cavity, and a first heat insulation structure is formed after sealing. A gas flow channel and a second heat insulation cavity are formed in the cover body; a cover body is installed on the top face of the bottom plate, and sealing plates are installed at the two ends of the second heat insulation cavity and sealed to construct a second heat insulation structure; when the cover body is mounted, the airflow channel is ensured to cover the detection chip to construct a detection unit; and manufacturing a cleaning chip to construct the sensor autonomous cleaning system. The process replaces a traditional silicon nitride heat insulation process and a titanium / platinum mixed transition film process, so that the components of the resistive film are changed into pure platinum elementary substances, and the problems of poor consistency and repeatability and the like of important physical parameters such as temperature coefficient and resistivity of the resistive film due to the existence of mixed components in a film layer material are solved; and the detection precision and stability of the sensor are improved.

A method (100) is used to determine a quantitative coating indicator (h rel ), for a Coriolis mass flow sensor with at least one oscillating measuring tube for guiding a medium, wherein the fouling indicator depends on an amount of fouling in the at least one measuring tube, wherein a device parameter (A) is given that is specific for the Coriolis mass flow sensor, wherein the device parameter (A) is a relationship between a viscosity (η) of a medium guided in the at least one measuring tube and a medium-specific damping contribution (D). η ) describes for damping a vibration mode of the at least one measuring tube and in particular for determining a viscosity measurement value (η m ) based on the media-specific attenuation contribution (D η) serves, wherein the coating (C) has a coating material with a material-specific damping property which, depending on the amount of coating, causes damping of the vibration mode of the at least one measuring tube, wherein a material parameter (M) is given that represents the material-specific damping property, wherein the method comprises: determining a damping measurement value (D m ) (110) of at least one vibration mode; determining a surface-specific damping contribution (D c ) (120) based on the damping measurement value (D m ) of at least one vibration mode; providing the material parameter (M) specific to the coating; and determining the coating indicator (h) rel ) (139), based on the surface-specific damping contribution, the material parameter and the device parameter.

A flow conditioning assembly for a flow velocity and mass flow measurement apparatus utilizing micromachined flow sensing elements is disclosed for maintaining high metrological performance. The assembly introduces a flow profile shatter and redistribution mechanism before the flowing fluid enters the flow straightener and flow profiler combined flow conditioning. The assembly further removes the probability of flow clogging, has a low flow resistance, and relaxes the metrological requirements of the connecting pipework system. An alternative build with a bypass flow chamber with a flow redistribution channel allows the measurable flow velocity to extend to more than three times the configuration where the micromachined flow sensing elements are placed inside the center of the main flow channel.

The invention discloses a mass flow sensor, comprising: a housing; rotating the measuring assembly; the rotating speed control mechanism is arranged in the shell and arranged on the outer side of the driving wheel in the fluid flowing direction, the rotating speed control mechanism comprises a mounting base, an opening control assembly and a flow guide body, the mounting base is connected to the shell, the opening control assembly comprises a first elastic piece assembly and a second elastic piece assembly, and one end of the first elastic piece assembly and one end of the second elastic piece assembly are connected with the mounting base; the first elastic piece assembly and the second elastic piece assembly are respectively composed of a plurality of elastic pieces which are arranged in a circumferential mode, a gap is arranged between every two adjacent elastic pieces, the first elastic piece assembly is arranged outside the second elastic piece assembly in a wrapping mode, and the gaps between the elastic pieces of the first elastic piece assembly and the gaps between the elastic pieces of the second elastic piece assembly are arranged in a staggered mode. The combined structure that the first elastic piece assembly and the second elastic piece assembly are arranged in a wrapping mode is adopted, gaps between the elastic pieces are plugged through the first elastic piece assembly and the second elastic piece assembly, oil liquid is prevented from directly flowing out of the gaps between the elastic pieces, and the problem that the oil liquid directly flows out of the gaps between the elastic pieces is well solved. And the measurement precision is influenced by low rotation frequency.

The utility model relates to a vibration stopping piece for fixing Coriolis mass flow sensor vibration tubes, and relates to the technical field of Coriolis mass flowmeters, the vibration stopping piece comprises more than two splicing pieces, each splicing piece is provided with at least one splicing notch, all the splicing pieces are spliced on bent tube sections of more than two vibration tubes through the splicing notches, and the splicing pieces are spliced on the bent tube sections of more than two vibration tubes through the splicing notches. All the splicing notches in the periphery of each vibration tube are jointly combined to form a connecting hole matched with the outer wall of the vibration tube, the adjacent splicing pieces are fixedly connected, and the spliced vibration stopping pieces are connected with the vibration tubes in a vacuum brazing mode. The vibration stopping piece has the advantages that the vibration stopping piece can be conveniently, rapidly and flexibly installed on the bent pipe sections of the two or more vibration pipes, and the high welding gap requirement of vacuum brazing can be met.

Described herein are thermal mass flow sensors that combine calorimetric and anemometric (e.g., hot-wire) elements to provide a hybrid approach to determining flow rate of a liquid. The flow probes or flow sensors are configured to use a heater to apply heat to a thermally-conducting material in contact with the flowing liquid, to measure a temperature of the thermally-conducting material upstream of the heater and downstream or at the heater, to adjust power to the heater to achieve a targeted temperature difference, and to determine a flow rate based at least in part on the power supplied to the heater and the measured temperatures. This approach provides flow rate due at least in part to the fluid cooling the thermally-conductive material proportionate to flow rate with non-linear effects. This hybrid approach can provide accurate readings of flow rates of liquids delivered through an IV line to a patient.

A method and a device for diagnosing an air supply of an internal combustion engine which includes a first air duct for supplying air to a cylinder and a second air duct for supplying air to a heater for heating an exhaust system. The first and second airs ducts each have a mass flow sensor for measuring a mass of the air flowing therethrough, a pressure sensor for measuring the pressure in the air duct, and a temperature sensor for measuring the temperature of the air flowing therethrough. The first and second air ducts originate from a common air filter. Depending on operating states of the cylinders and heater, measured values of the mass flow sensors, pressure sensors, and temperature sensors of the first and second ducts are compared with one another or with comparison values, and a result of the diagnosis is ascertained depending on the comparison.

A mass flow sensor assembly (10) for a mass flow regulator or a mass flow measuring device has a mass flow sensor (22) comprising a capillary tube (28) held by a first corner carrier (24) and a second corner carrier (26), which are formed independently of one another. The capillary tube (28) comprises a sensor section (34) which is located between the two corner carriers (24, 26), and wherein the two corner carriers (24, 26) each have an arcuate slot (88, 90) in which the capillary tube (28) is partially accommodated. Furthermore, a method for manufacturing a mass flow sensor assembly (10) is described.

This invention discloses a hydrogen metering calibration and testing device and method, including a chamber. The top of the chamber is set as an inclined surface, and a groove is formed in the inclined surface. An operating component is fixedly installed on the inner wall of the groove. The operating component includes a 35MPa inlet and a 35MPa outlet, both of which are fixedly installed on the outer wall of the groove. A calibration and testing component for calibrating and testing hydrogen metering is fixedly installed on the inner wall of the chamber. The calibration and testing component includes a standard hydrogen quantity measuring device and a calibration and verification device. This invention relates to the technical field of hydrogen metering devices. By setting up a calibration and verification device, a standard unit amount of hydrogen collected in a standard tube is transferred back to a calibration tube. The hydrogen quantity is then detected again by a gas mass flow sensor and a pressure sensor in the calibration tube, thereby calibrating and verifying the hydrogen quantity collected in the standard tube, thus improving the accuracy of hydrogen metering.