Control device and control method for plurality of paths of gas mass flow meters

Abstract

The invention discloses a control device and a control method for a plurality of paths of gas mass flow meters, which are used for controlling a mass flow of a plurality of paths of gas. The control device comprises a field bus module and a main control module, wherein the main control module and the field bus module are connected through a wired or wireless manner; the field bus module can be connected with a plurality of paths of the gas mass flow meters and receives a control instruction of the main control module; and a gas mass flow output by a plurality of paths of the gas mass flow meters can be controlled according to the control instruction. According to the control device and the control method, the communication of the main control module and the field bus module realizes the united (or signal) accurate control on a plurality of paths of the gas mass flow meters, so that the accurate confluence with any flow ratio on a plurality of paths of gas or the accurate flow distribution with any flow ratio on a single path of the gas can be realized, the control precision (which is better than 1 ml / min) of a gas flow speed is improved and a gas flow speed can be automatically increased and decreased.

Description

technical field [0001] The invention belongs to the technical field of gas mass flowmeter control, and in particular relates to a multi-channel gas mass flowmeter control device and a control method, which can accurately control the gas flow rate of the multi-channel gas. Background technique [0002] Gas mass flowmeter is a device for measuring and controlling gas mass flow, which is often used to precisely control the flow output of gas in the field of chemical technology and semiconductor technology. When two or more gases are mixed and used at the same time, or when a single gas with a fixed flow rate is divided into multiple channels, it is necessary to use a multi-channel gas mass flowmeter to control the mass flow output of the gas in order to accurately control the mixed or divided gas. flow ratio. [0003] At present, in some equipment, different types of gas mass flowmeters are configured according to the needs, and they are controlled by different hardware or sof...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the defect that the existing gas mass flowmeter control device cannot accurately control multiple gases at the same time and the problems of poor control accuracy and low degree of automation, the present invention provides a multi-channel gas mass flow meter control device and control method

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