A Measurement Method Based on Pixel Frequency Domain Calibration to Improve the Precision of Photoelectric Autocollimator

Abstract

The invention provides a measurement method for improving the precision of photoelectric autocollimator based on pixel frequency domain calibration. The incident light field in the corresponding frequency domain is obtained by fitting and calculating the images collected by the photoelectric autocollimator, and the incident The light field undergoes Fourier transform up-sampling and reconstruction processing to obtain the actual incident light field distribution, and calculate the deflection angle of the mirror according to the actual incident light field distribution. Among them, each pixel of the image sensor in the photoelectric autocollimator is corrected by dynamic Young's interference, so as to obtain the frequency domain response function of each pixel, and then the incident light field distribution in the frequency domain is obtained by fitting calculation. In the process of using the method of the present invention, the results can be obtained only through program fitting and calculation according to the parameters obtained through calibration and the collected images, and it is not necessary to change the model of the image sensor to obtain a smaller pixel size. The resolution limit brought by the autocollimator, while its calculation is relatively simple, it can also be used in embedded systems.

Description

technical field [0001] The invention belongs to the fields of optical imaging technology, image processing technology, signal processing technology, etc., and relates to the use of dynamic Young's interference to obtain actual incident light field images, which are applied to the measurement and reading of photoelectric autocollimators, thereby improving the measurement accuracy method. Background technique [0002] The photoelectric autocollimator has been extensively studied at present. Compared with the traditional autocollimator, it has the advantages of high measurement accuracy and wide measurement range. At the same time, because the photoelectric technology is used instead of the human eye for measurement and reading, it avoids Therefore, the current photoelectric autocollimator is widely used in construction, machinery manufacturing, aerospace, metrology and other fields. [0003] According to the realization principle of the photoelectric autocollimator, its measu...

AI Technical Summary

Problems solved by technology

However, due to the gradual reduction of the pixel size of CCD / CMOS and other image sensors, the pixel sensitivity will be extremely reduced. At the same time, the difficulty of the manufacturing process will increase, and technical barriers will easily occur, which cannot improve the measurement of the photoelectric autocollimator. precision

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