High-precision gyroscope

Abstract

The invention provides a high-precision gyroscope. The gyroscope comprises a base of a rectangular structure, a sensing unit arranged on a top face of the base and a plurality of anchor blocks locatedon the same layer as the sensing unit, wherein the anchor blocks are arranged around the sensing unit at intervals, the anchor blocks fix the sensing unit to the base through an insulating layer, thesensing unit includes a mass block and movable mass blocks annularly arranged on peripheral sides of the mass block respectively, a first spring beam used for elastically connecting the mass block and the movable mass blocks, a movable mass block frame which is annularly arranged on the mass block and located on the side, away from the mass block, of the movable mass block, comb teeth connected with the movable mass block frame, fixed comb teeth, and a second spring beam connecting the movable mass block with the movable mass block frame, the fixed comb teeth and movable comb teeth form a capacitor, and the second spring beam extends to be fixed with the anchor blocks. Compared with the prior art, the high-precision gyroscope is large in frequency bandwidth, high in quality factor Q valueand higher in precision.

Description

【Technical field】 [0001] The invention relates to a sensor device, in particular to a high-precision gyroscope used in portable electronic products. 【Background technique】 [0002] With the development of electronic technology, gyroscopes are widely used in various portable electronic devices such as mobile phones, IPADs, etc., to detect the deflection of physical quantities, the rotational angular velocity when tilting, and to realize 3D actions, which are favored by consumers. [0003] The gyroscope in the related art includes a substrate, four sensing units arranged in a matrix arranged on the substrate, and an anchor block located on the same level as the sensing unit, and the anchor block fixes the sensing unit to the substrate through an insulating layer. Describe the base. The sensing unit includes a rectangular mass, four rectangular and hollow moving mass frames that surround the mass and are arranged parallel to and spaced from its four sides, and extend inwardly ...

AI Technical Summary

Problems solved by technology

[0004] The spring beam structure between the mass block and the moving mass block frame determines the resonant frequency properties of the gyroscope, and in the gyroscope of the related art, due to the existence of the first spring beam, the second elastic spring beam avoids the first spring beam, The length of its structure is limited by the side length of the mass block, which is generally less than one-third of the side length, thus limiting the flexibility and bandwidth of the gyroscope frequency design in the related art, and it is affected by the impact of external force due to the limitation of the spring beam structure However, there is a defect that the Q value of the quality factor is not good.

Images