Cooling liquid adding device, cooler and semiconductor equipment

Abstract

The invention provides a cooling liquid adding device, a cooler and semiconductor equipment. The cooling liquid adding device comprises a liquid storage tank, a controller and a liquid adding pipe, a liquid inlet of the liquid adding pipe is connected with the liquid storage tank, and a liquid outlet of the liquid adding pipe is used for being connected with a liquid adding port of the cooler; the liquid storage tank is used for storing cooling liquid; and the controller is used for controlling the liquid adding pipe to add the cooling liquid in the liquid storage tank into the cooler when the liquid level in the cooler is lower than a preset threshold value. According to the cooling liquid adding device, automatic liquid adding can be completed under the condition that the cooler does not stop, temperature control over the cooler can be guaranteed, the cooler downtime risk is avoided, systematic monitoring can be conducted on the liquid adding process of all coolers of the same model, liquid adding information in the liquid adding process is analyzed, so that the purpose of predicting and checking liquid leakage faults of the equipment is achieved, and meanwhile, environmental pollution can be effectively reduced.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a cooling liquid adding device, a cooler and semiconductor equipment. Background technique [0002] Advanced semiconductor silicon wafer foundries will use dry etching equipment to complete the corresponding process of silicon wafers. During the dry etching process, a large number of chillers are used to precisely control the temperature during the process. The temperature control components required by semiconductor equipment (such as ESC, chamber wall and Lid, etc.) are connected through the water supply pipeline and return water pipeline of the cooler, and the circulating cooling liquid is used inside the pipeline for temperature exchange control as the temperature control medium of the cooler The coolant (coolant) will be consumed normally as the cooler is used. In this regard, the engineer needs to go to the site to check the liquid level scale line regular...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a cooling liquid adding device, cooler and semiconductor equipment to solve the time-consuming and labor-intensive way of manual liquid addition in the prior art, it is difficult to find out the lack of liquid in the cooler in time, and the equipment needs to be shut down. Adding liquid and easily causing environmental pollution

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