Method of storing nitrogen trifluoride

Abstract

The method of storing nitrogen trifluoride includes storing nitrogen trifluoride in a chromium-molybdenum steel vessel manufactured through a deep drawing ironing process. Nitrogen trifluoride stored in this way according to the method of this invention does not deteriorate even after two years or more have passed.

Description

technical field [0001] The present invention generally relates to a method for storing nitrogen trifluoride (NF 3 ), in particular, the present invention relates to a method for storing NF using a chromium-molybdenum steel container produced by a deep drawing ironing (DDI) process. 3 gas method. Background technique [0002] In the field of sheet metal forming, a process that uses stamping dies to produce cylindrical containers with a closed bottom is called the DDI process. [0003] A stamping die is a processing tool that includes a pair of upper and lower elements (punch and die) made of carbon tool steel or alloy tool steel. The die is mounted on the press bed and the sheet is positioned and secured on the press bed. Then, when the punch is pressed against the sheet material, the sheet material is punched, thereby forming the barrel of the cup-shaped cylindrical container, so that the bottom surface and the side wall surface are integrated into one body. The top open...

AI Technical Summary

Problems solved by technology

[0016] current NF 3 NF generally accepted by gas producers and users 3 In the standard, only the acidity of HF is determined, but the acidity produced by nitric acid is not determined, so it is difficult to control nitric acid

[0017] Moreover, since NF stored in manganese steel containers 3 Nitric acid can be detected in the container, it can be considered that the container used is not suitable for storage of NF 3