35results about How to "Improve quality factor Q value" patented technology

An electronic nose applying both sound surface wave transducer and gas-phase chromatograph separation column is prepared for connecting six-way valve separately to sample feeding-in opening, absorption tube, gas-phase chromatograph separation column, gas-carrying bottle and air pump; connecting said separation column to micro-nozzle; setting sound surface wave transducer under micro-nozzle; arranging said transducer on semiconductor refrigeration plate and connecting said transducer to frequency detector. Its detecting method is also disclosed.

The invention provides a magnesium-zinc soft magnetic ferrite. The magnesium-zinc soft magnetic ferrite comprises main ingredients and accessory ingredients, wherein the main ingredients comprise the following components in percentage by weight: 68.92 to 70.59 percent of ferric oxide, 16.03 to 18.52 percent of zinc oxide, 8.07 to 9.83 percent of magnesium oxide and 3.62 to 3.86 percent of copper oxide; and the accessory ingredients comprise the following components in percentage by weight: 0.1 to 0.3 percent of bismuth trioxide and 0.1 to 0.3 percent of vanadium pentoxide. The invention also relates to a method for preparing the magnesium-zinc soft magnetic ferrite. The performance of the material is close to that of a nickel-zinc soft magnetic ferrite, the loss of the magnesium-zinc soft magnetic ferrite is low when the magnesium-zinc soft magnetic ferrite is used at high frequency, and the cost is relatively lower.

A high-power, tunable and narrow linewidth external cavity semiconductor laser belongs to the technical field of a semiconductor laser and aims to solve the problem that the comprehensive requirements such as mode characteristic, beam quality, linewidth, coherence and tunability of a single laser are difficult to be met. The high-power, tunable and narrow linewidth external cavity semiconductor laser is formed by directly coupling a gain chip, a tunable external cavity and an inclined power amplifier with a curved waveguide through an end surface, wherein the gain chip is used for achieving laser output of single-mode wide spectrum; the tunable external cavity adopts a silicon on insulator (SOI) material; the linewidth is narrowed by increasing cavity length and a quality factor Q of a laser resonant cavity; the tunability is achieved by the adoption of refractive index of a thermal modulation material; and by the arrangement of the inclined power amplifier with curved waveguide, laser output with high power and high beam quality is achieved under ensuring the stability of the gain chip and the tunable external cavity. By the high-power, tunable and narrow linewidth external cavity semiconductor laser, a novel semiconductor laser integrating a single mode, high power, high beam quality, narrow linewidth, high coherence, tunable wavelength and the like is achieved, and the high-power, tunable and narrow linewidth external cavity semiconductor laser has important application prospect in the fields such as space laser communication and laser radar.

The invention discloses a passive wireless pressure sensor based on flexible substrates. The passive wireless pressure sensor comprises an upper metal layer, an upper flexible substrate, a middle flexible substrate, a lower flexible substrate and a lower metal layer, wherein interlinked electrical through holes are formed in the upper flexible substrate, the middle flexible substrate and the lower flexible substrate; a cavity is formed on the middle flexible substrate; the upper metal layer comprises a planar inductance coil and a capacitive upper electrode plate which is arranged on the middle part of the planar inductance coil; an inner-side connecting head of the planar inductance coil is connected with the capacitive upper electrode plate; the lower metal layer comprises a capacitive lower electrode plate and an interconnecting wire, wherein the dimension of the capacitive lower electrode plate is the same as that of the capacitive upper electrode plate, the position of the capacitive lower electrode plate is opposite to that of the capacitive upper electrode plate, and the interconnecting wire is connected with the capacitive lower electrode plate; an outer-side connecting head of the planar inductance coil of the upper metal layer is connected with the interconnecting wire of the lower metal layer by a conductive medium column which is arranged in the electrical through holes; and the cavity of the middle flexible substrate is arranged between the capacitive upper electrode plate and the capacitive lower electrode plate. The pressure sensor has the excellent performances of non-contact, high flexibility, high quality factor and low power consumption.

The invention discloses a plane spiral inductor; the width of a lead wire of the plane spiral inductor is gradually increased from interior to exterior, the distance between the lead wires is gradually reduced from an inner ring to an outer ring; compared with the inductor with the traditional structure, eddy effect and proximity effect of the plane spiral inductor are reduced at high frequency, the series resistance of inductor coil lead wires is reduced, so as to improve the quality factor Q value of the inductor on the premise of not changing the domain area and the size of inner diameter; a preparation process of the plane spiral inductor is compatible to the conventional CMOS process, and the performance of an important functional unit at the CMOS radio-frequency front end can be improved.

