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50 results about "Planar inductor" patented technology

Planar inductor structure with integrated shielding to contain electric field

An example planar inductor includes a winding structure including a plurality of conductive windings arranged in layers of a printed circuit board (PCB) around a core, where the plurality of conductive windings include at least a top winding and a bottom winding. The planar inductor includes a conductive shield encasing the winding structure. The conductive shield includes an upper conductive shield layer disposed over the winding structure in a first direction, a lower conductive shield layer disposed under the winding structure in a second direction opposite the first direction, an inner conductive shield disposed within and around the plurality of conductive windings, and an outer conductive shield disposed around and outside the plurality of conductive windings.
Owner:VIRGINIA TECH INTELLECTUAL PROPERTIES INC

Bulk acoustic wave filter integrated with IPD and wireless communication equipment

The utility model provides an IPD-integrated bulk acoustic wave filter and wireless communication equipment, and relates to the technical field of semiconductors. The bulk acoustic wave filter integrated with the IPD comprises a substrate, an acoustic wave reflection structure arranged on the substrate, a film bulk acoustic wave resonator, a parallel plate capacitor and a planar inductor, the film bulk acoustic wave resonator is located above the acoustic wave reflection structure, and the planar inductor is located between the film bulk acoustic wave resonator and the parallel plate capacitor. And the thin film bulk acoustic resonator and the parallel plate capacitor are electrically connected with each other. According to the bulk acoustic wave filter integrated with the IPD, the IPD technology is integrated into the BAW technology, and the integration level and the area utilization rate of the filter are greatly improved. A resonance circuit of the IPD is designed to generate an extremely wide passband, then the bulk acoustic wave resonators are designed, and the frequency of the bulk acoustic wave resonators falls on the two sides of the passband to improve roll-off of the filter, so that the wide passband can be generated, and the good out-of-band rejection effect can be achieved. In addition, by adopting the planar inductor, the technological process of the inductor structure is greatly simplified.
Owner:WUHAN MEMSONICS TECH CO LTD

Bypass echelon current limiting topology and method of solid-state power distribution equipment

The invention discloses a bypass inductor echelon current limiting topology and method for solid-state power distribution equipment, relates to the technical field of power electronic distribution, and is suitable for solid-state power controllers in the fields of aerospace, new energy automobiles and industrial automation. In order to solve the problems that when a large capacitive load is started, a current peak is likely to be generated to damage a device, and an existing current limiting scheme is low in efficiency or large in size, the topology comprises an input circuit, a main power circuit, an auxiliary circuit, a current limiting circuit, an absorption circuit and a load side circuit. According to the method, the auxiliary circuit switch tube is turned on in an echelon mode, and the main switch tube is turned on to complete starting after load voltage approaches power supply voltage and reaches a non-voltage-difference condition. According to the planar inductor integrated PCB, the size is reduced, the problem of long-term heating of a resistor is solved, the TVS overvoltage protection and RC anti-interference design are matched, the current peak is effectively restrained, the system efficiency and reliability are improved, and the high-power-density and differential-pressure-free starting requirements are met.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

A hollow shell PDMS flexible pressure sensing device with an embedded planar inductor coil

ActiveCN115165159BFluid pressure measurement using inductance variationForce measurementInterference resistancePlanar inductor
The present invention discloses a hollow shell PDMS flexible pressure sensing device with an embedded planar inductive coil, comprising: a flexible backing, a hollow shell porous PDMS support body, and a mounting frame; the hollow shell porous PDMS support body is fixed to the upper limit of the flexible backing; a PI film that matches the flexible backing is adhered to the top of the hollow shell porous PDMS support body; and the outer sides of the flexible backing and the PI film are wrapped with radiation-proof cloth. The present invention realizes the operation of rapid and automatic resetting of the support body and continuous pressure detection. When pressure gradually acts on the top of the porous PDMS support body, the entire sponge body is gradually compressed, so that the relative distance between the coils inside it gradually decreases, and the inductance value of the entire circuit increases accordingly. When the external pressure is gradually removed, the entire hollow shell porous PDMS support body gradually returns to its original shape under the action of elasticity. The present invention can achieve an ideal height, improve flexibility, and have good anti-interference ability, making the detection process more accurate and practical.
Owner:DALIAN MARITIME UNIVERSITY

