A gas discharge laser light source

Abstract

The invention discloses a gas discharge laser light source, belongs to the technical field of gas laser, and solves the technical problem that in the existing high-voltage pulse power supply, external conditions limit the development requirements of larger energy and higher repetition frequency in a laser light source system. The gas discharge laser light source system comprises a discharge cavity, a light condensation module and a line-width reduction module, wherein the discharge cavity comprises an inner ring and an outer ring; the outer ring is fixed and provided with a plurality of high-voltage power supplies and electrodes; each high-voltage power supply corresponds to each electrode mounted on the outer ring; the inner ring is drive by a motor to rotate; a plurality of electrodes are mounted on the inner ring; the electrodes mounted on the inner ring and the electrodes mounted on the outer ring form positive and negative electrodes. As the number and the positions of the high-voltage power supplies of the outer ring of the discharge cavity and the electrodes, the number and the positions of the electrodes of the inner ring in the discharge cavity, the inner ring rotating speed and high-voltage power supply discharge time sequence of the outer ring of the discharge cavity are changed, the laser output with larger energy and higher repetition frequency becomes possible.

Description

technical field [0001] The invention belongs to the technical field of gas laser, and in particular relates to a gas discharge laser light source. Background technique [0002] The output beam quality of a laser light source is the fundamental characteristic of the light source. Output beam quality characteristics include laser energy, repetition frequency, linewidth, etc. For gas discharge laser sources, especially excimer laser sources for lithography, high energy, high repetition frequency, and narrow line width are the basic characteristics of laser sources. At present, the characteristics of high energy and high repetition frequency are mainly affected by the performance of the power supply components of the laser light source system, and the narrow line width is mainly affected by the performance of the optical components of the laser light source system. [0003] The key component of the gas discharge laser light source is the discharge cavity. The discharge cavity...

AI Technical Summary

Problems solved by technology

At the same time, the laser light source system including the new type of discharge cavity proposed by the present invention also solves the problem that the outer ring and the inner ring of the discharge cavity are fixed, resulting in high requirements on the fluidity of the working gas.

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