Variable capacitance circuit, oscillator circuit, vibratory device, and method of manufacturing vibratory device

Abstract

The invention provides a variable capacitance circuit, an oscillator circuit, a vibratory device and a method of manufacturing the vibratory device. The variable capacitance circuit includes a plurality of variable capacitance elements (varicaps VC1, VC2, ..., VC15) each having the capacitance value controlled in accordance with the inter-terminal voltage applied between the terminals of the variable capacitance element and connected in parallel to each other, has the combined capacitance value of the plurality of variable capacitance elements variable taking a predetermined capacitance value as a base, sets the inter-terminal voltage of at least one of the plurality of variable capacitance elements to a first voltage v1 as a variable voltage, and sets the inter-terminal voltage of the rest of the plurality of variable capacitance elements to a second voltage V2 as a stationary voltage.

Description

technical field [0001] The present invention relates to a variable capacitance circuit, an oscillating circuit, a vibrating device, electronic equipment, a mobile body, a manufacturing method of the vibrating device, and the like. Background technique [0002] A variable capacitance circuit includes a variable capacitance element, and can adjust a capacitance value by changing a control voltage applied to the variable capacitance element. The variable capacitance element is, for example, a variable capacitance diode, and the capacitance value of the variable capacitance diode changes according to a voltage between terminals (equal to a control voltage when one terminal is a ground voltage). A variable capacitance circuit is sometimes used as, for example, a load capacitance of an oscillation circuit for adjusting the frequency of an oscillation signal (hereinafter also referred to as oscillation frequency). [0003] For example, the invention of Patent Document 1 includes a...

AI Technical Summary

Problems solved by technology

However, when the number of variable capacitive elements to be cut is changed, the voltage-oscillating frequency characteristic is still largely changed

Therefore, even if such a variable capacitance circuit is used as the load capacitance of the oscillation circuit, the oscillation frequency cannot be easily adjusted.

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