Passive wireless temperature sensor with bistable structure

The invention discloses a passive wireless temperature sensor with a bistable structure. The temperature sensor comprises a flexible porous dielectric layer, a metal electrode, a bistable structure beam, a beam end anchoring part, a bistable structure beam anchoring area, a metal wire, a planar inductor and a substrate. The bistable structural beam is bent upwards in an initial state and forms a plate capacitor with the metal electrode. And when the temperature reaches the lower limit temperature of the temperature interval, the bistable structural beam is changed into a downward bending shape from an upward bending shape. The sharp reduction of the distance between the bistable structural beam and the metal electrode causes the sharp increase of the capacitance value of the plate capacitor, so that the resonant frequency of an LC resonant circuit formed by the plate capacitor and the planar inductor suddenly changes, and the judgment of a temperature interval is realized. And in each temperature interval, the corresponding bistable structure beam continuously bends downwards and extrudes the flexible porous dielectric layer along with the rise of the temperature, so that the capacitance is changed, and the wide-range, temperature-zone-divided and high-precision continuous temperature measurement is realized.
Owner:NANJING FORESTRY UNIV

Inductor structure and preparation method thereof, and chip packaging structure and preparation method thereof

The invention provides an inductor structure and a preparation method thereof, and a chip packaging structure of an integrated inductor and a preparation method thereof, the inductor is formed in an empty slot in a plastic packaging layer, and a first inductor pattern structure, a vertical bonding wire and a second inductor pattern structure of a substrate are utilized to form a plane inductor or a three-dimensional inductor in the vertical direction. Compared with a traditional planar inductor in the horizontal direction, the inductor with the large inductance value can be formed under the relatively small area, the problem of welding failure of the surface-mounted inductor does not need to be considered compared with the surface-mounted inductor, the surface-mounted inductor is provided with the inductor shell, the overall size is large, however, the inductor does not need to be manufactured with the shell, and the manufacturing cost is reduced. And the area of the inductance region corresponding to the same inductance value is smaller than that of a surface-mounted inductor, so that the inductor is particularly suitable for application scenes with higher requirements on the performance of the inductor and limited sizes.
Owner:JCET MANAGEMENT CO LTD

Thermal interface material heat transfer antennas

A semiconductor device having a front and a back and comprising a package substrate, an epoxy base layer applied to a back side of the package substrate, and a planar inductor in the epoxy base layer is etched to make a trench at the back of the semiconductor device in the epoxy base layer adjacent the planar inductor, and a thermal interface material is put in the trench, whereby a heat transfer antenna is formed. A semiconductor device has a package substrate having a front and a back; an epoxy base layer applied to a back side of the package substrate, a planar inductor at the back of the package substrate in the epoxy base layer, and a heat transfer antenna at the back of the package substrate in the epoxy base layer.
Owner:MICROCHIP TECHNOLOGY INC

Electronic tuning type multifunctional sensor and preparation method thereof

PendingCN122448923ACapacitancePorous carbon
The application discloses an electronic tuning type multifunctional sensor and a preparation method thereof. The sensor comprises a quartz crystal, a composite electrode and an oscillation circuit; the first end of the composite electrode is connected with the first end of the oscillation circuit, the second end of the oscillation circuit is connected with the first end of the quartz crystal, the second end of the quartz crystal is connected with the second end of the composite electrode, and the second end of the oscillation circuit is an output end. The composite electrode comprises a substrate, a planar inductive microelectrode and a planar capacitive microelectrode which are arranged on two sides and are connected in series through a via hole; a nano-magnetic iron oxide film is deposited on the inductive side, a hydroxylated ultra-high specific surface area disordered porous carbon film is deposited on the capacitive side, and a perfluorosulfonic acid protective layer is coated on the surfaces of the two films. The application forms a frequency selection network by connecting the double-sided electrode and the quartz crystal in series, and outputs an anti-interference frequency signal; the protective layer is insulated and prevents short circuit on the inductive side, and improves the humidity response on the capacitive side; manual overturning can switch the detection of metal damage, non-metal defects and environmental humidity, and the sensor has the advantages of high stability and low cost.
Owner:CHENGDU TECH UNIV

