A kind of in-situ test sample platform and in-situ test method

Abstract

The invention discloses an in-situ testing sample stage and an in-situ testing method. The in-situ testing sample stage comprises a microscope chamber, a TEM (transmission electron microscope) sample holder, an electron beam emission gun, a secondary electron probe, a focused ion beam emission gun, a back scattering electron probe and an electron back scattering probe. A chamber is arranged between the front surface and the rear surface of the microscope chamber, the back scattering electron probe and the focused ion beam emission gun penetrate a second side surface of the microscope chamber, the electron beam emission gun penetrates the upper surface of the microscope chamber, the focused ion beam emission gun penetrates a first side surface of the microscope chamber, a first flange hole is formed in a fourth side surface of the microscope chamber, a second flange hole is formed in a third side surface of the microscope chamber, and the TEM sample holder is mounted in the first flange hole or the second flange hole. A focused ion beam electron beam microscope and a transmission electron microscope can be combined in use, cut block materials can be directly transferred to a transmission electron microscope sample stage without pollution or man-made damage, and in-situ testing analysis of nano scale and atomic scale can be realized by combining microscopic analysis functions of the focused ion beam electron beam microscope and the transmission electron microscope.

Description

Technical field [0001] The invention relates to the field of sample testing, in particular to an in-situ test sample table and an in-situ test method. Background technique [0002] Focused ion beam electron beam microscope has the characteristics of wide application and multiple analysis functions, while the TEM sample rod of transmission electron microscope is compact, versatile, and can be used for extreme conditions. In-situ, harsh conditions of bulk materials, thin film materials, Test analysis and research on the microstructure and various properties of nanomaterials, functional materials, biomaterials, etc. [0003] In the prior art, the focused ion beam electron beam microscope and the transmission electron microscope are used separately, and the use of the two is often in a sequence relationship. For example, the focused ion beam electron beam microscope cuts the appropriate position and shape of the transmission from the bulk material. Analyze the sample by electron micro...

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