The invention relates to a high-sensitivity resonant optic gyro, and particularly relates to a double-resonant cavity resonant optic gyro which comprises an isolation collimation chip tunable light source Laser, a first coupler C1, a multifunctional integrated optic modulator, a third coupler C3, a second coupler C2, a fourth coupler C4, a main resonant cavity, a first photoelectric detector PD1, a first lock-in amplifier LIA1, a second photoelectric detector PD2, a second lock-in amplifier LIA2, and a feedback control circuit FBC, and also comprises a circular auxiliary resonant cavity with an ohmic contact disposed at the central position, a temperature control module and a fifth coupler C5; an output port is disposed at a position opposite to an input port on the main resonant cavity; an input end of the fifth coupler C5 contacts the output port of the main resonant cavity; an output end of the fifth coupler C5 contacts an input port of the auxiliary resonant cavity; the temperature control module is connected with the ohmic contact through wires made by MEMS technology; and the invention solves the problem of low sensitivity of optic gyros.

The invention discloses an organic-substrate-based passive radio capacitive humidity sensor packaging structure, which comprises a humidity sensitive capacitor, an organic packaging substrate, a planar spiral inductor, a back connecting wire, an external connection pad, an internal connection pad, a sealing cover, an upper covering layer and a lower covering layer, wherein the humidity sensitive capacitor and the planar spiral inductor are respectively and fixedly connected to the top surface of the organic packaging substrate; one end of the back connecting wire is connected with an external port of the planar spiral inductor, and the other end of the back connecting wire is connected with the external connection pad which is connected with one electrode of the humidity sensitive capacitor; an internal connecting wire of the planar spiral inductor is connected with the internal connection pad which is connected with the other electrode of the humidity sensitive capacitor; and the sealing cover is fixedly connected onto the organic packaging substrate through an adhesive layer. The humidity sensor packaging structure consists of the wireless passive elements and has the performance advantages of no contact, small size and low power consumption.

The invention relates to the technical field of semiconductor devices, relating to a method for improving the quality of a metal-intermediate-metal (MIM) capacitor, applied to the manufacturing process of semiconductor passive components, comprising the steps of: 1. on a substrate, photoetching a bottom pole plate pattern; 2. in turn evaporating Ti / Au to form the capacitor bottom pole plate; 3. depositing an intermediate layer; 4. making an air bridge; 5. photoetching a top pole plate pattern, and plating to form the top pole plate. The method is simple, low cost and very good repeatability and the properties of the obtained capacitor devices are largely improved as compared with those of the traditional process.

The invention provides a piezoelectric resonator. The piezoelectric resonator comprises a bottom electrode; a piezoelectric layer is stacked on the bottom electrode; a top electrode is stacked on the side, away from the bottom electrode, of the piezoelectric layer; a sound wave reflecting layer structure is formed on the side, away from the piezoelectric layer, of the bottom electrode; a top electrode leading-out structure is positioned on one side, far away from the bottom electrode, of the piezoelectric layer; the bottom electrode, the piezoelectric layer, the top electrode and the sound wave reflecting layer structure are overlapped together to form a space region which is defined as a resonance region; the top electrode leading-out structure is connected with the top electrode in the resonance area and extends out of the resonance area from the inside of the resonance area, and the top electrode leading-out structure and the orthographic projection part of the top electrode towards the piezoelectric layer are overlapped. The invention further provides a manufacturing method of the piezoelectric resonator. Compared with the prior art, the manufacturing method of the piezoelectric resonator can reduce the influence of the growth defect of the piezoelectric layer on the performance of the device, so that the piezoelectric resonator structure has a higher quality factor Q and a higher effective electromechanical coupling coefficient.

