Air intake system for a plasma reaction chamber

Abstract

The invention discloses an air intake system for a plasma reaction chamber, which comprises a central air inlet arranged on the upper part of the plasma reaction chamber and an edge air inlet arranged on the edge of the plasma reaction chamber, and also includes a uniform gas inner ring, the surface of which is provided with The air guide hole is arranged in the plasma reaction chamber in a manner that can rotate around the axial direction. The invention forms a certain included angle between the air guide hole and the radial direction of the uniform gas inner ring, and utilizes the high-speed gas injected into the gas guide hole to make the uniform gas inner ring rotate around the axial direction under the action of the high-speed air flow, thereby achieving highly symmetrical distribution of the air flow Effect.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a plasma reaction chamber gas inlet system. Background technique [0002] Plasma etching is the most common form of dry etching. Its principle is that the gas exposed to the electron region forms a plasma, and the resulting ionized gas and gas composed of released high-energy electrons form plasma or ions. When ionized gas atoms are accelerated through an electric field, they release enough force and surface repelling forces to tightly bond materials or etch surfaces. [0003] Plasma etching is a common processing method in integrated circuits and is widely used in sub-micron technology bands. Inductively Coupled Plasma Etch (ICPE for short) is the result of the interaction of chemical and physical processes. Its basic principle is that under vacuum and low pressure, the radio frequency generated by the ICP radio frequency power supply is output to the ring coupling coil...

AI Technical Summary

Problems solved by technology

Since the air pressure in the process is generally at the mT level, and the diameter of the loop is greater than 12 inches, there is a pressure difference between the total air path and several nozzles, so there is a problem that the asymmetry of the process results affects the uniformity, so how to make the edge air intake uniform and Symmetry becomes the difficulty of design

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