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Method for preparation of hydridosilane oligomers

A technology of hydrosilane and branched hydrosilane, which is used in the preparation of coating compositions and silicon-containing layers, and in the field of hydridosilane oligomers, which can solve the problems of insufficient silicon-containing layers and achieve good coating properties and thickness increased effect

Pending Publication Date: 2021-12-07
EVONIK OPERATIONS GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, for formulations in coating methods based on such hydridosilane mixtures, it is disadvantageous that these mixtures have a high content of linear hydridosilanes and thus tend to dewet, which leads to insufficient silicon-containing layers

Method used

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  • Method for preparation of hydridosilane oligomers
  • Method for preparation of hydridosilane oligomers
  • Method for preparation of hydridosilane oligomers

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Embodiment Construction

[0023] The present invention will be described in more detail below. As used herein, the term "comprising" should be understood as being open-ended and not excluding the presence of additional undescribed or unstated elements, materials, components or method steps. The terms "comprising", "comprising" and similar terms are to be understood as synonymous with "including". As used herein, the term "consisting of" should be understood to exclude the presence of any unspecified element, ingredient or method step.

[0024] As stated above, the present invention relates to a process for the preparation of hydrosilane oligomers. The process according to the invention for the preparation of hydridosilane oligomers comprises reacting a hydridosilane composition (I) comprising at least one linear hydrogenated Silane Si n h 2n+2 , where n≥2. The branched hydrosilane compound (II) of the present invention comprises at least one quaternary silicon atom Si (SiR 3 ) 4 , where R is sel...

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Abstract

The present invention relates to a method for preparing hydridosilane oligomers and to hydridosilane oligomer obtainable by the method as well as their use. The present invention further refers to a method for preparing coating compositions and for preparing a silicon-containing layer.

Description

[0001] field of invention [0002] The invention relates to a process for the preparation of hydrodosilane oligomers and to the hydrodosilane oligomers obtainable by said process and to their use. The invention also relates to a method for producing a coating composition and for producing a silicon-containing layer. [0003] Background of the invention [0004] Hydrosilanes and their oligomers are known in the literature as possible starting materials for the production of silicon layers. [0005] Hydrosilanes are compounds containing essentially only silicon and hydrogen atoms. Synthetically obtainable hydridosilanes are known to have 11 or fewer silicon atoms. Hydrosilanes can in principle be gases, liquids or solids and, especially in the case of solids, are essentially soluble in aromatic or aliphatic solvents such as toluene or cyclooctane, or in other liquid hydridosilanes such as neopentasilane (Si(SiH 3 ) 4 . Some examples of hydrosilanes are monosilane, disilane,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08G77/60C09D183/16H01L21/02
CPCH01L21/02532H01L21/02592H01L21/02628C08G77/60C09D183/16C09D7/20C01B33/021C01B33/04C09D1/00H01L21/02667
Inventor M·霍尔特豪森M·罗卡罗A·普然D·施密特J·策尓纳C·达施莱茵O·文尼克
Owner EVONIK OPERATIONS GMBH
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