This invention discloses an ultrasonic power supply
impedance network, a variable
inductor, a
control circuit, and a control method, including a variable
inductor, an ultrasonic power supply
impedance network, and a
control circuit. The variable
inductor consists of a main
magnetic core, two auxiliary magnetic cores, a main winding, and auxiliary windings, with an air gap between the auxiliary magnetic cores and the main
magnetic core. By adjusting the control current, the magnetic
saturation level of the auxiliary magnetic cores is changed, thereby changing the magnetic saturation state of the main
magnetic core, achieving dynamic change of the
inductance value. The ultrasonic power supply load is capacitive, and the
control circuit can make the load impedance and the variable inductor reach a resonant state, effectively reducing losses and improving energy transmission efficiency. Furthermore, the
impedance matching method of this invention utilizes two auxiliary inductors, improving the
impedance matching speed through coarse adjustment and improving the
impedance matching accuracy through fine adjustment. It has advantages such as high matching accuracy, wide matching range, and dynamic adjustment, further expanding the application field of variable inductors.