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Accelerator power supply apparatus of electron beam microfabrication equipment and control method thereof

A technology for microfabrication and power supply devices, which is applied in the direction of output power conversion devices, conversion equipment that can be converted to DC without intermediate conversion, electrical components, etc., and can solve the acceleration of electron beam micromachining equipment and the peak voltage at the output end of the acceleration power supply And other issues

Active Publication Date: 2015-12-09
GUILIN UNIV OF ELECTRONIC TECH
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Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide an accelerating power supply device and control method for electron beam micromachining equipment that solves the problem of peak voltage at the output end of the accelerating power supply due to the PWM converter working in an intermittent current state

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  • Accelerator power supply apparatus of electron beam microfabrication equipment and control method thereof
  • Accelerator power supply apparatus of electron beam microfabrication equipment and control method thereof
  • Accelerator power supply apparatus of electron beam microfabrication equipment and control method thereof

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Embodiment Construction

[0050] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0051] An accelerating power supply device for electron beam micromachining equipment, including a line filter 1, a low-voltage rectifier bridge 2, an inverter unit 3, a high-voltage unit 4, and a regulator 5, and the input end of the line filter 1 is connected to an external power grid , the output end of the line filter 1, the low-voltage rectifier bridge 2, the inverter unit 3 and the input end of the high-voltage unit 4 are connected in series in sequence, the high-voltage output end of the high-voltage unit 4 outputs high-voltage electricity, and the high-voltage unit 4 The high-voltage feedback signal U output from the signal terminal is sent to the second input terminal of the regulator 5, and the first input ...

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Abstract

The present invention relates to an accelerator power supply apparatus of electron beam microfabrication equipment and a control method thereof. The apparatus includes an incoming line filter, a low-voltage rectifier bridge, an invert unit, a high-voltage unit and a regulator. The input end of the incoming line filter connects an external power grid. The output end of the incoming line filter, the low-voltage rectifier bridge, the invert unit and the input end of the high-voltage unit are connected in series orderly. The high-voltage output end of the high-voltage unit outputs high voltage, a high-voltage feedback signal U outputted by the signal end of the high-voltage unit is transmitted to the second input end of the regulator, the first input end of the regulator inputs a high-voltage setting signal U*, and the output end of the regulator connects the signal end of the invert unit. Compared to the prior art, the acceleration power supply apparatus of electron beam microfabrication equipment and the control method thereof solve a problem that the output end of an accelerator power supply occurs a spike voltage caused by a PWM converter working in a discontinuous current mode.

Description

technical field [0001] The invention relates to the field of electron beam processing equipment, in particular to an accelerating power supply device and a control method for electron beam microprocessing equipment. Background technique [0002] In electron beam micromachining equipment such as electron beam drilling, etching, and exposure, the requirements for the stability of electron beam current, beam spot diameter, and scanning size are quite strict, and the fluctuation of electron acceleration power supply of the equipment has great influence on the size of electron beam current, beam Spot diameter and scanning size have a direct impact, so improving the stability and reliability of the accelerating power supply and reducing its output ripple are necessary measures to ensure the high precision of the electron beam. At present, the electron beam acceleration power supply mostly adopts power electronic pulse width modulation (PWM) converter technology to realize power re...

Claims

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Application Information

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IPC IPC(8): H02M7/217H02M7/5387H02M5/10H02M7/06H02M1/14
Inventor 韦寿祺崔九喜李雪娇秦玉江
Owner GUILIN UNIV OF ELECTRONIC TECH
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