26results about "Inter-halogen compounds" patented technology

The invention relates to a synthesis method of chlorine trifluoride, which comprises the following steps: S1, connecting a cold trap with a gas outlet of a metal pipeline of a reactor, adding a metal chloride into the reactor, with the addition amount of the metal chloride being two thirds of that of the reactor, and maintaining the pressure; s2, cooling to-100 DEG C to-60 DEG C by a cold trap; s3, the metal pipeline of the reactor is heated to 850-1000 DEG C; s4, starting to introduce fluorine gas, and stopping introducing the fluorine gas when the pressure reaches 3.5 MPa; s5, after reacting for 1-2 hours, opening an outlet valve of the reactor, and collecting through a cold trap; s6, after collection is completed, the temperature of the cold trap is increased to-20 DEG C to 0 DEG C, an emptying opening is opened, and the emptying opening is closed after 5-20 min. The raw materials are simple, and the conversion rate can be effectively improved.

There is provided a method for producing iodine heptafluoride in which iodine heptafluoride having a low content of iodine gas can be produced with high yield. The method for producing iodine heptafluoride includes: a preparation step of preparing a liquid mixture containing iodine pentafluoride and hydrogen fluoride in which a content of the hydrogen fluoride is 0.1% by mass or more and 20% by mass or less with respect to a content of the iodine pentafluoride; a vaporization step of obtaining raw material mixed gas containing iodine pentafluoride gas, hydrogen fluoride gas, and fluorine gas by mixing fluorine gas with the liquid mixture to vaporize the liquid mixture; and a reaction step of producing iodine heptafluoride by causing the raw material mixed gas to react in a presence of a catalyst.

Provided is a method for producing iodine heptafluoride with which it is possible to produce iodine heptafluoride having a low iodine gas content at a high yield. This method for producing iodine heptafluoride comprises: a preparation step for preparing a liquid mixture containing iodine pentafluoride and hydrogen fluoride, the hydrogen fluoride content being 0.1-20 mass% of the iodine pentafluoride content; a gasification step in which fluorine gas is mixed into the liquid mixture and the liquid mixture is gasified to obtain a raw material mixed gas containing iodine pentafluoride gas, hydrogen fluoride gas, and fluorine gas; and a reaction step in which the raw material mixed gas is reacted in the presence of a catalyst to produce iodine heptafluoride.

The invention relates to the technical field of fine chemical engineering, in particular to a chlorine trifluoride preparation system and a preparation method, and aims to solve the problems that raw materials are wasted and the conversion rate and the purity of chlorine trifluoride are reduced in the preparation method. The chlorine trifluoride preparation system provided by the invention comprises a synthesis reactor, a condensing device, a buffer tank, a compressor and a temporary storage container which are connected in sequence, wherein the temporary storage container is connected with the synthesis reactor; fluorine gas and chlorine gas are introduced into the synthesis reactor for reaction, gas obtained after the reaction enters the condensing device for cooling to obtain chlorine trifluoride liquid and intermediate gas, and the intermediate gas sequentially passes through the buffer tank, the compressor and the temporary storage container and then enters the synthesis reactor; the chlorine trifluoride liquid is discharged from the condensing device. According to the invention, F2 and an intermediate product ClF in the intermediate gas are fully utilized, the conversion rate and purity of chlorine trifluoride are improved, and the treatment load of a tail gas system is also reduced.

Provided is a method for producing bromine pentafluoride, whereby it becomes possible to reduce the amount of a remaining unreacted fluorine gas and to produce bromine pentafluoride having high purity. The method for producing bromine pentafluoride comprises: a reaction step of supplying a bromine-containing compound that is at least one of a bromine gas and bromine trifluoride and a fluorine gas to a reactor (1) in such a manner that the molar ratio F / Br of fluorine atoms to bromine atoms can became 3.0 to 4.7 inclusive to perform a reaction of the bromine-containing compound with the fluorine gas, thereby producing a reaction mixture comprising bromine pentafluoride and bromine trifluoride; and a separation step of separating bromine pentafluoride and bromine trifluoride from each other in the reaction mixture.

