Flexible-substrate-based passive wireless pressure sensor with self-packaging function

Abstract

The invention discloses a flexible-substrate-based passive wireless pressure sensor with a self-packaging function. The pressure sensor comprises an upper flexible substrate, an upper metal layer, a middle flexible substrate, a lower metal layer and a lower flexible substrate, which are sequentially arranged from top to bottom and fixedly connected. An electric through hole and a cavity are formed in the middle flexible substrate. The upper metal layer comprises a planar inductance coil and a capacitor upper polar plate positioned on the middle part of the planar inductance coil. An inner connector of the planar inductance coil is connected with the capacitor upper polar plate. The lower metal layer comprises a capacitor lower polar plate opposite to the upper plate capacitor and an interconnecting wire connected with the capacitor upper polar plate. The sizes of the capacitor upper polar plate and capacitor lower polar plate are the same. An outer connector of the planar inductance coil of the upper metal layer is connected with the interconnecting wire of the lower metal layer through a conductive medium column in the electric through hole. The cavity of the middle flexible substrate is positioned between the capacitor upper polar plate and capacitor lower polar plate. The pressure sensor has the high performance of self packaging, non-contact, high sensitivity and high quality factor.

Description

technical field

[0001] The invention belongs to the technical field of sensors, and in particular relates to a passive wireless pressure sensor based on a flexible substrate and having a self-packaging function. Background technique

[0002] Pressure sensors are widely used in many occasions. In some special applications, such as: inside the human body, food packaging and other sealed environments, pressure sensors are required to have wireless telemetry capabilities. There are currently two types of wireless telemetry pressure sensors: active telemetry and passive telemetry. Active telemetry means that the sensing system has a power source. This type of telemetry can transmit sensor signals in both directions over long distances, but the system is complex, large in size, and the battery needs to be replaced. Passive telemetry means that there is no power source in the sensing system, and signals are acquired by using inductive coupling or radio frequency (RF) reflection mo...

Examples

Embodiment Construction

[0019] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0020] Such as figure 1 with figure 2 As shown, a passive wireless pressure sensor with self-packaging function based on a flexible substrate of the present invention includes an upper flexible substrate 1, an upper metal layer 2, a middle flexible substrate 3, a lower Metal layer 4 and lower flexible substrate 5 . The upper flexible substrate 1, the middle flexible substrate 3 and the lower flexible substrate 5 are all made of flexible materials, such as polyimide (PI), liquid crystal polymer (LCP), or polyethylene terephthalate. Alcohol esters (PET). Electrical vias 14 and cavities 10 are provided on the middle flexible substrate 3 . Preferably, the cavity 10 is located in the middle of the middle flexible substrate 3 . The cavity 10 is located in the middle of the middle flexible substrate 3, which can reduc...

technical field

[0001] The invention belongs to the technical field of sensors, and in particular relates to a passive wireless pressure sensor based on a flexible substrate and having a self-packaging function. Background technique

[0002] Pressure sensors are widely used in many occasions. In some special applications, such as: inside the human body, food packaging and other sealed environments, pressure sensors are required to have wireless telemetry capabilities. There are currently two types of wireless telemetry pressure sensors: active telemetry and passive telemetry. Active telemetry means that the sensing system has a power source. This type of telemetry can transmit sensor signals in both directions over long distances, but the system is complex, large in size, and the battery needs to be replaced. Passive telemetry means that there is no power source in the sensing system, and signals are acquired by using inductive coupling or radio frequency (RF) reflection mo...

Examples

Embodiment Construction

[0019] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0020] Such as figure 1 with figure 2 As shown, a passive wireless pressure sensor with self-packaging function based on a flexible substrate of the present invention includes an upper flexible substrate 1, an upper metal layer 2, a middle flexible substrate 3, a lower Metal layer 4 and lower flexible substrate 5 . The upper flexible substrate 1, the middle flexible substrate 3 and the lower flexible substrate 5 are all made of flexible materials, such as polyimide (PI), liquid crystal polymer (LCP), or polyethylene terephthalate. Alcohol esters (PET). Electrical vias 14 and cavities 10 are provided on the middle flexible substrate 3 . Preferably, the cavity 10 is located in the middle of the middle flexible substrate 3 . The cavity 10 is located in the middle of the middle flexible substrate 3, which can reduc...

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