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a spectroscopic device

A spectroscopic device and spectroscopic mirror technology, applied in the optical field, can solve the problems of different polarization degrees, affecting measurement results, and different reflectivity.

Active Publication Date: 2021-05-04
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In the prior art, windows, beamsplitters, and beamsplitting prisms are commonly used spectroscopic devices. In the process of spectroscopic separation, due to the inherent properties of materials and coatings, the reflectivity of light with different polarization states will be different, which will Introducing a problem, the light splitting will affect the test of the polarized light characteristics, resulting in the difference between the degree of polarization after the splitting and the degree of polarization before the splitting, which affects the measurement results

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Embodiment Construction

[0035] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.

[0036] Terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. It should be noted that the orientation words such as "up", "down", "left", and "right" described in the embodiments of the present invention are described from the angles shown in the drawings, and should not be interpreted as a reference to the implementation of the present invention. Example limitations. Also in this context, it also nee...

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Abstract

The invention discloses a spectroscopic device. The spectroscopic device includes a first spectroscopic unit and a second spectroscopic unit, the first spectroscopic unit and the second spectroscopic unit respectively comprise a first reflective surface and a second reflective surface perpendicular to each other; the incident light is incident on the first reflective surface to form a first reflection Light, the first reflected light is incident on the second reflective surface to form the second reflected light; the plane where the incident light and the first reflected light are located is the first incident surface, and the incident light whose polarization direction is parallel and perpendicular to the first incident surface is on the first reflected surface The reflectivity of the surface is the first reflectivity and the second reflectivity; the plane where the first reflected ray and the second reflected ray are located is the second incident surface, and the first reflected ray whose polarization direction is parallel and perpendicular to the second incident surface The reflectivity of the two reflecting surfaces is respectively the third reflectivity and the fourth reflectivity; the first reflectivity is equal to the third reflectivity, and the second reflectivity is equal to the fourth reflectivity. The technical scheme of the invention realizes that the polarization characteristics of the light beam are not changed after splitting.

Description

technical field [0001] Embodiments of the present invention relate to optical technologies, and in particular, to a spectroscopic device. Background technique [0002] In the optical system, especially in the test system, there is a need to test multiple parameters at the same time, so it is necessary to split the light into each test module. figure 1 is a schematic diagram of a spectroscopic scene in the prior art, refer to figure 1 , after the light exits from the light source, along the direction of beam transmission, the beam is split by the beam splitting element, and the beam enters each measurement module to realize simultaneous measurement of multiple modules. [0003] In the prior art, windows, beamsplitters, and beamsplitting prisms are commonly used spectroscopic devices. In the process of spectroscopic separation, due to the inherent properties of materials and coatings, the reflectivity of light with different polarization states will be different, which will ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/14
CPCG02B27/14
Inventor 徐建旭兰艳平
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD