Method for testing diffused layer resistance of finished cell
A battery sheet and diffusion layer technology, applied in the direction of measuring resistance/reactance/impedance, measuring electrical variables, measuring devices, etc., can solve the problems that the resistance of the diffusion layer cannot be tested, the diffusion cannot be determined, and the sheet resistance cannot be known, etc., to increase The effect of testing costs, ease of operation
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[0020] The present invention will be further described below in conjunction with the accompanying drawings.
[0021] A method for testing the resistance of the diffusion layer of a finished battery sheet of the present invention is described in detail below in conjunction with preferred specific implementation examples, which mainly includes the following specific steps:
[0022] (1) Take 5 groups of silicon wafers, 5 pieces in each group, clean and texture according to the conventional battery process;
[0023] (2) Put 5 groups of silicon wafers into the tubular diffusion furnace, and carry out phosphorus diffusion according to the target values: 50, 60, 70, 80, 90 ohm / □ respectively;
[0024] (3) Select 5 points evenly on the silicon wafer according to the same pattern, and use a four-probe resistivity tester to test the sheet resistance of the N-type layer after diffusion. The test results are listed in Table 1 below;
[0025] (4) Etch, coat, print electrodes and sinter ac...
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