The present invention relates to a process for producing an iodofluoroalkane compound comprising the steps of: a) contacting a fluoroolefin with hydrogen iodide to form a stream A comprising the iodofluoroalkane compound and unreacted hydrogen iodide, b) separating the stream A into a first stream B1 comprising the iodofluoroalkane compound and a stream B2 comprising unreacted hydrogen iodide, c) recycling the stream B2 to step a).

Provided is a method for producing a fluorinated organic compound by fluorinating an organic compound in the presence of a fluorinating composition comprising IF5, iodine, and an amine, the composition comprising the iodine in an amount of 0.12 mol or less per mole of the IF5. This production method can synthesize a fluorinated organic compound with high efficiency.

The present invention relates to a process for producing an iodofluoroalkane compound comprising the steps of: a) contacting a fluoroolefin with hydrogen iodide to form a stream A comprising the iodofluoroalkane compound and unreacted hydrogen iodide, b) separating the stream A into a first stream B1 comprising the iodofluoroalkane compound and a stream B2 comprising unreacted hydrogen iodide, c) recycling the stream B2 to step a).

A method for removing fluorine gas from a fluorine-containing gas containing fluorine gas and a fluorine-containing compound gas is provided. A method for removing fluorine gas from a fluorine-containing gas containing fluorine gas and a fluorine-containing compound gas includes a removal step in which the fluorine-containing gas is brought into contact with at least one metal salt selected from the group consisting of metal chlorides, metal bromides, and metal iodides.

Provided are: a method for producing a purified fluorine-containing gas composition capable of suppressing contamination of Cr on a treatment target surface when etching is performed; a method for producing a semiconductor device in which the method for producing the purified fluorine-containing gas composition is applied; and an etching apparatus. The present invention pertains to a method for producing a purified fluorine-containing gas composition, the method comprising a contact step for bringing, into contact with a metal fluoride that is solid at 30°C or lower, a crude fluorine-containing gas composition containing a fluorine-containing gas composition that includes 98 vol% or more of a fluorine-containing molecule excluding hydrogen fluoride and that has a Cr-concentration of 100 mass ppb or less.

Provided are: a method for producing a purified fluorine-containing gas composition capable of suppressing contamination of Cr on a treatment target surface when etching is performed; a method for producing a semiconductor device in which the method for producing the purified fluorine-containing gas composition is applied; and an etching apparatus. The present invention pertains to a method for producing a purified fluorine-containing gas composition, the method comprising a contact step for bringing, into contact with a metal fluoride that is solid at 30°C or lower, a crude fluorine-containing gas composition containing a fluorine-containing gas composition that includes 98 vol% or more of a fluorine-containing molecule excluding hydrogen fluoride and that has a Cr-concentration of 100 mass ppb or less.

The present invention discloses a process for preparing high-purity iodine monochloride from crude iodine, comprising the following preparation steps: S1, inputting crude iodine; S2, passing chlorine; S3, absorbing excess chlorine; S4, filtering and separating. The present invention also discloses a device for preparing high-purity iodine monochloride from crude iodine, comprising a reactor, an air inlet pipe and a feed pipe are provided on the reactor, a stirring shaft is provided for rotation in the reactor, and the stirring shaft is hollowly arranged, a reciprocating screw is fixedly connected to the top of the reactor, and the reciprocating screw is rotatably arranged inside the stirring shaft, and two reciprocating thread sections are provided on the reciprocating screw. The present invention can greatly shorten the effective reaction time of the process for preparing high-purity iodine monochloride from crude iodine by improving process conditions and equipment, from 8-10 hours in the prior art to less than 1-5 hours, and the purity content of the iodine monochloride obtained is high, which meets the requirements of modern process production.

