Air floating platform with follow-up cable tables
A technology of cable platform and air flotation platform, which is applied in the field of air flotation platform, can solve the problems of short running time and limited capacity of high-pressure gas cylinders, and achieve the effects of long running time, improved carrying capacity and reduced disturbance
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
specific Embodiment approach 1
[0025] Specific implementation mode one: the following combination Figure 1 to Figure 6 Describe this embodiment, the air bearing platform with a follower cable platform described in this embodiment, it includes a base 1, a base guide rail 2, a pair of air bearing guide rails 3, an air bearing beam 4, an object stage 5, and a Y-axis Follow-up cable table 6, X-axis follow-up cable table 7, X-axis communication box 8, Y-axis communication box 9, Y-axis follow-up table communication box 10, X-axis follow-up table communication box 11, X-axis grating sensor 12. Y-axis grating sensor 13 and host computer,
[0026] The base 1 is a cuboid, and one side of the upper surface of the base 1 is arranged in parallel with a base guide rail 2 and an air bearing guide rail 3, the base guide rail 2 is close to the edge of the base 1, and another air bearing guide rail 3 is arranged on the other side of the upper surface of the base 1. A pair of air-floating guide rails 3 are parallel to each...
specific Embodiment approach 2
[0038] Specific Embodiment 2: This embodiment further describes Embodiment 1. The base 1 in this embodiment is a marble base.
specific Embodiment approach 3
[0039] Embodiment 3: This embodiment further describes Embodiment 1 or 2. The position of the stage 5 in this embodiment is measured by a straight grating sensor.
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com