Terahertz transmitting antenna and terahertz spectrum detection device
A transmitting antenna and spectral detection technology, applied in the field of terahertz spectroscopy, can solve the problems of low power and narrow frequency band of terahertz source
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[0069] The preparation process of the terahertz transmitting antenna 10 may follow the following steps. A silicon dioxide dielectric layer is provided as the substrate 200 . A copper strip is deposited on the lower surface of the substrate 200 to form the microstrip feeder 100 . A copper film is deposited on the upper surface of the substrate 200 . Four slits are etched on the upper copper film, and the structure and size of each slit are designed according to the transmission frequency band of the terahertz transmitting antenna 10 . Graphene of the same size is transferred into the slit by CVD, and the entire copper film is used as the conductive plate 300, and grounded. Graphene is deposited in the four slits as the antenna switch 310 . High resistance silicon is grown on the copper film as the insulating layer 400 . A polysilicon electrode is formed above the graphene in each slit as the conductive electrode 410 . Different voltages are applied to both ends of the cond...
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