Machine table number determination method and device, processing line, storage medium and electronic equipment

A technology for determining methods and devices, applied in the direction of data processing applications, instruments, resources, etc., can solve the problem that the number of machines at each site cannot be well determined, and achieve the effect of avoiding waiting time and saving costs

Active Publication Date: 2020-05-22
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present disclosure is to provide a method for determining the number of machines, a device for determining the number of machines, a processing line, a storag

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  • Machine table number determination method and device, processing line, storage medium and electronic equipment
  • Machine table number determination method and device, processing line, storage medium and electronic equipment
  • Machine table number determination method and device, processing line, storage medium and electronic equipment

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Embodiment Construction

[0039]Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of the specific details being omitted, or other methods, components, devices, steps, etc. may be adopted. In other instances, well-known technical solutions...

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Abstract

The invention discloses a machine table number determination method and device, a processing line, a storage medium and electronic equipment, and relates to the technical field of semiconductor manufacturing. The machine table number determination method comprises the following steps: generating a random number table based on working data of the machine tables in each station on a processing line;gradually increasing the number of machine tables in a target site on the processing line in a simulation mode until the difference between the processing time of the processing line after the machine tables are increased and the processing time of the processing line before the machine tables are increased, which is determined based on the random number table, is smaller than a threshold value;and determining the number of the machine tables added with the machines as the number of the machine tables of the target station. According to the invention, a proper station and machine table combination can be determined in a simulation mode.

Description

technical field [0001] The present disclosure relates to the technical field of semiconductor manufacturing, and in particular, relates to a method for determining the number of machines, a device for determining the number of machines, a processing line, a storage medium, and electronic equipment. Background technique [0002] Innovation in the communications and electronics industries is inseparable from the development of semiconductor technology. The semiconductor manufacturing process is complex, mainly including processes such as photolithography, etching, ion implantation, thin film deposition and chemical mechanical polishing. There are hundreds to thousands of steps in the actual manufacturing process. [0003] Each process step can correspond to a station, and the station is equipped with one or more machines for process production. In semiconductor production, machines are often expensive and need to be equipped with maintenance costs. Solve the problem of how ...

Claims

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Application Information

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IPC IPC(8): G06Q10/06
CPCG06Q10/06312
Inventor 王世生
Owner CHANGXIN MEMORY TECH INC
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