High-precision gyroscope

A gyroscope, high-precision technology, applied in the direction of gyroscope/steering sensing equipment, instrument, gyro effect for speed measurement, etc., can solve the problems of limited flexibility and bandwidth, poor quality factor Q value, etc., to improve reliability , Delay the lack of reliability, improve the effect of Q value

CN110887467AActive Publication Date: 2020-03-17AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2020-03-17

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Abstract

The invention provides a high-precision gyroscope. The gyroscope comprises a base of a rectangular structure, a sensing unit arranged on a top face of the base and a plurality of anchor blocks locatedon the same layer as the sensing unit, wherein the anchor blocks are arranged around the sensing unit at intervals, the anchor blocks fix the sensing unit to the base through an insulating layer, thesensing unit includes a mass block and movable mass blocks annularly arranged on peripheral sides of the mass block respectively, a first spring beam used for elastically connecting the mass block and the movable mass blocks, a movable mass block frame which is annularly arranged on the mass block and located on the side, away from the mass block, of the movable mass block, comb teeth connected with the movable mass block frame, fixed comb teeth, and a second spring beam connecting the movable mass block with the movable mass block frame, the fixed comb teeth and movable comb teeth form a capacitor, and the second spring beam extends to be fixed with the anchor blocks. Compared with the prior art, the high-precision gyroscope is large in frequency bandwidth, high in quality factor Q valueand higher in precision.
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Description

Technical field

[0001] The invention relates to a sensor device, in particular to a high-precision gyroscope used in portable electronic products.

Background technique

[0002] With the development of electronic technology, gyroscopes are widely used in various portable electronic devices such as mobile phones, IPADs, etc., to detect the deflection of physical quantities, the rotational angular velocity when tilting, and to realize 3D actions, which are favored by consumers.

[0003] The gyroscope in the related art includes a substrate, four sensing units arranged in a matrix arranged on the substrate, and an anchor block located on the same level as the sensing unit, and the anchor block fixes the sensing unit to the substrate through an insulating layer. Describe the base. The sensing unit includes a rectangular mass, four rectangular and hollow moving mass frames that surround the mass and are arranged parallel to and spaced from its four sides, and extend inwardly ...

Examples

Embodiment Construction

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0030] Please also see Figure 1-3 , the present invention provides a high-precision gyroscope 100 , including a base 1 , a sensing unit 2 , an anchor block 3 and a beam 4 .

[0031] The sensing unit 2 is arranged on the top surface of the base 1, the anchor block 3 includes multiple anchor blocks and is located on the same level as the sensing unit 2, and the plurality of anchor blocks 3 are arranged at intervals around the sensing unit 2, and the anchor bloc...