MEMS single-axis gyroscope

A single-axis, gyroscopic technology, applied in the field of gyroscopes, can solve problems such as the inability to guarantee the displacement ratio of the mass block and the weak coupling of the mass structure of the gyro, so as to resist the interference of external electrical and mechanical noise, improve the signal-to-noise ratio of the device, and realize the torque balanced effect

CN114858152APending Publication Date: 2022-08-05瑞声开泰科技(武汉)有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2022-08-05

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Abstract

The invention provides an MEMS single-axis gyroscope. The MEMS single-axis gyroscope comprises an anchor point unit, a sensing unit elastically connected to the anchor point unit and a driving decoupling structure elastically connected to the anchor point unit and the sensing unit. The sensing unit comprises a plurality of mass blocks arranged side by side and rocker connecting pieces connected between every two adjacent mass blocks; the joint of the rocker connecting piece and the two adjacent mass blocks is located on the same side of the center connecting line of the two mass blocks. According to the MEMS single-axis gyroscope, differential detection can be carried out, interference of external electricity and mechanical noise can be resisted, and the signal-to-noise ratio of a device is increased; the rocker connecting piece between the two mass blocks is adjusted, so that the vector displacement of each mass block is zero, the moment balance of the mass blocks can be realized, and the impact of external linear acceleration and angular acceleration can be resisted; compared with a traditional single-axis gyroscope of a butterfly wing type structure, the mass blocks are strongly coupled through the rocker connecting pieces in the scheme, the displacement ratio of the mass blocks is guaranteed, and the redundancy of the device to the technology is improved.
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Description

Technical field

[0001] The invention relates to the technical field of gyroscopes, in particular to a MEMS single-axis gyroscope.

Background technique

[0002] A gyroscope is a device used to sense and maintain direction. It is used to detect the deflection of physical quantities and the angular velocity of rotation when tilted. It is mostly used in navigation, positioning and other systems. Common examples are mobile phone GPS positioning and navigation, somatosensory game consoles, and satellite gyroscopes. positioning, etc.

[0003] Patent document 201180019449.7 discloses a MEMS structure for an angular velocity sensor, which adopts a double-mass butterfly wing structure. The MEMS structure is symmetrical on two axes in the horizontal plane. The base of the structure has the function of releasing stress, and the drive circuit and The detection loop adopts closed-loop control. The butterfly wing structure is two vibrating wheel structures with coupled vibration. The...

Examples

Embodiment Construction

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0027] like figure 1 As shown in , the MEMS single-axis gyro according to the embodiment of the present invention includes an anchor point unit 1 , a sensing unit 2 elastically connected to the anchor point unit 1 , and a drive decoupling structure elastically connected to the anchor point unit 1 and the sensing unit 2 3; characterized in that,

[0028] The sensing unit 2 includes a plurality of mass blocks 21 arranged side by side, and a rocker connecting piece 22 connected between every two adjacent mass blocks 21; the plurality of mass blocks 21 are arranged symmetrically about the connecting line of the respective centers, Each mass block 21 includes a main body 211 with a receiving groove 212 opened therein, and an elastic structure 213 connected to the main body 211 and located in the receiving groove 212. The end of the elastic structure 213 away ...