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A double vacuum pump body polishing liquid recovery device and method

A technology for recycling device and polishing liquid, applied in the field of polishing liquid recycling device with double vacuum pump body, can solve the problems of insufficient vacuum strength, affecting the effect of magnetorheological processing elements, etc., and achieve the effect of efficient recycling and improving stable working state

Active Publication Date: 2022-05-20
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

However, the vacuum strength is not enough, resulting in the adsorption of residual polishing fluid on the polishing wheel, which affects the effect of magnetorheological processing components

Method used

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  • A double vacuum pump body polishing liquid recovery device and method
  • A double vacuum pump body polishing liquid recovery device and method
  • A double vacuum pump body polishing liquid recovery device and method

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Embodiment Construction

[0031] The following description provides many different embodiments, or examples, for implementing various features of the present invention. The elements and arrangements described in the following specific examples are only used to concisely express the present invention, which are only examples, and are not intended to limit the present invention.

[0032] see attached figure 1 , The embodiment of the present invention discloses a double vacuum pump body polishing liquid recovery device, including a vacuum chamber 1, a first vacuum pump body 2, a second vacuum pump body 3 and a polishing liquid storage device 4;

[0033] The vacuum chamber includes an input interface 11, a first vacuum interface 12, and a second vacuum interface 13;

[0034] The polishing liquid enters the vacuum chamber 1 through the input port 11 , the first vacuum pump body 2 communicates with the vacuum chamber 1 through the first vacuum port 12 , and the second vacuum pump body 3 passes through the ...

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Abstract

The present invention is applicable to the technical field of optical element processing, and provides a double-vacuum pump body polishing liquid recovery device, including a vacuum chamber, a first vacuum pump body, a second vacuum pump body and a polishing liquid storage device; the vacuum chamber includes input interface, a first vacuum interface, and a second vacuum interface; the polishing liquid enters the vacuum cavity through the input interface, the first vacuum pump communicates with the vacuum cavity through the first vacuum interface, and the The second vacuum pump body communicates with the vacuum cavity through the second vacuum port, and the polishing liquid storage device communicates with the first vacuum pump body. The device can realize high-efficiency recovery of the polishing liquid without residue, and improve the stable working state of the polishing liquid.

Description

technical field [0001] The invention relates to the technical field of the optical element processing field, in particular to a double vacuum pump body polishing liquid recovery device and method. Background technique [0002] Magnetorheological polishing technology is a high-precision optical component precision processing technology. It uses the magnetic field generated inside the polishing wheel to adsorb the magnetic polishing liquid, and the magnetic polishing liquid and the component processing surface produce relative motion through the rotation of the polishing wheel. The surface of the component is processed by shearing and removal. [0003] Magnetic polishing liquid is recycled, it is mainly circulated by the liquid supply system and recovery device of polishing liquid, such as Figure 4 shown. The magnetic polishing liquid has two characteristics, one is that the magnetic polishing liquid is composed of iron powder with a mass ratio of more than 80%, so the liqui...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B57/02B24B57/00B24B1/00B24B29/02
CPCB24B57/02B24B57/00B24B1/005B24B29/02Y02P70/10
Inventor 侯晶刘世伟许乔陈贤华张清华蒙晨郑楠李海波王健刘民才
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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