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Constant temperature control MEMS gyroscope

A technology of constant temperature control and gyroscope, which is used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments and other directions, which can solve the complex structure of MEMS gyroscope, limit the application of constant temperature control method, and large heat loss of off-chip heating structure and other problems, to achieve the effect of improving temperature stability, high sensitivity, and reducing power consumption

Pending Publication Date: 2021-11-12
WUHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Due to the complex structure of the MEMS gyroscope, the commonly used solution is to use an off-chip heating structure to realize the constant temperature control of the MEMS gyroscope. The heat loss of the off-chip heating structure is large, so this method consumes a lot of power, which limits the application of the constant temperature control method.

Method used

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  • Constant temperature control MEMS gyroscope
  • Constant temperature control MEMS gyroscope
  • Constant temperature control MEMS gyroscope

Examples

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Embodiment 1

[0044] It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic ideas of the present invention, and only the components related to the present invention are shown in the drawings rather than the number, shape and size of components in accordance with actual implementation Drawing, the type, quantity and proportion of each component can be changed arbitrarily during its actual implementation, and the component layout type may also be more complex.

[0045] The three-dimensional and planar structure of the constant temperature control MEMS gyroscope of the present invention are as follows: figure 1 and figure 2 As shown, the MEMS gyroscope structure of the present invention consists of four fixed anchor points 3, four heating beams 2, a rectangular heat insulation frame 1, a detection frame 5, two mass blocks 7, two pairs of driving electrodes 10, and four sensing electrodes 8 , two pairs of drive detection electrodes 9, se...

Embodiment 2

[0061] Based on the constant temperature control MEMS gyroscope structure in Example 1, the actual temperature change of the overall structure of the gyroscope can be monitored in real time by means of resonant frequency temperature measurement. The temperature control principle diagram based on the frequency temperature measurement method is as follows Figure 11 shown. A bias voltage V can be applied between two fixed anchor points 3 located on the left side of the MEMS gyroscope structure bias and heating positive voltage V h , apply a bias voltage V between the two fixed anchor points 3 on the right bias and heating negative voltage -V h , the heating function can be realized. The driving frequency f can be output by driving the detection electrode 9, and the detection signal is fed back to the proportional-integral controller (PI), and the output heating voltage is controlled by PI, so that the resonance frequency f of the overall structure is controlled to a constant ...

Embodiment 3

[0063] Based on the planar structure of the MEMS gyroscope in Example 1, the positions of the heating beam 2 and the fixed anchor point 3 can be flexibly arranged, and the planar structure schematic diagram is as follows Figure 12 shown. One end of the four heating beams 2 is located at the four corners of the rectangular heat insulating frame 1, and the other end of each heating beam 2 is respectively connected to a fixed anchor point 3, and the fixed anchor points 3 are located on both sides of the rectangular heat insulating frame 1 in the Y direction. This structure further increases the rigidity of the heating structure of the constant temperature control gyroscope, and can further reduce the influence of the structure of the heating beam 2 and the rectangular heat insulation frame 1 on the driving mode and detection mode of the gyroscope, thereby reducing the heating beam 2 and the rectangular Negative impact of thermal insulation frame 1 on MEMS gyroscope performance. ...

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Abstract

The invention discloses a constant temperature control MEMS (Micro Electro Mechanical System) gyroscope. The MEMES gyroscope is of a tuning fork type gyroscope structure and comprises a fixed anchor point, a heating beam, a rectangular heat insulation frame, a detection frame, two mass blocks, a driving electrode, an induction electrode, a driving detection electrode, a plurality of first-stage elastic beams, a plurality of second-stage elastic beams, a plurality of third-stage elastic beams and a plurality of center coupling elastic beams. According to the structure, resistance heating is carried out through the heating beam and the heat insulation outer frame, the actual temperature change of the MEMS gyroscope is monitored in real time, the closed-loop feedback control circuit is adopted to finely adjust the heating current or voltage in real time, and the heating constant-temperature control function in the chip of the MEMS gyroscope can be achieved. The MEMS gyroscope provided by the invention is simple in structure and relatively low in power consumption, and the temperature stability and reliability of the MEMS gyroscope can be effectively improved.

Description

technical field [0001] The invention relates to the technical field of MEMS gyroscope sensors, in particular to a constant temperature control MEMS gyroscope. Background technique [0002] A gyroscope is a sensing device that measures the rotation angle or angular displacement of an object. It is the core component of an inertial unit and is widely used in consumer electronics, automotive electronics, aerospace and military fields. Micro-electro-mechanical System (MEMS) gyroscopes occupy a growing inertial navigation market due to their advantages of low cost, small size, low power consumption, and integration with circuits. However, MEMS gyroscopes contain precise movable microstructures, and the external environment has a great influence on the performance and reliability of gyroscopes, which severely limits the application of MEMS gyroscopes in the field of high-end inertial navigation. The temperature change in the external environment is a key factor affecting the perf...

Claims

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Application Information

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IPC IPC(8): G01C19/5621H05B3/02
CPCG01C19/5621H05B3/02
Inventor 吴国强吴忠烨贾文涵韩金钊陈文杨尚书
Owner WUHAN UNIV
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