An object of the present invention is to provide a high-accuracy measurement method that, in the measurement of the concentration of fluorine gas contained in a halogen fluoride-containing gas using a mass spectrometer, reduces the amount of measurement errors of the concentration of fluorine gas that are caused by consumption due to reactions between metal members and impurities, and fluorine gas on the gas passage. The present invention includes a method for measuring the concentration of fluorine gas (F2) contained in a halogen fluoride-containing gas by using an analysis apparatus having a halogen fluoride-containing gas supply source, a fluorine-containing gas supply source, a tube, a capillary, and a mass spectrometer, the method comprising, before measuring the concentration of fluorine gas, performing passivation treatment on the tube and the capillary by using a passivation gas containing a fluorine-containing gas supplied from the fluorine-containing gas supply source.

The invention provides a method for preparing iodine pentafluoride through photocatalysis, which comprises the following steps: mixing silver iodide and iodine pentafluoride in a reactor, introducing mixed gas of fluorine and protective gas, carrying out photocatalytic reaction under the irradiation of ultraviolet light, and separating to obtain the iodine pentafluoride. The reaction speed of silver iodide and fluorine is increased by utilizing the photosensitive characteristic of silver iodide, so that the reaction efficiency of iodine pentafluoride preparation is improved, and the iodide-based iodine pentafluoride production process is efficient, economical and feasible. The reaction speed is increased by adopting a photocatalysis method, the reaction completion time is only 5 hours, and the energy utilization efficiency and the production efficiency are high; and the iodine pentafluoride is produced by using the silver iodide as the raw material, and the byproduct is high-value silver fluoride, so that the value-added utilization of the raw material is realized, and the economic benefit is good. The method is simple in technological process, mild and controllable in reaction process, good in stability and more beneficial to industrial production.

Provided is a method for producing a fluorinated organic compound by fluorinating an organic compound in the presence of a fluorinated composition containing IF5, iodine, and an amine and containing 0.12 mol or less of the iodine per 1 mol of the IF5, the method being capable of efficiently synthesizing a fluorinated organic compound.

The object of the present invention is to provide a high-precision measurement method, which reduces the measurement error of fluorine gas concentration caused by the consumption of metal components and impurities on the gas flow path reacting with fluorine gas when measuring the fluorine gas concentration contained in halogen-containing fluoride gas using a mass spectrometer. The present invention includes a method for measuring fluorine gas concentration, which is a method for measuring the concentration of fluorine gas (F2) contained in halogen-containing fluoride gas using an analysis device (10) having a halogen-containing fluoride gas supply source (16), a fluorine-containing gas supply source (14), a piping (24), a capillary (28) and a mass spectrometer (30), characterized in that before measuring the fluorine gas concentration, the piping and the capillary are passivated using a passivation gas containing the fluorine-containing gas supplied from the fluorine-containing gas supply source.

The invention provides a method for producing a purified fluorine-containing gas composition capable of inhibiting Cr from being mixed into a surface to be processed during etching, a method for producing a semiconductor device using the method for producing the purified fluorine-containing gas composition, and an etching apparatus. The present invention relates to a method for producing a purified fluorine-containing gas composition, comprising a contact step for bringing a crude fluorine-containing gas composition containing a fluorine-containing gas composition containing 98 vol% or more of fluorine-containing molecules other than hydrogen fluoride and having a Cr concentration of 100 ppb by mass or less into contact with a solid metal fluoride at 30 DEG C or less.

There is provided a method for producing high-purity bromine pentafluoride while leaving a less amount of an unreacted fluorine gas. The method for producing bromine pentafluoride includes a reaction step of feeding a bromine-containing compound, which is at least one of a bromine gas and bromine trifluoride, and a fluorine gas to a reactor to give a (fluorine atom):(bromine atom) molar ratio, that is, F / Br of 3.0 or more and 4.7 or less and reacting the bromine-containing compound and the fluorine gas to each other to obtain a reaction mixture containing bromine pentafluoride and bromine trifluoride; and a separation step of separating bromine pentafluoride and bromine trifluoride in the reaction mixture from each other.

