TFT (thin film transistor)-LCD (liquid crystal display) array substrate and manufacturing method thereof
A liquid crystal display and thin film transistor technology, applied in the field of thin film transistor liquid crystal display array substrates and its manufacturing, can solve the problems of large number of masks, long production time, high production cost, etc., to reduce production time, improve production efficiency, and reduce investment Effect
Active Publication Date: 2012-08-15
BOE TECH GRP CO LTD
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Problems solved by technology
Among them, each patterning process needs to transfer the pattern of the mask plate to the film pattern. In this way, in the process of manufacturing the AD-SDS type TFT-LCD array substrate, the number of mask plates used will be large, which will cause production costs. Higher; moreover, each layer of film graphics needs to be accurately covered on another layer of film graphics, so that it will lead to longer production time, which will result in lower production efficiency
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[0045] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0046] The manufacturing method of TFT-LCD array substrate provided by the present invention, such as figure 1 shown, including the following steps:
[0047] Step 101: forming gate lines and gate electrodes on the substrate through the first patterning process;
[0048] Specifically, depositing a first metal thin film on the substrate, forming gate lines and gate electrodes through a photolithography process and an etching process;
[0049] Here, the substrate may be a glass substrate or a quartz substrate;
[0050] The method adopted for depositing the first metal thin film on the substrate may be any of the existing methods for depositing thin films, such as magnetron sputtering or other thin film deposition methods;
[0051] The material used for the first metal film can be metal materials such as molybdenum, aluminum, aluminum-...
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The invention discloses a manufacturing method of a TFT (thin film transistor)-LCD (liquid crystal display) array substrate. The manufacturing method comprises the following steps of: a, forming gate lines and gate electrodes on the substrate through a first composition technology; b, forming data lines, an insulating layer, an active layer, source electrodes, drain electrodes and a TFT channel through a second composition technology, and forming a via hole on a first passivation layer; c, forming pixel electrodes through a third composition technology; and d, forming a second passivation layer and public electrodes at intervals through a fourth composition technology. The invention also discloses the TFT-LCD array substrate. According to the method and the array substrate, the input on production equipment can be reduced, thus the production cost is reduced; and simultaneously, the production time is reduced, thus the production efficiency is improved.
Description
technical field [0001] The invention relates to display technology, in particular to a thin film transistor liquid crystal display (TFT-LCD, Thin Film Transistor Liquid Crystal Display) array substrate and a manufacturing method thereof. Background technique [0002] Due to the advantages of small size, low power consumption, and no radiation, TFT-LCD occupies a dominant position in the current flat panel display market. Advanced-Super Dimensional Switching (AD-SDS, Advanced-Super Dimensional Switching) technology is currently a hot topic in research and development. It uses the parallel electric field generated by the edge of the pixel electrode in the same plane and the longitudinal electric field generated between the pixel electrode layer and the common electrode layer. A multi-dimensional electric field is formed, so that all oriented liquid crystal molecules between the pixel electrodes in the liquid crystal cell and directly above the electrodes can undergo rotation c...
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IPC IPC(8): H01L21/77G02F1/1362G02F1/1368H01L27/12
CPCH01L27/1288
Inventor 刘宸王学岚杨久霞
Owner BOE TECH GRP CO LTD