High temperature tail gas anti-impact piece adjustable structure of polycrystalline silicon high temperature tail gas heat exchanger
A tail gas heat exchanger technology, applied in the direction of silicon compounds, chemical instruments and methods, inorganic chemistry, etc., can solve the problems that the metal anti-shock plate cannot adjust the gas flow rate, the gas cannot pass through the heat exchange tube uniformly, and the service life is short.
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- Publication Date
- 2014-07-02
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The invention relates to the field of polysilicon, in particular to an adjustable structure of a high-temperature tail gas anti-shock part of a polysilicon high-temperature tail gas heat exchanger. It belongs to the technical field of polysilicon preparation. Background technique
[0002] Polycrystalline silicon is the direct material for the production of monocrystalline silicon. High-purity polysilicon is the basic material of semiconductor devices such as photoelectric conversion cells and integrated circuits. With the rapid development of the world's semiconductor industry, a large number of applications of ultra-large integrated circuits, and a large demand for photovoltaic cells, the world's demand for polysilicon is increasing year by year.
[0003] In the process of polysilicon production, the exhaust gas outlet temperature of the reduction furnace and other equipment is as high as 1000°C, and it is high-temperature corrosive. In order to red...
Examples
Embodiment Construction
[0024] see figure 1 , figure 1 It is a schematic diagram of the adjustable structure of the high-temperature exhaust gas anti-shock parts of the polysilicon high-temperature exhaust gas heat exchanger of the present invention. Depend on figure 1 It can be seen that the adjustable structure of the high-temperature tail gas anti-shock parts of the polysilicon high-temperature tail gas heat exchanger of the present invention includes a cylindrical plug 1 (see figure 2 and image 3 ), spiral hole pipe 2 (see Figure 4 and Figure 5 ) and fixed connector 3 (see Figure 6 and Figure 7 ), the cylindrical plug 1 is threadedly connected with the inner hole of one end of the spiral hole pipe 2, and the fixed connector 3 is threaded with the inner hole of the other end of the spiral hole pipe 2. The spiral hole pipe 2 is provided on the pipe wall. row of screw holes.
[0025] The spiral hole row pipe 2 is made of graphite.