Packaging mechanism and packaging methodof silicon-based adapter plate
An adapter board, silicon-based technology, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as friction, waste, silicon substrate wear, etc., to ensure stable fixation, stable storage environment, air pressure stable effect
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[0037] As an embodiment of the present invention, the blocking assembly 7 includes a rubber strip 71, a spherical groove 72 and a spherical strip 73, the port of the installation groove 8 is surrounded by a spherical groove 72, and the bottom side of the rubber strip 71 is installed on The ball-shaped strip 73 , the ball-shaped strip 73 is engaged and clamped in the ball-shaped groove 72 .
[0038] As an embodiment of the present invention, the protective layer 2 includes an insulating layer 21, a rewiring metal layer 22, and a protective layer 23. The upper and lower sides of the silicon base 1 are provided with an insulating layer 21, and the surface of the insulating layer 21 is provided with a rewiring layer. The surface of the metal layer 22 and the redistribution metal layer 22 is provided with a protection layer 23 .
[0039] A packaging method for a silicon-based interposer, comprising the following steps:
[0040] S1: Coating and wrapping, by spraying, the upper and lo...
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