The invention provides a coaxial resonant cavity microwave light source which comprises a magnetron (1) for generating microwaves, a magnetron antenna (5) which is connected with the magnetron (1), a tapered waveguide (7) which is fixed on the magnetron (1) and is located at the periphery of the magnetron antenna (5), a shielding case which is fixed on the tapered waveguide (7) and a coaxial resonant cavity (8) which is formed by the magnetron antenna (5), the tapered waveguide (7) and the shielding case, wherein an electrodeless bulb (3) is arranged in the coaxial resonant cavity (8). The electrodeless bulb is a small quartz ball, and the small quartz ball is filled with luminescent substances and starting gas. The center lines of the electrodeless bulb (3), the tapered waveguide (7), the magnetron antenna (5) and the shielding case are at the same central axis line. The coaxial resonant cavity microwave light source is characterized in that the coaxial resonant cavity is a lambada / 4 coaxial resonant cavity; a light hole (14) is formed at the top of the shielding case, and the center of the light hole (14) is located on the central axis line. The shielding case is a mesh shielding case (4) or a non mesh shielding case (16).

The invention discloses a non-fully-convex dioctahedral transformer Balun which comprises an encircled pattern formed by encircling a primary winding and a secondary winding at a certain interval, wherein the encircled pattern has a dioctahedral structure; and sixteen angles include eight convex outer angles and eight concave inner angles which are arranged close to one another. The transformer Balun has a novel structure, small chip area, high resonant frequency and high primary and secondary inductance. High resonant frequency and high primary and secondary inductance can be provided on a system on a chip, the transformer Balun can be manufactured under the processing conditions of a BiCMOS (Bipolar-Complementary Metal-Oxide-Semiconductor Transistor) and a CMOS (Complementary Metal-Oxide-Semiconductor Transistor), high quality factor, high resonant frequency and high primary and secondary inductance are realized, and only small ship area is consumed.

The invention relates to a low-temperature co-fired microwave dielectric ceramic material and a preparation method thereof and an electronic component. The low-temperature co-fired microwave dielectric ceramic material comprises the following raw materials in percentage by mass: 48-52% of calcium carbonate; 6%-8% of magnesium oxide; 6%-8% of titanium dioxide; 36%-38% of silicon dioxide; 0.1%-0.2% of manganese oxide; 0.5%-1% of lithium oxide; and 1%-3% of bismuth oxide. The co-fired microwave dielectric ceramic material sintered by the liquid-phase reaction procedures of burdening, primary ball milling, calcining, secondary ball milling, granulating, forming and bowl-filling sintering of the components is low in dielectric constant and high in quality factor Q value, and the temperature coefficient of resonance frequency is close to 0; secondly, manganese oxide can generate a liquid phase under the high-temperature condition, sintering is promoted, the sintering temperature is reduced, and energy consumption is reduced; in addition, the preparation method does not generate pollution in the preparation process.

A dielectric ceramic material comprising titanium dioxide and cobalt oxychloride, and a method of preparing the same are provided. The dielectric ceramic material has a higher quality factor Q value and higher compactness, and the temperature during heating and sintering is also lowered. The temperature coefficient of the resonant frequency of the material can be effectively improved by containingtitanium dioxide and cobalt oxychloride.

The invention discloses a passive and wireless acceleration sensing chip for the internet of things and a processing method of the passive and wireless acceleration sensing chip. The passive and wireless acceleration sensing chip comprises an upper structure and a lower structure. The lower structure comprises a lower substrate sheet. The lower substrate sheet is provided with an MEMS capacitor and an MEMS inductor, wherein the MEMS capacitor and the MEMS inductor are connected in series. The upper structure comprises an upper substrate sheet, a movable conductor mass block for MEMS acceleration induction and a supporting beam, the supporting beam is connected with the upper substrate sheet and is fixed to the upper portion of the lower structure, the movable conductor mass block is suspended above the MEMS inductor through the supporting beam, a metal layer is deposited on the bottom of the movable conductor mass block, and when acceleration, perpendicular to the movable conductor mass block, of the acceleration sensing chip exists, the movable conductor mass block vertically moves along with the acceleration.

A dielectric ceramic material and a preparation method thereof, wherein a ball milling medium, a deionized water and a dispersing agent are added to a starting material of an analytically pure alpha-alumina and a sintering aid having a purity of 99.9% or more, and are mixed in a planetary ball mill. Mechanical mixing and drying are carried out to obtain a mixed powder, wherein the mass ratio of the starting material, the ball milling medium and the deionized water is 1:4:1.1 to 1.3, the ball milling time is 4 hours, and the diameter of the ball milling medium is 2-3mm; the mass percentage of the dispersing agent in the dielectric ceramic material is from three thousandths to six thousandths; the mixed powder is placed in a nano-scale circulating sander for sanding and dispersing treatmentto obtain the ceramic powder; the ceramic powder is subjected to heat sintering to further obtain the dielectric ceramic material.