Wireless temperature sensor with paper folding structure

The invention discloses a wireless temperature sensor with a paper folding structure. The temperature sensor comprises a substrate, a planar inductor, a V-shaped beam, a substrate capacitor polar plate, a capacitor upper polar plate, a spring beam, the paper folding structure and a metal wire. When the temperature rises, thermal expansion of the V-shaped beam is caused, and then the capacitor upper polar plate is driven to move towards the two ends, so that the overlapping area between the capacitor upper polar plate and the substrate capacitor polar plate is increased, the capacitance value of the sensitive capacitor is increased, the resonant frequency of an LC resonant circuit formed by the sensitive capacitor and the planar inductor is reduced, and high-temperature measurement is realized. When the temperature is reduced, the V-shaped beam is contracted, the upper electrode plate of the driving capacitor moves towards the center, the paper folding structure protrudes upwards, the capacitance value of the sensitive capacitor is decreased, the resonant frequency of an LC resonant circuit composed of the sensitive capacitor and the planar inductor is increased, and low-temperature measurement is achieved. The temperature sensor has the advantages of simple structure, sensitive response, wide measuring range, process compatibility and the like.
Owner:SOUTHEAST UNIV

An ice, water, dry state detection sensor

This invention discloses a sensor for detecting ice, water, and dryness states, comprising a substrate, a first metal line, a second metal line, a third metal line disposed on the surface of the substrate, a variable capacitor, an interdigitated capacitor, and a planar inductor. One end of the variable capacitor is connected to one end of the planar inductor via the first metal line, and the other end of the planar inductor is connected to one end of the interdigitated capacitor via the second metal line. The other end of the interdigitated capacitor is connected to the other end of the variable capacitor via the third metal line. The capacitance value of the interdigitated capacitor changes with the different dielectric constants of the materials between the interdigitated fingers. Since the relative dielectric constants of ice, water, and dryness change at different frequencies, the capacitance value of the interdigitated capacitor also changes. Therefore, this sensor for detecting ice, water, and dryness states has advantages such as simple structure, high recognition rate, small size, and process compatibility.
Owner:SOUTHEAST UNIV

A differential sensing system for metal crack detection and its quantitative detection method

The present application relates to the technical field of wireless passive sensing, and discloses a differential sensing system for metal crack detection and a quantitative detection method thereof, which comprises an RFID reader-writer and a passive RFID differential sensing tag; the passive RFID differential sensing tag comprises a communication antenna, an RFID chip, an impedance matching network, a planar inductive sensing module, a radio frequency switching module, an energy recovery module and a data processing unit; the impedance matching network is connected between the communication antenna and the RFID chip; the planar inductive sensing module comprises a reference planar inductor and a sensing planar inductor; after double-state alternate sampling of the reference sensing, difference is performed, so that environmental disturbances such as reading and writing distance, sensor posture, multipath and temperature drift are significantly suppressed, and differential noise suppression is realized; the switching module is powered by the energy collection antenna, voltage doubling rectification and charge management module in the energy collection management module, battery maintenance is avoided, and passive operation is realized.
Owner:HEBEI UNIV OF TECH

Low-loss planar inductor core and method of designing the same

The application discloses a low-loss planar inductor magnetic core and a design method thereof. The planar inductor magnetic core comprises an upper magnetic yoke and a lower magnetic yoke, a left column, a right column and a middle column. The upper magnetic yoke and the lower magnetic yoke, the left column, the right column and the middle column form a full-enclosed structure on the side surface, eliminating the traditional air gap structure. The upper magnetic yoke and the lower magnetic yoke are made of a first magnetic core material. The left column, the right column and the middle column are made of a second magnetic core material. The magnetic permeability of the first magnetic core material is lower than that of the second magnetic core material. The magnetic resistance of the planar inductor magnetic core is symmetrically distributed about a transverse symmetry axis. The magnetic core has a simple structure and is easy to implement, can significantly reduce the high-frequency copper loss of a high-frequency power magnetic component, and effectively solves the problem that the existing winding structure optimization method for MMF distribution optimization cannot be applied to the inductor.
Owner:XI AN JIAOTONG UNIV

