Surface plasma resonance-based optical fiber multipoint micro displacement sensing method and device

Abstract

The invention relates to a surface plasma resonance-based optical fiber multipoint micro displacement sensing method and device. The surface plasma resonance-based optical fiber multipoint micro displacement sensing device is characterized by comprising a broadband light source, a polarizer, two single-mode transmission optical fibers, a single-mode sensing optical fiber, multiple displacement probes, multiple sensitive areas and a spectrometer, wherein the sensitive areas are multiple areas obtained through corroding the sensing optical fiber; the displacement probes are single-mode optical fibers of which the end face is cut flat and golden films with different thicknesses are plated; an air chamber is an air gap between the displacement probes and the sensitive areas; an evanescent field is formed in the sensitive areas through the sensing optical fiber by light, the plasma resonance effect is generated on the surface of the golden films of the displacement probes; the absorption peak intensity of the resonant wavelength is determined by the length of the air chamber; the golden films with different thicknesses generate different resonant wavelengths, and multi-displacement measurement can be realized through the wavelength demodulation. According to the surface plasma resonance-based optical fiber multipoint micro displacement sensing method and device, disclosed by the invention, the structure is simple, the volume is small, the sensitivity is high and reuse can be realized.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensing, in particular to an optical fiber multi-point micro-displacement sensing method and device based on surface plasmon resonance. Background technique [0002] Micro-displacement measurement technology is widely used in precision machinery manufacturing, high-precision automatic control systems, geological strain monitoring, aerospace engineering, etc. It is an important technology for monitoring real-time dynamic shape and position changes of feature points and feeding back measurement signals to the control center . With the rapid development of the current micro-nano processing technology, the measurement resolution requirements of the micro-displacement measurement technology have been raised from the micron level to the nanometer level. At present, the main micro-displacement measurement technologies include charge-coupled measurement technology, capacitive measurement technology...

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the problems of large volume, high manufacturing cost, complicated calculation method and low measurement accuracy in the prior art, the present invention proposes a simple structure, small volume, high sensitivity and reusable Optical fiber multi-point micro-displacement sensing method and device based on surface plasmon resonance

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