Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite

Abstract

Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of the zeolite 3 A, 4A or 5 A which is ion exchanged with alkali earth metal and is thermally treated at 150 to 600° C. for 0.5 to 100 hours so as to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom.

Description

TECHNICAL FIELD[0001]The present invention relates, in general, to the refinement of nitrogen trifluoride (NF3) gas and, more particularly, to a process for refining nitrogen trifluoride gas through the removal of carbon tetrafluoride (CF4) therefrom.BACKGROUND ART[0002]In the semiconductor industry, nitrogen trifluoride has a variety of applications, including as a fluorine source for plasma etch, a cleaning agent for CVD reactors, and a dry etchant for semiconductors. Besides, nitrogen trifluoride is useful as a rocket fuel. With the development of the semiconductor industry, the nitrogen trifluoride gas has been in great demand. The increasing demand for a gas without any environmental pollution increased the demand for the nitrogen triflurode gas by geometric progression. As a matter of course, nitrogen trifluoride gas for use in these applications is required to be of high purity.[0003]Nitrogen trifluoride can be prepared by various methods, including the direct fluoridation of...

AI Technical Summary

Benefits of technology

[0014]The process according to the present invention can effectively produce high purity nitrogen trifluoride, by the removal of CF4.

Problems solved by technology

Active carbon and active alumina, however, is highly disadvantageous in terms of labor and cost because they must be frequently changed with fresh adsorbent or regenerated owing to its poor capacity for adsorbing impurities, which result in an inevitable loss of NF3 gas.

This method, however, is disadvantageous in that an additional desorption process must be conducted, and the water content of the synthetic zeolite must be adjusted to be within a predetermined range.

In addition, the NF3 gas refined by this method has a purity of 93% or less so that it cannot be directly applied to fields requiring high purity.

However, the hydrothermal pretreatment for controlling the porosity of zeolite is difficult to conduct.

In addition, the available time period of the zeolite, that is, the saturation time period, is too short to apply the zeolite method in the commercialized mass purification of nitrogen trifluoride.