40results about "Nitrogen trifluoride" patented technology

Apparatus is disclosed for the production of nitrogen trifluoride (NF3), starting with an anhydrous molten flux including ammonia (NH3), a metal fluoride (MF), and hydrogen fluoride (HF). The apparatus includes an electrolyzer, an ammonia solubilizer, a hydrogen fluoride solubilizer, a nitrogen trifluoride reactor, two compressors, two pumps, three condensers a gas recycle loop, and, two flux loops of the same component ternary flux, but each loop with different concentration.

Mixtures of an oxidizer and a high pressure fluid are produced by adsorbing an oxidizer in an adsorption bed and then desorbing the oxidizer with a high pressure fluid. The same steps can simultaneously occur in a second adsorbing bed but in reverse order. The oxidizer may be ozone and the high pressure fluid may be high pressure C0₂ including supercritical C0₂. Such mixtures can be used for applications such as cleaning semiconductor wafers, food disinfection and water disinfection.

A method producing a volume of purified F₂ comprising removing HF from a F₂ feed and removing CF₄ from the F₂ feed, wherein a concentration of HF in the volume of purified F₂ is less than 1 ppm (v/v) and a concentration CF₄ in the volume of purified F₂ is less than 10 ppm (v/v).

The invention discloses a method for treating household garbage leachate by using household garbage incineration fly ash. The method comprises the steps: adding a hydrochloric acid aqueous solution into the household garbage leachate; respectively weighing water and the household garbage incineration fly ash, mixing, stirring and centrifuging for solid-liquid separation to obtain household garbageincineration fly ash water washing liquid and fly ash solid slurry; carrying out electric treatment on the household garbage incineration fly ash water washing liquid, capturing gas generated by an electric anode chamber, directly introducing the gas into the acidified household garbage leachate, and aerating the household garbage leachate; scraping and filtering the household garbage leachate toobtain oily nitrogen trichloride and denitrified leachate; weighing an iron-aluminum agent and the fly ash solid slurry, and carrying out vacuum drying to obtain fly ash purified powder; and weighingthe denitrification leachate and the fly ash purification powder, mixing, stirring, and carrying out solid-liquid separation to obtain the household garbage leachate purification liquid and gelatinized fly ash solid slurry. 86% of nitrogen trichloride can be recycled at most, and 98% of ammonia nitrogen, 97% of COD, 98% of total phosphorus and 98% of mercury in the landfill leachate can be removed.

Nitrogen trifluoride is produced with a high yield by the method comprising forming a fast stream of micro droplets of a fused ammonium fluoride salt by rapidly ejecting the fused ammonium fluoride salt into a reactor through a nozzle while circulating the fused ammonium fluoride salt in the reactor from a lower portion to an upper portion; and contacting micro droplets of the fused ammonium fluoride salt with fluorine gas sucked in the reactor through a suction pipe for fluorine by a negative pressure formed around the nozzle due to an ejection of the fused ammonium fluoride salt, whereby excessive generation and regional accumulation of the heat of reaction are prevented, reducing the reaction temperature by 10˜30° C. compared with those of the existing methods, and a side reaction occurs only to a slight extent according to the lowered reaction temperature.

A process for the production of nitrogen trifluoride by reacting fluorine gas and liquid ammonia acid fluoride in a first reaction zone having a relatively low energy input followed by treatment of the resulting reaction product in a second reaction zone having a relatively high energy input. The resulting crude nitrogen trifluoride product may be further treated with fluorine gas under elevated temperatures to improve yield of the desired product.

F2 gas is reacted with NH3 gas in a gaseous phase at 80° C. or less in the presence of a diluting gas to produce NF3. Thus, NF3 is produced with good safety, efficiency and profitability.

Disclosed is a distillation process for reducing the concentration of impurities dinitrogen difluoride and dinitrogen tetrafluoride in nitrogen trifluoride. The process comprises: (a) distilling a mixture comprising nitrogen trifluoride and dinitrogen difluoride and/or dinitrogen tetrafluoride in a distillation column in the presence of a compound having a higher normal boiling point than nitrogen trifluoride; (b) removing a mixture comprising dinitrogen difluoride and/or dinitrogen tetrafluoride as a sidedraw from the distillation column; (c) removing a mixture comprising the compound having a higher normal boiling point than nitrogen trifluoride from the bottom of the distillation column; and (d) removing a nitrogen trifluoride product having reduced concentration of dinitrogen difluoride and/or dinitrogen tetrafluoride from the top of the distillation column.

