Self-encapsulating passive wireless pressure sensor based on flexible substrate

A pressure sensor, passive wireless technology, applied in the field of sensors, can solve the problems of limiting the overall characteristics of the device, difficult to obtain the quality factor, increasing the size of the device, etc., to achieve the effect of simple structure, low packaging cost, and protection of the internal structure

Inactive Publication Date: 2016-01-20
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The inductance can be an on-chip inductance integrated with a capacitive sensor, but it is generally difficult to obtain a high quality factor Q for this inductance, thereby limiting the overall characteristics of the device; in addition, an externally wound metal wire inductance coil can also be used. But this will increase the size of the device, and it is difficult to process in batches
In addition, MEMS pressure-sensitive capacitors also need to solve two major technical difficulties: the lead wire of the capacitor plate and the sealing of the cavity

Method used

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  • Self-encapsulating passive wireless pressure sensor based on flexible substrate
  • Self-encapsulating passive wireless pressure sensor based on flexible substrate
  • Self-encapsulating passive wireless pressure sensor based on flexible substrate

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Embodiment Construction

[0019] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0020] like figure 1 and figure 2 As shown, a passive wireless pressure sensor with self-packaging function based on a flexible substrate of the present invention includes an upper flexible substrate 1, an upper metal layer 2, a middle flexible substrate 3, a lower Metal layer 4 and lower flexible substrate 5 . The upper flexible substrate 1, the middle flexible substrate 3 and the lower flexible substrate 5 are all made of flexible materials, such as polyimide (PI), liquid crystal polymer (LCP), or polyethylene terephthalate. Alcohol esters (PET). Electrical vias 14 and cavities 10 are provided on the middle flexible substrate 3 . Preferably, the cavity 10 is located in the middle of the middle flexible substrate 3 . The cavity 10 is located in the middle of the middle flexible substrate 3, which can reduce th...

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Abstract

The present invention disclosed a passive wireless pressure sensor with a self -packaged function based on flexible substrates, including the upper flexible substrate, upper metal layer, medium flexible substrate, lower metal layer, and lower flexibility of the upper and fixed connection from top to bottom.The substrate, the medium flexible substrate is equipped with electrical pores and cavity; the upper metal layer includes the plane inductory coil and the capacitance on the middle of the capacitance coil, and the inner connector of the flat inductance coil is connected to the capacitor plate; belowThe metal layer includes a capacitor lower plate with the same size and relative position as the capacitor plate, and the connected line connected to the capacitor plate.The interconnection of the medium column and the lower metal layer, the cavity of the medium flexible substrate is located between the polar plate and the lower part of the capacitance on the capacitor.The pressure sensor has the excellent performance of self -packaging, non -contact, high sensitivity, and high quality factor.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a passive wireless pressure sensor based on a flexible substrate and having a self-packaging function. Background technique [0002] Pressure sensors are widely used in many occasions. In some special applications, such as: inside the human body, food packaging and other sealed environments, pressure sensors are required to have wireless telemetry capabilities. There are currently two types of wireless telemetry pressure sensors: active telemetry and passive telemetry. Active telemetry means that the sensing system has a power source. This type of telemetry can transmit sensor signals in both directions over long distances, but the system is complex, large in size, and the battery needs to be replaced. Passive telemetry means that there is no power source in the sensing system, and signals are acquired by using inductive coupling or radio frequency (RF) reflection mo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/12
Inventor 陈洁张聪王立峰佘德群
Owner SOUTHEAST UNIV
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