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Electron beam extraction window and electron beam generator comprising same

An electron beam generator and electron beam technology, applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems of poor heat dissipation and low ray passing rate, and achieve the effect of prolonging service life, improving pass rate and service life

Pending Publication Date: 2021-05-28
SHANGHAI INST OF APPLIED PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide an electron beam extraction window and an electron beam generator containing it in order to overcome the defects of low ray transmission rate and poor heat dissipation of the electron beam extraction window in the prior art

Method used

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  • Electron beam extraction window and electron beam generator comprising same
  • Electron beam extraction window and electron beam generator comprising same
  • Electron beam extraction window and electron beam generator comprising same

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Embodiment Construction

[0055] In the following, the present invention will be more clearly and completely described by way of embodiments in conjunction with the accompanying drawings, but the present invention is not limited to the scope of the described embodiments.

[0056] Such as figure 1 As shown, this embodiment discloses an electron beam generator. The electron beam generator 20 includes a housing 201 and an electron beam extraction window 10. A vacuum cavity is provided in the housing 201, and the electron beam extraction window 10 is installed in the housing. At the opening of 201 , the electron beam extraction window 10 and the casing 201 form a vacuum chamber. When in use, vacuumize the vacuum chamber.

[0057] Such as Figure 2-Figure 6 As shown, this embodiment also discloses the above-mentioned electron beam extraction window, the electron beam extraction window 10 includes a film (not shown in the figure), a window 1, a first grid unit 2 and two second Grille unit3. The middle part...

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Abstract

The invention discloses an electron beam extraction window and an electron beam generator comprising the same. The electron beam extraction window comprises a film, a window body, at least one first grating unit and at least one second grating unit, wherein a window is formed in the middle of the window body; the first grating unit comprises a first grating groove; and the second grating unit comprises a second grating groove, the first grating unit and the second grating unit are arranged in a spaced mode and located on the window, and the second grating unit is arranged at the far end of the window relative to the first grating unit in the scanning direction. According to the electron beam extraction window, the advantage that the first grating groove at the near end is short is utilized, heat on a film can be conveniently and rapidly conducted to the window body, meanwhile, the window is divided by the first grating unit and the second grating unit, the length of the second grating groove is shortened, heat in the middle of the second grating unit can be conveniently conducted to the edge of the window body, and the service life of the film and the service life of the electron beam extraction window are prolonged.

Description

technical field [0001] The invention relates to an electron beam extraction window and an electron beam generator containing it. Background technique [0002] Electron beam generators are widely used in process irradiation and scientific research experiments, and the extraction window of the electron beam is a very critical component. The two sides of the component are atmosphere and vacuum respectively, and metal or non-metal films that facilitate the penetration of electron beams need to be arranged on the grid of the extraction window. [0003] Usually, the length direction of the window is the scanning direction in which the electron beam is drawn out, that is, the electron beam scans back and forth in this direction, and forms an irradiation process length of a certain size after being drawn out. The longer the length is, the more beneficial it is to process items with larger formats. The extension direction of the grid groove of the electron beam extraction window ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/06H01J37/07
CPCH01J37/06H01J37/07
Inventor 戴志敏何子锋周大勇杨永金黄建鸣王永其吴新时林俊
Owner SHANGHAI INST OF APPLIED PHYSICS - CHINESE ACAD OF SCI
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