The present invention relates to a method for producing iodofluoroalkane compounds, comprising the steps of: a) contacting a fluoroolefin with hydrogen iodide to form a stream A comprising the iodofluoroalkane compound and unreacted hydrogen iodide, b) separating the stream A into a first stream B1 comprising the iodofluoroalkane compound and a stream B2 comprising unreacted hydrogen iodide, and c) recycling the stream B2 to step a).

This invention provides a method for producing iodofluoroalkane compounds that improves reaction conversion rate, selectivity, and environmental impact by using more suitable reagents or operating conditions. [Solution] The present invention provides a method comprising the following steps: a) contacting a fluoroolefin with hydrogen iodide to form a flow A containing the iodofluoroalkane compound and unreacted hydrogen iodide; b) separating flow A into a first flow B1 containing the iodofluoroalkane compound and a flow B2 containing unreacted hydrogen iodide; and c) recirculating flow B2 back to step a).

The present invention relates to a process for producing an iodofluoroalkane compound comprising the steps of: a) contacting a fluoroolefin with hydrogen iodide to form a stream A comprising the iodofluoroalkane compound and unreacted hydrogen iodide, b) separating the stream A into a first stream B1 comprising the iodofluoroalkane compound and a stream B2 comprising unreacted hydrogen iodide, c) recycling the stream B2 to step a).

The invention provides a method for preparing iodine pentafluoride through photocatalysis, which comprises the following steps: mixing silver iodide, iodine pentafluoride and potassium iodide to obtain a mixed solution; the method comprises the following steps: under the condition of mixed gas of fluorine and protective gas, carrying out photocatalytic reaction under the irradiation of ultraviolet light, and then separating to respectively obtain iodine pentafluoride and silver fluoride. The reaction of the silver iodide and fluorine is accelerated by utilizing the photosensitive characteristic of the silver iodide, and meanwhile, the iodine pentafluoride and the silver fluoride with high additional values are prepared, so that the preparation reaction efficiency of the iodine pentafluoride is improved, and the iodine pentafluoride production process based on the iodide is efficient, economical and feasible. According to the method, the capacity of the reaction system on the silver iodide is improved by utilizing the potassium iodide, the byproduct high-value silver fluoride is produced in the process of producing the iodine pentafluoride, value-added utilization of the raw materials is realized, and the economic benefit is good; the silver iodide reaction speed is increased, silver fluoride can be selectively produced, and the product purity is high; the reaction process is mild and controllable, and the stability is good.

The present invention relates to a process for producing an iodofluoroalkane compound comprising the steps of: a) contacting a fluoroolefin with hydrogen iodide to form a stream A comprising the iodofluoroalkane compound and unreacted hydrogen iodide, b) separating the stream A into a first stream B1 comprising the iodofluoroalkane compound and a stream B2 comprising unreacted hydrogen iodide, c) recycling the stream B2 to step a).

The invention provides a synthesis method of bromine monochloride, which comprises the following steps: dissolving bromide containing metal ions in an organic solvent, introducing chlorine, reacting to generate bromine monochloride and metal-containing chloride, filtering, and distilling to obtain pure bromine monochloride. According to the method, the polar organic solvent is selected as the solvent, the generation of bromine trichloride can be effectively inhibited at proper reaction temperature and time, and bromine monochloride with relatively high purity is obtained; according to the invention, the problems of complex preparation and low purity of bromine monochloride are effectively solved.

Provided is a method for producing a fluorinated organic compound by fluorinating an organic compound in the presence of a fluorinating composition comprising IF5, iodine, and an amine, the composition comprising the iodine in an amount of 0.12 mol or less per mole of the IF5. This production method can synthesize a fluorinated organic compound with high efficiency.

Provided is a method for removing fluorine gas from a fluorine-containing gas that comprises fluorine gas and a fluorine-containing compound gas. This method for removing fluorine gas from a fluorine-containing gas comprising fluorine gas and a fluorine-containing compound gas comprises a removal step for inducing contact between the fluorine-containing gas and at least one metal salt selected from the group consisting of metal chlorides, metal bromides, and metal iodides.