Device and method for quickly adjusting Fabry-Perot interferometer

A Perot interferometer, fast adjustment technology, applied in the field of optics, can solve problems such as difficult alignment of mirrors, and achieve the effects of easy implementation, improved adjustment accuracy and adjustment speed, and simple structure

Active Publication Date: 2018-07-13
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of difficult alignment of the two mirrors of the Fabry-Perot interferometer with a flat-concave cavity, and to provide a method and device for quickly adjusting the Fabry-Perot interferometer

Method used

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  • Device and method for quickly adjusting Fabry-Perot interferometer
  • Device and method for quickly adjusting Fabry-Perot interferometer
  • Device and method for quickly adjusting Fabry-Perot interferometer

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Embodiment 1

[0026] A method for quickly adjusting the Fabry-Perot interferometer of the present invention, in order to solve the problem of low transmittance of the Fabry-Perot cavity, the edge of the flat mirror 8 forming the Fabry-Perot cavity is processed A part of the uncoated reflective film area is convenient for observing the reflection spot of the reflector behind it and the interference fringes formed by the reflected light of the two reflectors; in order to realize the alignment of the concave reflector 10 and the plane reflector 8, an annular Transition reference mirror 9, when adjusting the Fabry-Perot interferometer with flat concave cavity, first adjust the transition reference mirror 9 to align with the concave reflector 10, and then adjust the plane reflector 8 to align with the transition reference mirror 9. The mirror 9 is parallel, so that the alignment of the plane mirror 8 and the concave mirror 10 is realized; during the adjustment process, an enlarged parallel laser ...

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Abstract

The invention belongs to the technical field of optics and relates to a device and method for quickly adjusting a Fabry-Perot interferometer. A part of an area without coating of a reflective film isprocessed at the edge of a planar reflector forming the plane-concave Fabry-Perot interferometer to solve the problem of difficulty in observation of reflection light spots and interference fringes inan adjusting process due to low transmittance of the Fabry-Perot interferometer. By introduction of a transition reference mirror aligned to a concave reflector and the planar reflector, alignment adjustment of the two reflectors of the plane-concave Fabry-Perot interferometer is realized. The device comprises a laser, a collecting lens, a diaphragm, a collimating lens, a spectroscope, a lens, anobservation screen, the planar reflector, the transition reference mirror and the concave reflector. By adoption of the method, Fabry-Perot interferometer adjusting precision is improved while adjusting speed is increased, and a practical value in adjustment of a precision measurement system with the Fabry-Perot interferometer is achieved.

Description

technical field [0001] The invention relates to a method and a device for quickly adjusting a Fabry-Perot interferometer, in particular to a method and a device for quickly adjusting a flat-cavity Fabry-Perot interferometer, and belongs to the field of optical technology. Background technique [0002] The Fabry-Perot interferometer adopts the principle of multi-beam interference. Because it has a significant advantage in measurement resolution compared with the double-beam interferometer, it has received much attention in the research of micro-displacement measurement technology with nanometer accuracy. The Fabry-Perot interferometer used for micro-displacement measurement includes a flat-cavity interferometer composed of two plane mirrors and a flat-cavity interferometer composed of a plane mirror and a concave mirror. The basic principle of using the Fabry-Perot interferometer to measure the micro-displacement is to lock the frequency of the tunable laser on the resonance ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/30G01J3/26
CPCG01J3/26G02B27/30
Inventor 任冬梅兰一兵朱振宇段小艳
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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