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Alignment Device And Alignment Method

An alignment device and a pre-alignment technology, which are applied in the direction of instruments, electrical recording process equipment using charge patterns, printing, etc., can solve the problems of increased weight, smaller size, and smaller shooting field of view of objects

Inactive Publication Date: 2017-12-08
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in recent years, the size of alignment marks has become smaller due to the demand for finer patterns, and the required positional accuracy has also become finer.
Therefore, a high-resolution and high-magnification camera is used for shooting, resulting in a narrow field of view for shooting
On the other hand, the object to be processed is also further enlarged, which causes the weight of the object to increase and is prone to bending. Therefore, in terms of mechanical position restrictions, it is difficult to position the carrier or the object to be transferred. niche

Method used

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  • Alignment Device And Alignment Method
  • Alignment Device And Alignment Method
  • Alignment Device And Alignment Method

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0179] figure 1 It is a perspective view which shows 1st Embodiment of the pattern forming apparatus of this invention. and, figure 2 is a block diagram showing a control system of the pattern forming apparatus. This patterning device 1 also functions as the alignment device of the present invention. In addition, in figure 1 In , the state in which the external cover is removed is shown in order to express the internal structure of the device. In order to uniformly represent the directions in each figure, such as figure 1 As shown in the lower right, set the XYZ orthogonal coordinate axes. Here, the XY plane represents a horizontal plane, and the Z axis represents a vertical axis. More specifically, the (+Z) direction indicates a vertically upward direction. The front direction when viewed from the device is the (-Y) direction, and access from the outside to the device including loading and unloading of articles is performed along the Y-axis direction.

[0180] The pa...

no. 2 approach

[0311]In addition, in the above-described embodiment, the substrate SB (or the plate SB) is photographed by the substrate pre-alignment camera 241 to the substrate pre-alignment camera 243 and the blanket pre-alignment camera 244 to the blanket pre-alignment camera 246, respectively. PP) and the outer edge of the blanket BL, the upper stage 41 and the lower stage 61 are moved based on the imaged results, thereby performing pre-alignment processing. In this case, since the planar dimensions of the substrate SB and the blanket BL are different, the outer edge of the substrate SB and the outer edge of the blanket BL must be photographed by different cameras, and the number of cameras increases. Instead of this, pre-alignment processing may be performed with a smaller number of cameras, for example, as follows.

[0312] Hereinafter, a second embodiment of the pattern forming apparatus having a function as an alignment apparatus according to the present invention will be described....

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Abstract

In a disclosed pattern forming apparatus, a carry member (BL) carrying a pattern and a transfer-receiving member (SB) receiving the transferred pattern is disposed opposite. A first holding member (61) is moved to position the carry member (BL) on a first target position based on a result derived by imaging at least a portion of an outer edge of the carry member (BL). A second holding member (41) is moved to position the transfer-receiving member (SB) on a second target position based on a result derived by imaging at least a portion of an outer edge of the transfer-receiving member (SB). A first alignment mark formed in the carry member (BL) and a second alignment mark formed in the transfer-receiving member (SB) are imaged. At least one of the first holding member (61) and the second holding member (41) is moved base on the result of imaging such that the carry member (BL) the transfer-receiving member (SB) are aligned in position.

Description

[0001] related divisional application [0002] This application is a divisional application of an invention patent application titled "Pattern Forming Device and Pattern Forming Method, and Alignment Device and Alignment Method" with application number 201410060525.4. The filing date of the original application is February 2014 January 21. technical field [0003] The present invention relates to a technology for position alignment of two objects held in a manner that their main surfaces are adjacent to each other, and in particular to an alignment device and an alignment method. Background technique [0004] There is a technical field in which two objects are arranged in a predetermined positional relationship in a state where their main surfaces are adjacent to and facing each other. For example, as a technique for forming a pattern on a substrate such as a glass (galss) substrate or a semiconductor substrate, for example, as described in Patent Document 1, a carrier carr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41F16/00
CPCB41F16/0093B41F17/14B41F33/00B41P2233/00G03G15/1605
Inventor 川越理史増市干雄上野博之上野美佳谷口和隆正司和大芝藤弥生田中哲夫陶山武史
Owner DAINIPPON SCREEN MTG CO LTD