A process and system for adsorption purification of NF₃ wherein a crude product containing NF₃ and impurities such as CF₄ is brought into contact with a polyacrylonitrile-based carbon molecular sieve so that at least a portion of one or more impurities are adsorbed by the sieve without a significant adsorption of the NF₃.

An apparatus for producing a fluorinated gaseous compound. The apparatus includes a circulation system which comprises: a reaction zone in which a liquid mixture containing a raw-material liquid is reacted with a raw-material gas; a flow zone in which only the liquid mixture flows; an upper transfer zone in which the liquid mixture which has undergone the reaction is transferred from an upper part of the reaction zone to an upper part of the flow zone; and a lower transfer zone in which the liquid mixture is transferred from a lower part of the flow zone to a lower part of the reaction zone. (A) The raw-material gas is introduced into the lower part of the reaction zone, and (B) at least one fluorinated gaseous compound selected between a first fluorinated gaseous compound which is a reaction product yielded in the reaction zone and a second fluorinated gaseous compound obtained by further fluorinating the first fluorinated gaseous compound is introduced into the lower part of the reaction zone. The liquid mixture is circulated by these operations (A) and (B).

Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of the zeolite 3A, 4A or 5A which is ion exchanged with alkali earth metal and is thermally treated at 150 to 600° C. for 0.5 to 100 hours so as to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom.

The present invention relates to a process for production, shipment, and treatment of a NH₄F(HF)_x feedstock for local production of fluorine and NF₃ for semiconductor chamber cleaning without the need for storage of large quantities of dangerous feeds and intermediate products.

A method for the production of nitrogen trifluoride from a fluorine reactant and an ammonium ion source that is dispersed within a liquid phase reaction mixture containing one or more perfluorocarbon fluids is disclosed herein. In one embodiment, the fluorine reactant is introduced to the reaction mixture at a temperature that ranges from 90 DEG C to 120 DEG C. In this embodiment, the percentage yield of nitrogen trifluoride may be about 80% or greater.

A process for synthesizing a halogenated nitrogen represented by a formula of NF_xL_3-x, where L represents a halogen other than fluorine, and 1≦x≦3 is provided. This process includes the step of (a) reacting an ammonium complex compound that is one selected from the group consisting of NH₄F.nHF, (NH₄)_yMF_z.mHF and a mixture of these and that is in liquid form, with an interhalogen compound or a mixture of an interhalogen compound and F₂ gas, wherein 1<n, 1≦y≦4, 2≦z≦8, 0.1≦m, and M represents one selected from the group consisting of elements of group 1 to group 16 of periodic table and a mixed element of these elements.

A highly pure nitrogen trifluoride having a carbon tetrafluoride content of 10 ppm or less can be effectively obtained by boiling crude liquid nitrogen trifluoride having carbon tetrafluoride contaminant under a pressure ranging from 35 to 45 atm, to remove carbon tetrafluoride therefrom through vaporization.

An electrode for electrolytic fluorination according to the present invention contains nickel as a base material, and has a fluorine content of less than 1,000 ppm. The electrode preferably has, in atleast a surface portion thereof, a nickel content of 99 mass% or more, an iron content of 400 ppm or less, a copper content of 250 ppm or less, and a manganese content of 1000 ppm or less. The production method for the electrode according to the present invention comprises disposing a nickel base material electrode as a cathode in a nickel plating bath, and applying nickel plating to the nickel base material electrode by an electrolytic nickel plating method, wherein (1) a nickel component which has precipitated in a molten salt or which has deposited on a cathode in a nitrogen trifluoride production step performed by molten salt electrolysis using a nickel base material anode, or said nickel base material anode, is used an anode, or (2) said nickel base material anode is used as a cathode.

The invention relates to a use of a fluorination gas, wherein the elemental fluorine (F₂) is present in a high concentration, for example, in a concentration of elemental fluorine (F₂), especially of equal to much higher than 15% or even 20% by volume (i.e., at least 15% or even 20% by volume), and to a process for the manufacture of a fluorinated benzene by direct fluorination employing a fluorination gas, wherein the elemental fluorine (F₂) is present in a high concentration. The process of the invention is directed to the manufacture of a fluorinated benzene by direct fluorination. Especially the invention is of interest in the preparation of fluorinated benzene, final products and as well intermediates, for usage in agro-, pharma-, electronics-, catalyst, solvent and other functional chemical applications. The fluorination process of the invention may be performed batch-wise or in a continuous manner. If the process of the invention is performed batch-wise, a column (tower) reactor may be used. If the process of the invention is continuous a microreactor may be used. The invention is characterized in that the starting compound is benzene, and the fluorinated compound produced is a fluorinated benzene, preferably monofluorobenzene.