Wide-range passive wireless temperature sensor with push-pull structure

The invention discloses a wide-range passive wireless temperature sensor with a push-pull structure. The temperature sensor comprises a substrate, a planar inductor, a V-shaped beam, the push-pull structure, an interdigital capacitor and a metal wire. When the temperature rises, thermal expansion of the V-shaped beam is caused, then the push-pull structure driving rod is driven to output displacement in the X-axis direction, the honeycomb type hexagonal structure is expanded, the bow-tie type hexagonal structure is contracted, the capacitance value of the second interdigital capacitor is increased, the resonant frequency of an LC resonant circuit composed of the interdigital capacitors and the planar inductor is decreased, and high-temperature measurement is achieved. When the temperature is reduced, the V-shaped beam is contracted, the bow-tie-shaped hexagonal structure is expanded, the honeycomb-shaped hexagonal structure is contracted, the capacitance value of the first interdigital capacitor is reduced, the resonant frequency is increased, and low-temperature measurement is achieved. The temperature sensor has the advantages of simple structure, sensitive response, wide measuring range, process compatibility and the like.
Owner:NANJING FORESTRY UNIV

PCB air core inductor, design method thereof and switching power supply

The application provides a PCB air-core inductor, a design method thereof and a switching power supply, wherein the design method comprises the following steps: determining the winding turns, winding width and winding thickness of the PCB air-core inductor, and designing the number of winding layers in the PCB and the width and thickness of the winding metal in each winding layer according to the winding turns, winding width and winding thickness; sequentially connecting the winding metal in each winding layer in series to form a PCB winding, wherein the PCB winding is embedded in an insulating support body composed of insulating medium; forming a metal shielding body around the PCB winding, wherein the metal shielding body and the PCB winding are separated by insulating medium; and the metal shielding body comprises four circumferential shielding walls, one upper shielding wall and one lower shielding wall, and the beginning and end of the PCB winding are connected to the input terminal and the output terminal respectively and lead out through the corresponding circumferential shielding walls. The application solves the problems of poor magnetic shielding performance and large high-frequency loss of the PCB planar inductor in the prior art.
Owner:ZHEJIANG UNIV

Full-bridge converter module without blocking capacitor

The utility model discloses a full-bridge converter module without a blocking capacitor. The full-bridge converter module comprises an input filtering unit, a first inversion bridge arm, a second inversion bridge arm, a planar transformer T, a first rectification bridge arm, a second rectification bridge arm, a planar inductor Lf, an output capacitor Co and a square wave detection unit M, the output capacitor Co is connected between the output positive end and the output negative end; a load Rload is connected between the output positive end and the output negative end; according to the full-bridge converter module, a planar magnetic technology is adopted, blocking capacitor configuration is avoided, positive and negative volt-second products are calculated through square wave voltage sampled by a resistance voltage division circuit and driving edge time captured by a comparator circuit, duty ratio control quantity is output, primary side full-bridge driving signal pulse width is dynamically adjusted, and magnetic flux balance control is achieved; the problem that the blocking capacitor occupies a large area is solved, and the high-power density design of the brick power supply module can be realized.
Owner:NANJING EFFICIENT POWER FOR INTELLIGENT COMPUTING TECH CO LTD

Filter and manufacturing method, electronic device

This disclosure provides a filter and its fabrication method, as well as an electronic device, belonging to the field of microwave technology, and can solve the problem of low Q value of inductors. The filter provided includes: a first substrate and a second substrate disposed opposite to each other, with a dielectric cavity disposed between the first substrate and the second substrate; the filter further includes: at least one inductor, the inductor including a first planar inductor structure disposed on a first surface of the first substrate, a second planar inductor structure disposed on a first surface of the second substrate, and a columnar inductor structure disposed within the dielectric cavity, the first end and the second end of the columnar inductor structure being electrically connected to the first planar inductor structure and the second planar inductor structure, respectively; and at least one capacitor disposed on the first surface of the first substrate, and the capacitor being electrically connected to the inductor.
Owner:BEIJING BOE OPTOELECTRONCIS TECH CO LTD +1

Integrated high-precision planar inductance type linear displacement sensor

The invention provides an integrated high-precision plane inductance type linear displacement sensor. The integrated high-precision plane inductance type linear displacement sensor comprises a shell, a cover plate, a movable ruler, a fixed ruler, a sliding block, a sliding plate, a push rod and a side face cover plate. The air gap distance between the movable ruler and the fixed ruler is always kept in a constant and consistent working state in the measurement process, so that the problem of precision deviation caused by air gap fluctuation of a traditional linear displacement sensor is solved, and the problem of poor mechanical environment adaptability is also solved; measurement error fluctuation caused by shaking of the movable ruler due to mechanical environment vibration and impact is effectively inhibited.
Owner:BEIJING RES INST OF PRECISE MECHATRONICS CONTROLS