The invention relates to an electronic piano sound box device, which is characterized by comprising a long groove body formed by splicing three long plates which are a lower crosspiece front plate, a lower crosspiece panel and a lower crosspiece rear plate; wherein two ends of the groove body are provided with edge supporting plates; the middle part of the groove body is provided with two middle supporting plates; a pedal set is connected between the two middle supporting plates; and two cover plates are arranged to respectively close a space formed by the edge supporting plates at the left and the right sides of the groove body, the middle supporting plates and the groove body so as to form two symmetrical sound box cavities which take the pedal set as the center. A certain inclined angle is formed between the lower crosspiece panel and the horizontal plane; the two ends of the lower crosspiece panel are symmetrically provided with loudspeaker holes and phase reversing holes; loudspeakers are respectively arranged on the loudspeaker holes on the lower crosspiece panel corresponding to the two sound box cavities; a short partition and a long partition are arranged to divide a phase reversing pipe in each loudspeaker cavity; and the phase reversing holes are communicated with the sound box cavities through the phase reversing pipe. Compared with the prior art, the electronic piano sound box device is novel and practical, and is capable of improving the loudspeaker effect and extending the function of the electronic piano as the active sound box.

The invention discloses a non-fully-convex dioctahedral transformer Balun which comprises an encircled pattern formed by encircling a primary winding and a secondary winding at a certain interval, wherein the encircled pattern has a dioctahedral structure; and sixteen angles include eight convex outer angles and eight concave inner angles which are arranged close to one another. The transformer Balun has a novel structure, small chip area, high resonant frequency and high primary and secondary inductance. High resonant frequency and high primary and secondary inductance can be provided on a system on a chip, the transformer Balun can be manufactured under the processing conditions of a BiCMOS (Bipolar-Complementary Metal-Oxide-Semiconductor Transistor) and a CMOS (Complementary Metal-Oxide-Semiconductor Transistor), high quality factor, high resonant frequency and high primary and secondary inductance are realized, and only small ship area is consumed.

The invention provides a high-precision gyroscope. The gyroscope comprises a base of a rectangular structure, a sensing unit arranged on a top face of the base and a plurality of anchor blocks locatedon the same layer as the sensing unit, wherein the anchor blocks are arranged around the sensing unit at intervals, the anchor blocks fix the sensing unit to the base through an insulating layer, thesensing unit includes a mass block and movable mass blocks annularly arranged on peripheral sides of the mass block respectively, a first spring beam used for elastically connecting the mass block and the movable mass blocks, a movable mass block frame which is annularly arranged on the mass block and located on the side, away from the mass block, of the movable mass block, comb teeth connected with the movable mass block frame, fixed comb teeth, and a second spring beam connecting the movable mass block with the movable mass block frame, the fixed comb teeth and movable comb teeth form a capacitor, and the second spring beam extends to be fixed with the anchor blocks. Compared with the prior art, the high-precision gyroscope is large in frequency bandwidth, high in quality factor Q valueand higher in precision.

The invention provides a cross winding type coupling device for wireless electric energy transmission of a rotary device. The cross winding type coupling device comprises a power-supply magnetic coreand power-supply coils, wherein the power-supply magnetic core is a square strip shaped magnetic core and comprises multiple primary side magnetic cores and multiple secondary side magnetic cores, themultiple primary side magnetic cores and the multiple secondary side magnetic cores are of framework-type magnetic core structures defined by circumferential arrays, the power-supply coils include aprimary side coil and a secondary side coil, the primary side coil and the secondary side coil are coaxially nested and are formed by winding wires around the respective magnetic cores in a cross winding way, the framework-type magnetic core structures defined by the multiple primary side magnetic cores are connected with a fixed end, and the framework-type magnetic core structures defined by themultiple secondary side magnetic cores are connected with a rotary end, so that the mode is formed that a fixed power supply device supplies power for a rotary device; by adopting reverse arrangement,the mode is formed that the rotary power supply device supplies power for the fixed power. The cross winding type coupling device is safe and reliable and can achieve stable and wireless electric energy transmission in a 360-degree rotation range.

