Large-optical-path closed-loop measurement system based on two-stage actuator structure
A measurement system and actuator technology, applied in measurement devices, instruments, optical devices, etc., can solve the problems of increased error of closed-loop system, decreased measurement accuracy, loss of stability of closed-loop system, etc.
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[0017] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. Based on the embodiments of the present invention, other embodiments obtained by persons of ordinary skill in the art without making creative efforts all belong to the protection scope of the present invention.
[0018] The invention improves the actuator structure of the detection optical path under the premise of ensuring the accuracy of closed-loop detection, and based on this, proposes a universal large optical path closed-loop detection system solution that can be combined with most optical fiber interferometers.
[0019] Such as figure 1 As shown, the present in...
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