Air float support base for regulating air diaphragm two-way rigidity

Abstract

This invention relates to a gas floating bearing for adjusting two-way rigid of a gas film including several compressed gas cavities and several vacuum gas cavities, in which, the compressed gas cavity includes an air gate and several vent holes communicating with the bottom of the bearing and the air gate is connected with the inlet channel, the vacuum gas cavity includes a pumping hole communicating with the bottom of the bearing and connected with the pumping channels separately, the bottom of the bearing has vent holes communicating with the vent channel, which uses a technology of controlling gas float by compressed gas and vacuum pump.

Description

technical field [0001] The invention relates to a pneumatic regulating device, in particular to a device for regulating the two-way stiffness of an air film. Background technique [0002] In VLSI optical lithography, the requirements for lithographic precision are getting higher and higher. The horizontal movement of the silicon wafer stage during the photolithography process produces friction between the marble platform and this frictional force causes large errors in the precise movement of the silicon wafer stage. [0003] In order to avoid the decrease of the operation accuracy of the silicon wafer stage caused by the friction between the silicon wafer stage and the marble platform, air bearings are generally used to eliminate this friction force. The silicon chip stand is placed on the air-floating support, and the air-floating support discharges gas through the air outlet, and the air pressure keeps the air-floating support and the Dali platform at a certain distance....

AI Technical Summary

Problems solved by technology

[0004] However, there are still many deficiencies in the double-rigid air bearings that are commonly used now: the outlet holes of compressed gas are mostly made of metal, and as the use time increases, the metal is easy to corrode and wear, which directly affects the pressure on the gas supply. Accurate control; the vacuum gas chamber of the air bearing is small, and it is easy to appear the imbalance of the vacuum degree of the gas film when adjusting the vacuum degree of the gas film, which increases the instability of the air bearing

[0005] Although the currently used air bearing overcomes the contact friction between the silicon wafer stage and the marble platform, due to the above reasons, it is difficult for the air bearing to realize the two-way adjustment of the stiffness of the air film, and it is impossible to ensure that the silicon on the air bearing Tablet precise movement

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