Highly integrated bulk acoustic wave resonator, filter and preparation method

The invention discloses a highly-integrated bulk acoustic wave resonator, a filter and a preparation method, and belongs to the technical field of filters, the bulk acoustic wave resonator comprises an active region and a non-active region at least partially surrounding the active region, and the bulk acoustic wave resonator further comprises a substrate, a bottom electrode, a piezoelectric layer and a top electrode which are stacked in the longitudinal direction, the bulk acoustic wave resonator further comprises a planar inductor, a dielectric layer and a capacitor electrode, the planar inductor and the top electrode are in the same layer, the dielectric layer is located on the sides, away from the piezoelectric layer, of the planar inductor and the top electrode, the capacitor electrode is arranged on one side of the dielectric layer, and the capacitor electrode and the top electrode form a capacitor structure. And the planar inductor and the capacitor structure are positioned in the non-active region and are respectively positioned on two sides of the active region. According to the invention, the inductor and the capacitor are integrated in the bulk acoustic wave resonator, so that miniaturization of a radio frequency device is facilitated.
Owner:HANGZHOU DIANZI UNIV

PCB air core inductor, design method thereof and switching power supply

The invention provides a PCB air core inductor, a design method thereof and a switching power supply, and the design method comprises the steps: determining the winding turn number, the winding width and the winding thickness of the PCB air core inductor, and designing the number of winding layers in a PCB and the width and the thickness of winding metal in each winding layer according to the winding turn number, the winding width and the winding thickness; the winding metal in all the winding layers is sequentially connected in series to form a PCB winding, and the PCB winding is embedded in an insulating supporting body formed by insulating media; a metal shielding body is formed on the periphery of the PCB winding, and an insulating medium is arranged between the metal shielding body and the PCB winding; wherein the metal shielding body comprises four peripheral shielding walls, an upper shielding wall and a lower shielding wall, and the starting end and the tail end of the PCB winding penetrate through the corresponding peripheral shielding walls through the input terminal and the output terminal respectively and are led out. The PCB planar inductor solves the problems that in the prior art, a PCB planar inductor is poor in magnetic shielding performance, large in high-frequency loss and the like.
Owner:ZHEJIANG UNIV

DCDC converter based on PCB planar inductor

The present invention belongs to the technical field of DC-DC converters, and specifically relates to a DC-DC converter based on a PCB planar inductor. The converter comprises: a PCB planar inductor, one end of which is connected to an input voltage; a current sampling circuit, the input end of which is connected to the other end of the PCB planar inductor; a drive circuit, the input end of which is connected to the output end of the current sampling circuit; and a first power transistor, the output end of the drive circuit being connected to the first power transistor, and the input end of the current sampling circuit being connected to the first power transistor. The present invention can accurately sample and limit the peak value of the inductor, operate normally at high frequencies, and avoid EMI interference.
Owner:ZHUHAI YINGJIXIN SEMICON CO LTD

Semiconductor package with integrated and shielded inductor

An integrated circuit (IC) package has a ferrite-dielectric shield layer between a planar inductor coil and a semiconductor chip. The shield layer blocks electromagnetic interference (EMI) generated by current in the inductor coil from reaching the semiconductor chip. The shield layer has a ferrite layer surrounded by upper and lower dielectric layers to prevent electrical shorting. A center terminal of the inductor coil is connected to the semiconductor chip through a center post that passes through an opening in the shield layer over the center of the inductor coil air core. The center post can be connected to a chip mount pad on which the semiconductor chip is mounted. Wire bonds connect pads on the semiconductor chip to lead frame pads on lead frame posts whose distal ends are external package connectors. The outer terminals of the inductor coil are connected to lead frame outer posts that also have external package connectors, such as pins or solder balls.
Owner:HIGH TECH TECH LTD

