Liquid droplet measurement method, liquid droplet measurement device, and method and apparatus for manufacturing device

A measuring device and a measuring method technology, which are applied in the field of device manufacturing devices, and can solve problems such as difference in film thickness of functional materials, uneven brightness, and defective devices.

Active Publication Date: 2018-11-02
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This is because if the discharge amount of liquid droplets is not uniform, the film thickness of the functional material will vary, resulting in defec...

Method used

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  • Liquid droplet measurement method, liquid droplet measurement device, and method and apparatus for manufacturing device
  • Liquid droplet measurement method, liquid droplet measurement device, and method and apparatus for manufacturing device
  • Liquid droplet measurement method, liquid droplet measurement device, and method and apparatus for manufacturing device

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Experimental program
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Effect test

Embodiment approach 1

[0086] figure 1 A panel manufacturing apparatus including a droplet measurement device for carrying out the droplet measurement method of the present invention is shown. The panel manufacturing device includes a droplet discharge device 1 , a droplet measurement device 2 , a decompression chamber 3 , and a droplet shape measurement device 4 .

[0087] The decompression chamber 3 is used when drying the applied liquid droplets. The droplet measurement device 2 obtains the volume or surface shape of the droplet 30 in a short time based on brightness information obtained by imaging the droplet 30 discharged onto the sample substrate 19 by the droplet discharge device 1 . This result is fed back to the droplet discharge device 1, so that the subsequent droplet discharge operation is brought closer to the target state.

[0088] The droplet shape measuring device 4 provided independently from the droplet measuring device 2 is a device for creating a correspondence table between th...

Embodiment approach 2

[0193] In Embodiment 1, the droplet measurement device 2 is provided independently of the droplet discharge device 1, but it may also be as Figure 11 Combine like that. Figure 11 It is a perspective view of a droplet discharge device in which the droplet measuring device 2 and the droplet discharge device 1 are integrated.

[0194] In the droplet discharge device 1 , the imaging unit 20 is provided on the support unit 11 . On the production table 8 , a concave portion 44 is formed in the measurement table 21 of the droplet measurement device 2 . Moreover, being able to figure 2 The brightness information of the sample substrate 19 imaged by the imaging unit 20 is processed as shown.

[0195] In the present embodiment, the droplet discharge module head 15 is arranged in the longitudinal direction in the sub-scanning direction of the stage 9 , and therefore, the recess 44 is also preferably provided to be elongated in the sub-scanning direction of the stage 9 .

[0196] I...

Embodiment approach 3

[0199] In Embodiment 1, the case where the printed object 7 created by the liquid droplet discharge device 1 is used as the sample substrate 19 as it is, or the case where the printed object 7 is cut and used as the sample substrate 19 has been described. That is, the case where the sample substrate 19 on which droplets have been printed is set on the measurement stage 21 of the droplet measurement device 2, and a correspondence table is created.

[0200] However, the line head 6 intended to be used in the droplet discharge device 1 can be provided on the side of the droplet measuring device 2 .

[0201] That is, the sample substrate 19 on which the droplet 30 and the dummy droplet 31 are not formed is set on the measurement stage 21 of the droplet measurement device 2 . Thereafter, in the droplet measurement device 2, the droplet 30 and the dummy droplet 31 are printed on the sample substrate 19 corresponding to the position of the concave portion 44 of the measurement table ...

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PUM

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Abstract

A liquid droplet measurement method and a liquid droplet measurement device with which the luminance contrast can be improved without making changes in, for example, the numerical aperture (NA) of a lens when the quantity of reflected light from the surface of the measurement target liquid droplet alone cannot provide a sufficient luminance contrast. A method and an apparatus for manufacturing a device are also provided. The liquid droplet measurement device includes: a measurement table having a surface with a recess and for holding a translucent sample substrate; an imaging section that applies light onto the sample substrate having formed thereon a liquid droplet, and measures quantities of reflected light from the sample substrate and the liquid droplet; and a measurement control unitthat determines a volume or a surface shape of the liquid droplet using luminance information of the reflected light quantities measured by the imaging section, wherein the thickness of the sample substrate is greater than the wavelength of the light and is less than the focal length of the liquid droplet.

Description

technical field [0001] The present invention relates to a droplet measurement method, a droplet measurement device, a device manufacturing method, and a device manufacturing device. Background technique [0002] As a method of manufacturing devices such as color filters of liquid crystal displays and organic EL displays, for example, a panel manufacturing method is known in which a liquid containing a functional material is ejected as droplets from a plurality of nozzles by an inkjet method, Forms a film of functional material on the object to be printed. [0003] In this case, it is an important process to acquire the correspondence between the setting of the control device for controlling the discharge amount of liquid droplets and the actual discharge amount of liquid droplets, and to control the discharge amount of liquid droplets to a constant value. This is because, if the ejection amount of liquid droplets is not uniform, the film thickness of the functional material...

Claims

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Application Information

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IPC IPC(8): G01B11/00G01B11/24B41J2/01
CPCB41J2/01G01B11/00G01B11/24G06T2207/10024G06T7/62H10K71/135G02F1/1309H10K71/00G01J1/02G01B11/303B41M5/0047B41M3/003B41M5/0064B41J2/04558B41J2/0456B41J29/393
Inventor 末益智志增永圭二郎
Owner PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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