A waveguide filter

A waveguide filter and shielding layer technology, applied in the field of semiconductor manufacturing, can solve the problem that the filter cannot be used in the terahertz frequency band
CN110635203BActive Publication Date: 2021-10-15THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
Publication Date
2021-10-15

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Abstract

The invention discloses a waveguide filter, comprising: a first shielding layer with a first through hole; an intermediate support layer with a frame structure arranged on the first shielding layer; a second shielding layer with a There is a second through hole, which is arranged on the intermediate support layer, and forms a waveguide cavity together with the first shielding layer and the intermediate support layer. The left end of the second shielding layer is provided with a signal input port, and the right end of the second shielding layer is provided with a signal input port. Output port; first signal transmission structure, the first end of the first signal transmission structure is set in the signal input port, the second end of the first signal transmission structure extends through the intermediate support layer to the first shielding layer, and is connected with the first The shielding layer is connected; the second signal transmission structure, the first end of the second signal transmission structure is set in the signal output port, the second end of the second signal transmission structure extends through the intermediate support layer to the first shielding layer, and is connected to the first shielding layer A shielding layer is connected. The present invention can be applicable to the use requirement of the terahertz frequency band.
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Description

technical field

[0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a waveguide filter. Background technique

[0002] Terahertz wave (THz) includes electromagnetic waves with a frequency of 0.1 to 10 THz, and its wavelength range is 30 μm to 3 mm. It is at the edge of the far-infrared spectrum of high frequency and low frequency in the millimeter wave band of electromagnetic waves. It is widely used in communications, radar, and electronics. Countermeasures, electromagnetic weapons, astronomy, medical imaging, non-destructive testing, security inspection and other fields. In practical applications, the terahertz system needs to filter out electromagnetic noise outside the unnecessary frequency range and improve the anti-interference ability, which requires the use of filters.

[0003] At present, microstrip planar filters are commonly used. The application range of microstrip filters is not wide, and the scalability is not st...

Claims

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