Novel sensing grid for displacement measurement and working method thereof
A technology for displacement measurement and direction measurement, which is applied in the direction of measuring devices, electric devices, and electromagnetic means, can solve the problems that glass carriers cannot achieve shock resistance and vibration characteristics, and achieve simple structure, extended application, and removal of interference signals and The effect of the noise signal
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[0029] The specific implementation manners of the present invention will be briefly described below in conjunction with the accompanying drawings.
[0030] Such as figure 1 , figure 2 , image 3Shown is a new type of sensing grid for displacement measurement and its working method, which is characterized in that: it is composed of a measuring head structure 1 and a sensing grid ruler structure 5, and the measuring head structure 1 is located on the upper part of the sensing grid ruler structure 5, so The measuring head 1 is movably connected with the sensing grid ruler 5, and the measuring head structure 1 is also provided with a primary coil 2, four secondary coils 3 and a reference coil 4, and the primary coil 2 is located in the measuring head structure 1 Inside, the primary coil 2 is fixedly connected to the measuring head structure 1, the primary coil 2 is etched on the measuring head structure 1 by micro-multilayer technology, and the four secondary coils 3 are separa...
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