Method of storing nitrogen trifluoride

一种三氟化氮、钼钢的技术，应用在三氟化氮、化学仪器和方法、气体贮运装置等方向，能够解决不适于贮存、没有确定硝酸酸度、硝酸很难被控制等问题

Inactive Publication Date: 2009-02-11
FOOSUNG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0016] current NF 3 NF generally accepted by gas producers and users 3 In the standard, only the acidity of HF is determined, but the acidity produced by nitric acid is not determined, so it is difficult to control nitric acid
[0017] Moreover, since NF stored in manganese steel containers 3 Nitric acid can be detected in the container, it can be considered that the container used is not suitable for storage of NF 3

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0023] The present invention can be better understood through the following examples, which are for the purpose of illustration only and should not be construed as limiting the present invention.

[0024] Add ammonia and fluorine gas to the melt of ammonium hydrofluoride to prepare impure NF 3 gas. Refining the gas thus prepared into low-temperature high-purity liquid-phase NF 3 , and then collect the gaseous NF in a storage vessel 3 . Load 20Kg of collected NF in the manganese steel container and the chromium-molybdenum steel container made by DDI process respectively 3 gas. Place each container at room temperature and detect NF over time 3 The pH of the gas changes. The manganese steel container used contained 1.5 wt% manganese and the chromium-molybdenum steel container used contained 1.5 wt% chromium and 0.5 wt% molybdenum. N was analyzed by gas chromatography (Valco, PDD detector) 2 O content. In addition, HNO was analyzed by 3 : Determine the total acidity by N...

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PUM

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Abstract

The method of storing nitrogen trifluoride includes storing nitrogen trifluoride in a chromium-molybdenum steel vessel manufactured through a deep drawing ironing process. Nitrogen trifluoride stored in this way according to the method of this invention does not deteriorate even after two years or more have passed.

Description

technical field [0001] The present invention generally relates to a method for storing nitrogen trifluoride (NF 3 ), in particular, the present invention relates to a method for storing NF using a chromium-molybdenum steel container produced by a deep drawing ironing (DDI) process. 3 gas method. Background technique [0002] In the field of sheet metal forming, a process that uses stamping dies to produce cylindrical containers with a closed bottom is called the DDI process. [0003] A stamping die is a processing tool that includes a pair of upper and lower elements (punch and die) made of carbon tool steel or alloy tool steel. The die is mounted on the press bed and the sheet is positioned and secured on the press bed. Then, when the punch is pressed against the sheet material, the sheet material is punched, thereby forming the barrel of the cup-shaped cylindrical container, so that the bottom surface and the side wall surface are integrated into one body. The top open...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F17C1/12
CPCC01B21/0835C22C38/22B01L5/02B01L5/00
Inventor 饭久保佑一张香子金大铉金哲虎
Owner FOOSUNG CO LTD
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