The invention discloses a passive wireless pressure sensor based on a flexible substrate, which comprises an upper metal layer, an upper flexible substrate, a middle flexible substrate, a lower flexible substrate and a lower metal layer. There are connected electrical through holes, and a cavity is provided on the middle flexible substrate; the upper metal layer includes a planar inductance coil and a capacitor upper plate located in the middle of the planar inductance coil, and the inner connector of the planar inductance coil is connected to the capacitor upper plate; The lower metal layer includes a capacitor lower plate that is the same size as the capacitor upper plate and is opposite to the capacitor, and an interconnection line connected to the capacitor lower plate; The conductive medium column is connected with the interconnection line of the lower metal layer, and the cavity of the middle flexible substrate is located between the upper pole plate of the capacitor and the lower pole plate of the capacitor. The pressure sensor has excellent performances of non-contact, high sensitivity, high quality factor and low power consumption.

The invention discloses a graphene surface acoustic wave filter device and a preparation method thereof. The graphene surface acoustic wave filter device comprises a piezoelectric substrate, a catalytic metal electrode layer and a graphene layer, wherein the piezoelectric substrate, the catalytic metal electrode layer and the graphene layer are sequentially arranged from bottom to top, and the graphene layer and the catalytic metal electrode layer jointly form a graphene interdigital electrode. The preparation method comprises the following steps: (1) cleaning the piezoelectric substrate; (2) preparing the catalytic metal electrode layer on the piezoelectric substrate in a graphical manner; and (3) growing graphene on the catalytic metal electrode layer to form the graphene interdigital electrode. According to the invention, the graphene / metal layer is prepared by adopting the method of combining chemical vapor deposition and metal layer catalytic cracking, so that thickness of the catalytic metal electrode layer and graphene growth temperature can be remarkably reduced, the graphene interdigital electrode and the piezoelectric substrate have stronger binding force, and the quality of the graphene and the performance of the surface acoustic wave filter device can be obviously improved.

The invention discloses a filter cover plate, a filter and a processing method for the filter cover plate. A flanged thread through hole used for mounting a tuning screw is formed in the filter cover plate provided by the invention; the cover plate provided with the flanged thread through hole has the characteristics that the flanged thread through hole has a certain depth; the thickness of other places in the cover plate is thinner than the thickness in the place of the flanged thread through hole; therefore, the flanged thread through hole is formed in the filter cover plate and the tuning screw is fixed in the flanged thread through hole, the thickness of the cover plate can be reduced, and enough thread numbers of the tuning screw can be ensured for fixing the tuning screw so as to ensure the stability of the tuning screw; and the overall thickness of the filter cover plate is reduced, so that the volume of the resonant cavity of filter is enlarged, the quality factor Q value is further increased, the insertion consumption of the filter is reduced, and the performance of the filter is improved consequently.

An electronic nose applying both sound surface wave transducer and gas-phase chromatograph separation column is prepared for connecting six-way valve separately to sample feeding-in opening, absorption tube, gas-phase chromatograph separation column, gas-carrying bottle and air pump; connecting said separation column to micro-nozzle; setting sound surface wave transducer under micro-nozzle; arranging said transducer on semiconductor refrigeration plate and connecting said transducer to frequency detector. Its detecting method is also disclosed.

A dielectric ceramic material and a preparation method thereof. The dielectric ceramic material contains titanium dioxide and cobaltous oxide. The quality factor Q value of the dielectric ceramic material is high, and the compactness is high. At the same time, the temperature during heating and sintering is also reduced; because it contains titanium dioxide and cobaltous oxide, the temperature coefficient of the resonant frequency of the material can be effectively improved.

The invention discloses a grid electrode-enhanced surface plasmon laser, which comprises a surface plasmon substrate, a multi-quantum well nanowire and a grid electrode. In the invention, the grid electrode is used to stimulate the nanostructure by electromagnetic field, and the plasmon can form resonance coupling with the excitons in the gain medium to realize the stimulated radiation of photons in the gain medium, and the enhanced surface plasmon excitation is successfully obtained. The core of the nano-laser is to stimulate the carriers in the nano-optical cavity by using the grid electrode to stimulate the carrier in the nano-optical cavity, thereby enhancing the excitation of light in the nano-optical cavity and reducing the threshold of the surface plasmon laser. 0.8W / cm at room temperature 2 Low-threshold lasing improves the quality factor Q value of the laser. The present invention is characterized in that the grid electrode has no contact with the nano-optical cavity, effectively avoids the leakage problem while implementing the electromagnetic field loading, and can break through the limitation of the optical diffraction limit in one dimension.

