Method for calibrating small-aperture diaphragm

A technology of small hole diaphragm and optical method, which is applied in the direction of using optical devices, measuring devices, instruments, etc., to achieve the effects of less human-subjective error factors, high measurement accuracy, and simple and easy-to-understand principles of the invention

Inactive Publication Date: 2015-03-18
CHINA UNIV OF PETROLEUM (EAST CHINA)
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  • Abstract
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Problems solved by technology

[0003] In order to solve the problem of measuring the diameter of the small hole diaphragm, the present invention provides a measurement method, which can not only realize the diameter measurement of the fixed diaphragm, but also can calibrate the adjustable variable diaphragm, that is, retract the steel blade Numerical measurement of the linkage relationship between the amount and the rotation angle of the outer ring of the diaphragm (or lever)

Method used

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  • Method for calibrating small-aperture diaphragm
  • Method for calibrating small-aperture diaphragm
  • Method for calibrating small-aperture diaphragm

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Embodiment Construction

[0015] exist figure 1 Among them, the observation screen (5) is a reticle that can measure the size of the pattern. When the laser (1) passes through the collimated beam expander system (2), the size of the output parallel circular beam should be slightly larger than the diameter of the fixed aperture diaphragm (4). The diameter of the fixed aperture diaphragm (4) can be obtained by measuring the light spot.

[0016] exist figure 2 Among them, the Mach-Zehnder interference system is composed of the beam splitter (2), the total mirror (3) and the beam combiner (5). A laser (1) is used as the input light source of the interference system, and a small hole aperture (4) of the same specification to be tested is respectively placed in any adjacent two arms of the interference system, and the actual diameters of the two apertures (4) are required to be consistent. Promptly require that two diaphragms (4) driving levers should be dialed to the same position. A double optical wed...

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Abstract

The invention provides a method for measuring the lighting diameter of a small-aperture diaphragm and the rotating angle of a driving lever. According to the method, a mach-zehnder interference system and a dual-optical wedge movement micrometer system are used for measuring the dimension of an image of the small-aperture diaphragm, so that the non-contact measurement on the diameter of the small-aperture diaphragm can be realized. The probability of man-made misreading can be reduced at an observation screen by adopting reticle design.

Description

Technical field [0001] The invention relates to an optical method for calibrating an aperture aperture, which can measure the diameter of a fixed aperture and calibrate the effective diameter of an adjustable variable aperture. Background technique [0002] At present, the small aperture diaphragm used in the optical laboratory mostly functions as an aperture diaphragm in the optical path, that is, to limit the aperture or angle of the beam. However, in a specific experiment, there is a lack of precise measurement of the confinement effect of the aperture stop (that is, the actual diameter of the aperture stop). For fixed apertures, when the accuracy of the actual diameter of the aperture aperture is not high, the nominal size provided by the manufacturer can still be used as the real size, but for variable apertures, especially continuously adjustable and variable apertures , the diameter of the pinhole diaphragm is unknown. Contents of the invention [0003] In order t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/08
Inventor 韩国霞黄张翔徐先锋胡明霞于奥舒仕爽
Owner CHINA UNIV OF PETROLEUM (EAST CHINA)
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