Passive and wireless acceleration sensing chip for internet of things and processing method thereof

Abstract

The invention discloses a passive and wireless acceleration sensing chip for the internet of things and a processing method of the passive and wireless acceleration sensing chip. The passive and wireless acceleration sensing chip comprises an upper structure and a lower structure. The lower structure comprises a lower substrate sheet. The lower substrate sheet is provided with an MEMS capacitor and an MEMS inductor, wherein the MEMS capacitor and the MEMS inductor are connected in series. The upper structure comprises an upper substrate sheet, a movable conductor mass block for MEMS acceleration induction and a supporting beam, the supporting beam is connected with the upper substrate sheet and is fixed to the upper portion of the lower structure, the movable conductor mass block is suspended above the MEMS inductor through the supporting beam, a metal layer is deposited on the bottom of the movable conductor mass block, and when acceleration, perpendicular to the movable conductor mass block, of the acceleration sensing chip exists, the movable conductor mass block vertically moves along with the acceleration.

Description

technical field [0001] The invention relates to an acceleration sensing chip, in particular to a passive and wireless acceleration sensing chip for the Internet of Things and a processing method thereof. Background technique [0002] The Internet of Things is called the third wave of the information industry after computers and the Internet, and it provides revolutionary information technology and intelligent technology for the global industrialization and urbanization process in the 21st century. As the basic underlying devices of the Internet of Things and the terminal nodes of the Internet of Things—sensors, will be the largest and most basic links in the entire Internet of Things industry chain. The technical level and development speed of the Internet of Things terminal nodes and related industries will directly affect The speed of development of the Internet of Things. [0003] Accelerometers are instruments used to measure acceleration, and have important application...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide a brand-new MEMS structure and signal transmission method for the defect that the acceleration sensors in the Internet of Things in the prior art are all active modes, and realize a passive wireless MEMS acceleration sensor chip , the chip can wirelessly transmit the acceleration signal to the receiving end without power supply

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