High precision gyroscope

Abstract

The present invention provides a high-precision gyroscope, which includes a rectangular base, a sensing unit arranged on the top surface of the base, and a plurality of anchor blocks located on the same level as the sensing unit, and the plurality of anchor blocks surround the sensing unit. The sensing units are arranged at intervals, and the anchor block fixes the sensing unit on the base through an insulating layer; the sensing unit includes: mass blocks, moving mass blocks respectively arranged around the surrounding sides of the mass blocks, and the mass blocks The block and the moving mass form a first spring beam elastically connected, a moving mass frame surrounding the moving mass and located on the side of the moving mass away from the moving mass, a comb tooth and a moving comb connected to the moving mass frame The teeth form fixed combs of the capacitor, and a second spring beam connecting the moving mass to the moving mass frame and extending to form a fixation with the anchor block. Compared with related technologies, the high-precision gyroscope of the present invention has large frequency bandwidth, high quality factor Q value and higher precision.

Description

【Technical field】 [0001] The invention relates to a sensor device, in particular to a high-precision gyroscope used in portable electronic products. 【Background technique】 [0002] With the development of electronic technology, gyroscopes are widely used in various portable electronic devices such as mobile phones, IPADs, etc., to detect the deflection of physical quantities, the rotational angular velocity when tilting, and to realize 3D actions, which are favored by consumers. [0003] The gyroscope in the related art includes a substrate, four sensing units arranged in a matrix arranged on the substrate, and an anchor block located on the same level as the sensing unit, and the anchor block fixes the sensing unit to the substrate through an insulating layer. Describe the base. The sensing unit includes a rectangular mass, four rectangular and hollow moving mass frames that surround the mass and are arranged parallel to and spaced from its four sides, and extend inwardly ...

AI Technical Summary

Problems solved by technology

[0004] The spring beam structure between the mass block and the moving mass block frame determines the resonant frequency properties of the gyroscope, and in the gyroscope of the related art, due to the existence of the first spring beam, the second elastic spring beam avoids the first spring beam, The length of its structure is limited by the side length of the mass block, which is generally less than one-third of the side length, thus limiting the flexibility and bandwidth of the gyroscope frequency design in the related art, and it is affected by the impact of external force due to the limitation of the spring beam structure However, there is a defect that the Q value of the quality factor is not good.

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