Method and device for determining number of machines, processing line, storage medium and electronic equipment

A technology for determining methods and processing lines, applied in data processing applications, instruments, calculations, etc., can solve the problem of not being able to determine the number of machines at each site well, and achieve the effect of avoiding waiting time and saving costs

Active Publication Date: 2022-04-26
CHANGXIN MEMORY TECH INC
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0006] The purpose of the present disclosure is to provide a method for determining the number of machines, a device for determining the number of machines, a processing line, a storage medium, and electronic equipment, so as to overcome the limitations and defects of related technologies at least to a certain extent. Determining the number of machines at each site

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  • Method and device for determining number of machines, processing line, storage medium and electronic equipment
  • Method and device for determining number of machines, processing line, storage medium and electronic equipment
  • Method and device for determining number of machines, processing line, storage medium and electronic equipment

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Embodiment Construction

[0039]Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of the specific details being omitted, or other methods, components, devices, steps, etc. may be adopted. In other instances, well-known technical solutions...

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Abstract

The invention discloses a method and device for determining the number of machines, a processing line, a storage medium and electronic equipment, and relates to the technical field of semiconductor manufacturing. The method for determining the number of machines includes: generating a random number table based on the working data of the machines in each station on the processing line; The difference between the processing time of the processing line after adding machines and the processing time of processing lines before adding machines is less than a threshold; the number of machines after adding machines is determined as the number of machines at the target site. In the present disclosure, a suitable site machine combination can be determined through simulation.

Description

technical field [0001] The present disclosure relates to the technical field of semiconductor manufacturing, and in particular, relates to a method for determining the number of machines, a device for determining the number of machines, a processing line, a storage medium, and electronic equipment. Background technique [0002] Innovation in the communications and electronics industries is inseparable from the development of semiconductor technology. The semiconductor manufacturing process is complex, mainly including processes such as photolithography, etching, ion implantation, thin film deposition and chemical mechanical polishing. There are hundreds to thousands of steps in the actual manufacturing process. [0003] Each process step can correspond to a station, and the station is equipped with one or more machines for process production. In semiconductor production, machines are often expensive and need to be equipped with maintenance costs. Solve the problem of how ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06Q10/06
CPCG06Q10/06312
Inventor 王世生
Owner CHANGXIN MEMORY TECH INC
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