Flexible battery expansion sensor for rechargeable battery

The invention relates to a battery pack comprising a housing, at least a first battery cell, in particular a pouch cell, arranged within the housing, the housing of the first battery cell comprising an electrically conductive material, and at least one expansion sensor. The at least one expansion sensor is arranged between the conductive material of the housing of the first battery cell and an abutment surface adjacent to the first battery cell, and comprises: at least one planar inductor circuit arranged on a flexible substrate, the at least one planar inductor circuit is arranged in a contact region between the first battery cell and the abutment surface adjacent to the first battery cell; at least a first compressible buffer layer disposed between the flexible substrate having the inductor circuit and the conductive material of the housing of the first battery cell; and a detection circuit coupled to the at least one planar inductor circuit by means of a respective connector line arranged on the flexible substrate for detecting a change in inductance of the at least one planar inductor circuit.
Owner:IEE INT ELECTRONICS & ENG SA

Heterogeneous integrated filter structure with transient voltage protection and method of manufacture

The application provides a heterogeneous integrated filter structure with transient voltage protection and a manufacturing method. The filter structure comprises an insulating substrate, a mounting groove is arranged on the upper surface of the insulating substrate, a semiconductor chip with transient voltage protection function is arranged in the mounting groove, a double-layer spiral inductor is arranged on the upper surface of the insulating substrate, the double-layer spiral inductor comprises a first planar inductor coil and a second planar inductor coil which are arranged in a stack mode, a first passivation layer is arranged between the semiconductor chip and the first planar inductor coil, a second passivation layer is arranged between the first planar inductor coil and the second planar inductor coil, a third passivation layer is arranged on the upper surface of the second planar inductor coil, the first passivation layer and the second passivation layer are both provided with through holes for electrically connecting the upper and lower layers, filter pins are arranged on the third passivation layer, and the filter pins are electrically connected with the second planar inductor coil. The application can improve the differential mode bandwidth index of the filter.
Owner:SHENZHEN JINGYANG ELECTRONICS CO LTD

Device, method, and system to provide passivation structures of a magnetic material based inductor

Techniques and mechanisms for providing structures of a magnetic material based inductor. In an embodiment, an inductor comprises a body of a magnetic material, and a conductor which extends along a surface of the body. The body comprises a carrier material and magnetic filler particles distributed in the carrier material. A passivation material of the inductor is provided adjacent to the conductor and to surfaces of the filler particles. The conductor and the passivation material comprise different respective material compositions, wherein the passivation material comprises one of nickel, tin, copper, palladium, or gold. In another embodiment, the inductor is one of a plated through hole inductor type of a planar inductor type.
Owner:INTEL CORP

A wireless sensor circuit based on non-Hermitian critical point and its manufacturing method

The present invention provides a wireless sensor circuit based on non-Hermitian critical point, the circuit includes a sensing circuit and a reading circuit, and is characterized in that the sensing circuit includes: a planar inductor coil L s , Capacitive sensor C s , the capacitive sensor C s With the planar inductor L s in series, the capacitive sensor C s Adopting the interdigital electrode structure; the reading circuit includes a planar inductor coil L r , capacitor element C r , coaxial connector, network vector analyzer, the planar inductor coil L r and the capacitance element C r The network vector analyzer is connected in series with a planar inductor coil L through a coaxial connector. r and the capacitance element C r The wireless sensor circuit has a non-Hermitian critical point for the mutual inductance coupling coefficient #imgabs0# and the position of the reading circuit relative to the sensing circuit is to read the side capacitance C r , reading side inductance L r , and the sensing side capacitance C s , sensing side inductance L s And the internal resistance R of the network vector analyzer on the reading side r , the sensor resistance R s Substituting into the equation: #imgabs1# is determined by the mutual inductance coupling coefficient κ as the critical point #imgabs2#. The wireless sensor circuit design based on non-Hermitian critical points provided by the present invention offers relatively high flexibility, quality factor, and sensing sensitivity, enabling real-time signal monitoring and improving signal reading accuracy.
Owner:PEKING UNIV

