X-ray generation device and x-ray generating unit and high voltage generating unit constituting same

Abstract

A detachable X-ray generating device proposed in the present invention comprises: an X-ray generating unit including an X-ray generating tube for irradiating an X-ray and a first connecting portion connected to the X-ray generating tube through an electric wire; and a high voltage generating unit for receiving an external supply voltage to generate a predetermined high voltage and including a second connection portion through which the generated high voltage is output, wherein the high voltage is supplied to the X-ray generating tube by mutually coupling the first connecting portion and the second connecting portion. An apparatus for removing static electricity according to the present invention has effects of replacement costs reduction, ease of selection of an installation location, thermal insulation, etc. since the apparatus can be mutually separated.

Description

Technical field [0001] The present invention relates to an X-ray generator, that is, a detachable and separate X-ray generator that can be supplied separately by separating a high-voltage generating part and an X-ray generating part, and the X-ray generating part and the high-voltage generating part constituting the X-ray generator. Device. Background technique [0002] Generally speaking, in the manufacturing process of liquid crystal display (LCD), PDP, and semiconductor, fine dust adheres to LCD, PDP, and semiconductor wafers due to the occurrence of static electricity, or damages to components due to electrostatic discharge. Decrease product profitability, thereby causing the side effect of rising manufacturing costs. [0003] Therefore, clean rooms where semiconductor processes are performed are generally equipped with devices for eliminating static electricity. [0004] This traditional technique for eliminating static electricity is a static elimination device using corona d...

AI Technical Summary

Problems solved by technology

[0020] First, when a defect occurs in either the high-voltage generating part or the X-ray generating part, there is a problem that the entire product needs to be replaced because the defective part cannot be replaced.

[0021] Second, since the high-voltage generator and the X-ray generator are integrated, if the X-ray irradiation position or direction is changed while the static eliminator is installed, there is a problem that the static eliminator needs to be separated from the installation site and moved.

[0022] Third, there is a concern that the electrical part of the high voltage generating part may malfunction due to the high heat generated in the X-ray generating part

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