Correction method for near-field effect of triplet target array
A near-field effect, triplet technology, applied in the field of correction, can solve the problem of deviation between the ideal position of the radiation center and the actual position, and achieve the effect of improving the target control accuracy
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[0018]The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be pointed out that for those of ordinary skill in the art, a number of modifications and improvements can be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0019]Such asFigure 1 to Figure 3As shown, the near-field effect correction method of the triple target array of the present invention includes the following steps:
[0020]Step 1: Calibrate the accuracy of the array triplet, and measure the position accuracy in the horizontal and vertical directions respectively. Due to the near-field effect distribution characteristics of the triplet, the measurement points are selected as followsfigure 1 The middle rectangular area is measured, and...
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