A dielectric ceramic material and its preparation method, adding ball milling media, deionized water and dispersant to the starting raw materials of analytically pure α-alumina with a purity of more than 99.9% and sintering aids, and mechanically performing the process in a planetary ball mill Mix and dry to obtain a mixed powder, wherein the mass ratio of the starting material, ball milling medium and deionized water is 1:4:1.1 to 1.3, the ball milling time is 4 hours, the diameter of the ball milling medium is 2 to 3 mm, and the dispersant The mass percentage content in the dielectric ceramic material is 3 / 1000 to 6 / 1000; the mixed powder is placed in a nano-scale circulating sander for grinding and dispersing treatment to obtain a ceramic powder; the ceramic powder is heated and sintered, Then a dielectric ceramic material is obtained.

The invention relates to the technical field of varactor circuits, and discloses a low-phase noise varactor circuit, which comprises two capacitors and two resistors, the two capacitors and the two resistors are connected in series, the two resistors are positioned between the two capacitors, a plurality of first variable capacitors are connected in parallel between the two resistors, and a plurality of second variable capacitors are connected in parallel between the two resistors. The two common end nodes are located between the capacitor and the resistor, a plurality of second variable capacitors are connected to the two common end nodes in parallel, and the first variable capacitor and the second variable capacitors are the same in gain but opposite in polarity. According to the invention, the first variable capacitor and the second variable capacitor with the same gain and opposite polarity are selected and connected to the resistor in the same way, so that the phase noise generated by the thermal noise of the resistor through the first variable capacitor at a certain moment can be exactly counteracted by the phase noise generated by the second variable capacitor; and the resistance can select a larger value to improve the quality factor Q value.

The present invention provides a high-precision gyroscope, which includes a rectangular base, a sensing unit arranged on the top surface of the base, and a plurality of anchor blocks located on the same level as the sensing unit, and the plurality of anchor blocks surround the sensing unit. The sensing units are arranged at intervals, and the anchor block fixes the sensing unit on the base through an insulating layer; the sensing unit includes: mass blocks, moving mass blocks respectively arranged around the surrounding sides of the mass blocks, and the mass blocks The block and the moving mass form a first spring beam elastically connected, a moving mass frame surrounding the moving mass and located on the side of the moving mass away from the moving mass, a comb tooth and a moving comb connected to the moving mass frame The teeth form fixed combs of the capacitor, and a second spring beam connecting the moving mass to the moving mass frame and extending to form a fixation with the anchor block. Compared with related technologies, the high-precision gyroscope of the present invention has large frequency bandwidth, high quality factor Q value and higher precision.

The invention discloses a grid electrode enhanced surface plasmon laser. The laser comprises a surface plasmon substrate, a multi-quantum well nanowire and a grid-shaped electrode. According to the grid electrode enhanced surface plasmon laser, the grid-shaped electrode is used for implementing electromagnetic field stimulation on a nanometer structure, meanwhile, plasmons and excitons in a gain medium can form resonance coupling, so that stimulated radiation of photons in the gain medium is achieved, and the enhanced surface plasmon nanometer laser is successfully obtained. According to the core principle of the laser,electromagnetic field stimulation is carried out on carriers in a nano optical cavity by adopting the grid-shaped electrode, so that light in the nano optical cavity is enhanced to generate high-efficiency excitation, the threshold value of the surface plasmon laser is reduced, 0.8 W / cm < 2 > low-threshold lasing at room temperature is realized, and the quality factor Q value of the laser is improved. The device is characterized in that the grid-shaped electrode is not in contact with the nano optical cavity, the problem of electric leakage is effectively avoided while electromagnetic field loading is implemented, and the limitation of optical diffraction limit can be broken through in one dimension.

The invention relates to the technical field of semiconductor fabrication, in particular to a three-dimensional integrated inductance structure; the three-dimensional integrated inductance structure is provided with a plurality of flaky magnetic core units arranged in parallel side by side, and a three-dimensional spiral inductance coil which is wound along the single direction by taking the flaky magnetic core units as a center, so that the inductive magnetic flux is greatly increased, the inductance value is increased, the vortex current is reduced, and the value of quality factor Q is improved.