R-T-B based permanent magnet
A R-T-B, R1-T-B technology, applied in the direction of magnetic materials, magnetic objects, magnetic films, etc., can solve problems such as difficult to replace
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[0048] Hereinafter, although the content of this invention is demonstrated in detail using an Example and a comparative example, this invention is not limited to the following Example.
[0049] As a target, made so that the film formed by sputtering becomes Nd 15 Fe 78 B 7 、Pr 15 Fe 78 B 7 , Y 15 Fe 78 B 7 The Nd-Fe-B alloy target material, Pr-Fe-B alloy target material and Y-Fe-B alloy target material adjusted in the way of composition. A silicon substrate was prepared as a base material to be formed into a film. Conditions were set such that the size of the target was 76.2 mm in diameter, the size of the substrate was 10 mm×10 mm, and the in-plane uniformity of the film was sufficiently maintained.
[0050] The film forming device can be exhausted to 10 -8 A device below Pa that has multiple sputtering mechanisms in the same tank. The above-mentioned Nd—Fe—B alloy target material, Pr—Fe—B alloy target material, Y—Fe—B alloy target material, base film, and Mo targe...
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