Micro-nano fluidic chip, manufacturing method thereof and micro-nano fluidic system

Abstract

The invention discloses a micro-nano fluidic chip, a manufacturing method thereof and a micro-nano fluidic system, and belongs to the field of biochemical detection. The micro-nano fluidic chip comprises a substrate, an electrode layer and a film layer, wherein the electrode layer and the film layer are located on the substrate. The orthographic projection of the first electrode in the electrode layer on the reference plane is partially overlapped with the orthographic projection of the plurality of micro-nano fluid channels on the reference plane, and the orthographic projection of the second electrode in the electrode layer on the reference plane is staggered from the orthographic projection of the plurality of micro-nano fluid channels on the reference plane. Therefore, the enrichment area in the micro-nano fluidic chip is the area of one end, far away from the second electrode, in the second groove, so that the size of the enrichment area in the micro-nano fluidic chip is only related to the size of the second groove, and when the number of the micro-nano fluidic channels in the micro-nano fluidic chip is increased, the enrichment effect of the micro-nano fluidic chip on the charged substances is not influenced, and the detection accuracy of the charged substances in the enrichment area is effectively improved.

Description

technical field [0001] The present application relates to the field of biochemical detection, in particular to a micro-nanofluidic chip, a manufacturing method thereof, and a micro-nanofluidic system. Background technique [0002] The micro-nanofluidic chip is an important tool for separating charged substances (eg, molecules such as globulin or DNA) in sample solutions (eg, body fluids of the human body) using the principle of electroosmotic flow. The enrichment of charged substances can be achieved through the micro-nanofluidic chip, so that detection equipment can detect the enriched charged substances. [0003] In related technologies, a micro-nanofluidic chip includes: a substrate, and a film layer on the substrate. The film layer has a first groove and a second groove, and a plurality of micro-nano flow channels for communicating with the first groove and the second groove, and the micro-nano flow channel refers to a channel for transporting fluid The size is a micro...

AI Technical Summary

Problems solved by technology

However, when the number of micro-nano flow channels is large, the effect of enriching charged substances will be deteriorated, and eventually the detection accuracy of charged substances will be low.

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