Carrying apparatus and carrying control method for sheet-like substrate

a technology of carrying apparatus and carrying control method, which is applied in the direction of electrical apparatus, thin material handling, article separation, etc., can solve the problems of large-sized thin plates, difficult to carry heavy, and large-sized thin plates upward, and achieve high speed and stably high-speed transport.

Inactive Publication Date: 2006-09-28
RORZE CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0024] According to another embodiment of the transporting apparatus of the present invention, the transporting apparatus is characterized by further comprising moving means for moving the pair of upright support members horizontally. In this embodiment, as the horizontal support table with the robot placed on is configured to be horizontally movable, the robot is allowed to move in both of the horizontal direction and the vertical direction. This configuration enab...

Problems solved by technology

However, in these days, as display units such as liquid crystal display units (liquid crystal display TV) become larger in size, glass plates used therefor also become larger in size, which requires upsizing of a...

Method used

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  • Carrying apparatus and carrying control method for sheet-like substrate
  • Carrying apparatus and carrying control method for sheet-like substrate
  • Carrying apparatus and carrying control method for sheet-like substrate

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Embodiment Construction

[0081] With reference to the attached drawings, embodiments for carrying out the present invention will be described in detail below. The following description deals with the case for transporting a glass plate of about 2 m square as a thin plate. As a transporting apparatus of the present invention is an apparatus for transporting a sheet member used in manufacturing a semiconductor integrated circuit, the transporting apparatus is operated in an environment of certain cleanness which is lower than that of clean room. Accordingly, the transporting apparatus of the present invention is a transporting apparatus which meets predetermined requirements for operating in the clean environment, for example, prevention of dust from occurring, and is completely different in behavior from transporting apparatus including a normal crane vehicle and a lifting machine in a storage warehouse.

[0082]FIG. 1 is a plane view illustrating a sheet manufacturing system for semiconductor integrated circu...

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Abstract

The present invention relates to a transporting apparatus and a transporting control method for thin plates, the apparatus for transporting the thin plates such as liquid crystal display panels and glass plates into a processing chamber, comprising a rather large robot (14) having rotating arms (16) for transporting large-sized thin plates. The transporting apparatus and a thin plate transporting system can stably raise the plates up to the heights of approximately 2 m and can transporting the plates with the deflected amount of the extended rotating arms (16) compensated. A horizontal support table (13) liftably cantilevered on two upright support members (12) is provided in the apparatus, and the transporting robot (14) with the rotating arms (16) is placed on the horizontal support table (13). Also, the deflected amount of the extended rotating arms is compensated by raising the height of the horizontal support table (13) based on the deflected amount. The deflected amount can also be compensated by varying the installation angle of the robot (14) placed on the horizontal support table (13).

Description

TECHNICAL FIELD [0001] The present invention relates to a transporting apparatus and a transporting control method for thin plates, the transporting apparatus being installed in a given clean environment for transporting or transferring the thin plates such as semiconductor wafers, liquid crystal display units, plasma display units, organic electroluminescence display units, inorganic electroluminescence display units, field emitting display units, liquid crystal display panels, printed-wiring assemblies, and partly-finished products. BACKGROUND ART [0002] Conventionally, used as a robot for transporting thin plates in the clean environment is a scalar type robot represented in the Japanese Patent No. 2,739,413. However, in these days, as display units such as liquid crystal display units (liquid crystal display TV) become larger in size, glass plates used therefor also become larger in size, which requires upsizing of a robot for transporting the plates. Accordingly, when glass pla...

Claims

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Application Information

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IPC IPC(8): B65H1/00
CPCH01L21/67742H01L21/67766
Inventor SAKATA, KATSUNORIOKUTSU, HIDEKAZUFUJII, SEIJI
Owner RORZE CORP
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