A novel magnetic integrated planar inductor and a manufacturing method thereof

PendingCN122658837AMiniaturizationHemt circuits
The application discloses a novel magnetic integrated planar inductor and a manufacturing method thereof, and belongs to the field of inductor manufacturing. The inductor comprises a special EI or EE magnetic core with the cross-sectional area of the side column being larger than that of the middle column, and a PCB winding plate containing a first winding unit and a second winding unit; the two winding units are arranged around the two side columns of the magnetic core respectively, and form two independent inductors which are not connected in circuit and not interacted in space, so that two inductors are integrated by one set of magnetic core. During manufacturing, the independent double winding is formed by the PCB manufacturing process, the equal-depth air gaps are ground on the two side columns of the E piece of the magnetic core, and the magnetic sheet or the ceramic sheet is bonded to fix the I piece of the magnetic core, the lead-out end is welded by using the reflow soldering technology, and the integrated device is obtained through high-temperature curing. The application improves the utilization rate of the magnetic core, and compared with the traditional discrete inductor, the volume is reduced by more than 20%, the mass is reduced by more than 35%, the degree of automation of the process is high, the consistency is good, and the demand of miniaturization of the switching power supply is met.
Owner:CHINA ZHENHUA GRP XINYUN ELECTRONICS COMP ANDDEV CO LTD

Impedance matching module, impedance matching circuit, plasma processing supply system, and plasma processing system

The present invention relates to an impedance matching circuit (11), an impedance matching module (1) for a plasma process supply system (8) and a plasma process system (9), configured for a power of 500 W or more and a frequency in the range of 2 MHz to 100 MHz, for mounting on a cooling body (7), the impedance matching module comprising: a) a planar inductor (2); b) an insulating circuit board (3); c) a substrate (4), in particular a ceramic plate; d) the planar inductor (2) is divided into two planar conductor paths (2a, 2b) of equal length, connected in parallel and arranged on both sides and congruently on the insulating circuit board (3); e) the two conductor paths (2a, 2b) are two f) the substrate (4) is thicker than the insulating circuit board (3) and is fixedly connected to the surface of the insulating circuit board (3) over most of the lower surface (3b) of the insulating circuit board (3); g) the planar conductor paths (2a, 2b) can be spaced from the cooling body (7) by the substrate (4) to electrically insulate them from the cooling body (7); and h) the substrate (4) and the connection of the circuit board (3) to the substrate (4) are suitable for dissipating heat from the planar conductor paths to the cooling body (7).
Owner:TRUMPF PATENTABTEILUNG

A spiral planar inductor wafer temperature measuring device, manufacturing method and application thereof

The application provides a spiral planar inductance wafer temperature measuring device and a manufacturing method and application thereof, relates to the technical field of wafer temperature measurement, and comprises a silicon-based wafer substrate, an insulating layer on the surface of the wafer substrate, and a spiral planar inductance coil integrated on the insulating layer. A temperature sensing unit is electrically connected with the coil and comprises a high-frequency signal generator, an impedance analysis module and a temperature calculation unit. The inductance of the coil changes with the temperature of the substrate, the temperature calculation unit determines the inductance change by analyzing the impedance parameters, and calculates a real-time temperature value based on a preset temperature-inductance relationship. By optimizing the spiral structure and distributed arrangement of the coil, combining high-frequency detection and three-dimensional calibration algorithms, the application realizes high-precision, rapid, distributed and anti-interference online monitoring of the wafer surface temperature. The device has compact structure, good process compatibility, can be directly integrated into process equipment, and is suitable for temperature monitoring of key processes such as chemical vapor deposition and plasma etching.
Owner:SHANGHAI DIANJI UNIV

Planar inductor

A flat-plate inductor is provided for being disposed on an external mainboard. The external mainboard includes an input node and an output node. The flat-plate inductor includes a first core, a first circuit board, and a second circuit board. The first core includes a base, a first column, and a second column. The first column and the second column are disposed on two opposite sides of the base. The first circuit board includes a first coil and a first through hole. A plurality of layers of first traces of the first coil respectively surround the first through hole, and the first coil is sleeved on the first column, and the first column passes through the first through hole. The second circuit board includes a second coil and a second through hole. A plurality of layers of second traces of the second coil respectively surround the second through hole, and the second coil is sleeved on the second column, and the second column passes through the second through hole. The first coil and the second coil are connected in parallel or in series between the input node and the output node, and generate magnetic fluxes in the same direction.
Owner:新加坡商艾科半导体有限公司

Multi-layer parallel plane inductor with field control pockets

A high current multi-layer parallel plane inductor is formed from a plurality of electrically conductive continuous layers folded back and forth to form a compact series inductor with each one of the plurality of electrically conductive layers having one or more layer pocket holes with layer edge notches forming one or more coil control pockets that generate a magnetic field pattern when alternating current is applied to the inductor.
Owner:RADYNE CORP