Material outgassing rate measuring device based on double-test-chamber gas path conversion

Abstract

The invention discloses a material outgassing rate measuring device based on double-test-chamber gas path conversion. The material outgassing rate measuring device comprises a sample chamber, whereina first test chamber and a second test chamber are arranged at the two sides of the sample chamber; the first test chamber and the second test chamber respectively communicate with the sample chamberthrough a first through hole and a second through hole; the first test chamber is connected with a first vacuum gauge tube; the sample chamber is connected with a second vacuum gauge tube; the secondtest chamber is connected with a third vacuum gauge tube; the first test chamber is connected with a molecular pump and a mechanical pump through an angle valve; the first test chamber is connected with an ion pump through a first insertion plate valve; the second test chamber is connected with the ion pump through a second insertion plate valve. According to the material outgassing rate measuringdevice based on the double-test-chamber gas path conversion, a double-test chamber symmetrical air path conversion structure is used; during the measurement of the outgassing rate of a material sample to be tested, only the vacuum degree value displayed by the same vacuum gauge tube needs to be read for calculation; the errors generated by different vacuum regular pipes in the measuring process are avoided; the measuring precision is high; the uncertainty is small; the measurement lower limit is extended; the measuring range is wide.

Description

technical field [0001] The invention belongs to the technical field of vacuum material measurement, and relates to a material outgassing rate measuring device, in particular to a material outgassing rate measuring device based on double test chamber gas circuit conversion. Background technique [0002] Materials placed in a vacuum environment will produce the following three forms of outgassing: 1. The desorption of gas adsorbed on the surface of the material in the atmospheric environment; 2. The gas dissolved in the material is released by diffusion; 3. The material itself evaporation and decomposition. [0003] Vacuum environments are increasingly used in modern scientific research and industrial production, such as spacecraft ground tests, vacuum coating, semiconductor processing, etc. Therefore, research work related to outgassing of vacuum materials has been carried out at home and abroad. With the gradual improvement of the experimental and production environment re...

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Problems solved by technology

[0004] At present, the existing vacuum material outgassing rate measurement devices and measurement methods generally have shortcomings such as low measurement accuracy, large uncertainty, and narrow measurement range.

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